专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

51. 发明授权

US07109485B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US07109485B2
公开(公告)日：2006-09-19
申请号：US11108731
申请日：2005-04-19
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

52. 发明申请

US20060151697A1 Charged particle beam equipment and charged particle microscopy 有权
标题翻译：带电粒子束设备和带电粒子显微镜
公开(公告)号：US20060151697A1
公开(公告)日：2006-07-13
申请号：US11302323
申请日：2005-12-14
申请人： Hiromi Inada , Mitsugu Sato , Atsushi Takane
发明人： Hiromi Inada , Mitsugu Sato , Atsushi Takane
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , H01J37/222 , H01J37/265 , H01J2237/223 , H01J2237/2826 , H01J2237/3045
摘要： On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by a predetermined amount by a beam deflector in an image in which a specimen image is captured at a first magnification calibrated by using a specimen enlarged image of a specimen as a magnification standard, and also a displacement of the field of view before and after a deflection of the charged particle beam, extracted from a second specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by the predetermined amount by the beam deflector in an image in which a specimen image is captured at a second magnification, the second magnification is calibrated.
摘要翻译：基于从包括通过使带电粒子束偏转预定量而记录的视野的位移的第一标本图像提取的带电粒子束的偏转之前和之后的视场位移的基础上，通过在通过使用样本的样本放大图像作为放大标准校准的第一倍率捕获样本图像的图像中的光束偏转器，以及在充电的偏转之前和之后的视场位移从第二标本图像中提取出的粒子束，包括通过使带电粒子束在第二放大倍数下拍摄样本图像的图像中的光束偏转器偏转预定量而记录的视野的位移，校准第二放大倍数。

53. 发明申请

US20060071166A1 Charged particle beam apparatus and dimension measuring method 有权
标题翻译：带电粒子束装置和尺寸测量方法
公开(公告)号：US20060071166A1
公开(公告)日：2006-04-06
申请号：US11242129
申请日：2005-10-04
申请人： Mitsugu Sato , Katsuhiko Sakai , Atsushi Takane , Yoshihiko Nakayama
发明人： Mitsugu Sato , Katsuhiko Sakai , Atsushi Takane , Yoshihiko Nakayama
IPC分类号： G21K7/00
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译：提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。

54. 发明申请

US20050263702A1 Defect inspection and charged particle beam apparatus 有权
标题翻译：缺陷检查和带电粒子束装置
公开(公告)号：US20050263702A1
公开(公告)日：2005-12-01
申请号：US11139609
申请日：2005-05-31
申请人： Toshihide Agemura , Mitsugu Sato
发明人： Toshihide Agemura , Mitsugu Sato
IPC分类号： G01N23/225 , G01N23/00 , G01N27/00 , G01R31/302 , G01R31/307 , H01J37/147 , H01J37/153 , H01J37/22 , H01J37/28 , H01L21/66
CPC分类号： G01R31/307 , G01N23/2251 , H01J37/28 , H01J2237/15 , H01J2237/24564 , H01J2237/24592 , H01J2237/2487 , H01J2237/28 , H01J2237/2817
摘要： In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of ±75 μm or more. The defect inspection apparatus has a CAD navigation function associated with an image-shift function. The CAD navigation function uses coordinates for converting an image-shift moving amount to a DUT stage moving amount in communications between an image processing unit for processing charged particle beam images and a memory for storing information on circuit line patterns. The defect inspection provides the user with significantly improved usability.
摘要翻译：在将包含精细电路线图案的样本的电特性的多个探针与带电粒子束装置组合的缺陷检查装置中，带电粒子束装置即使图像偏移为±75，也降低了分辨率的劣化妈妈还是更多缺陷检查装置具有与图像移位功能相关联的CAD导航功能。 CAD导航功能在用于处理带电粒子束图像的图像处理单元和用于存储关于电路线图案的信息的存储器之间的通信中使用用于将图像移位移动量转换为DUT阶段移动量的坐标。缺陷检查为用户提供了显着提高的可用性。

55. 发明申请

US20050253083A1 Charged particle beam apparatus and charged particle beam irradiation method 有权
公开(公告)号：US20050253083A1
公开(公告)日：2005-11-17
申请号：US11185871
申请日：2005-07-21
申请人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
发明人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q30/02 , H01J3/14 , H01J29/70 , H01J37/153 , H01J37/28
CPC分类号： H01J37/153 , H01J2237/1506 , H01J2237/1534 , H01J2237/28
摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.

56. 发明申请

US20050199811A1 Image evaluation method and microscope 失效
标题翻译：图像评估方法和显微镜
公开(公告)号：US20050199811A1
公开(公告)日：2005-09-15
申请号：US11124252
申请日：2005-05-09
申请人： Tohru Ishitani , Mitsugu Sato , Hideo Todokoro , Tadashi Otaka , Takashi Iizumi , Atsushi Takane
发明人： Tohru Ishitani , Mitsugu Sato , Hideo Todokoro , Tadashi Otaka , Takashi Iizumi , Atsushi Takane
IPC分类号： H01J37/04 , H01J37/22 , H01J37/26 , H01J37/28 , G21K7/00
CPC分类号： H01J37/28 , H01J37/222 , H01J37/263 , H01J2237/2823
摘要： Image evaluation method capable of objectively evaluating the image resolution of a microscope image. An image resolution method is characterized in that resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image, averaging is performed over the entire area of the image or the portion of the image, and the averaged value is established as the resolution evaluation value of the entire area of the image or the portion of the image. This method eliminates the subjective impressions of the evaluator from evaluation of microscope image resolution, so image resolution evaluation values of high accuracy and good repeatability can be obtained.
摘要翻译：能够客观评价显微镜图像的图像分辨率的图像评价方法。图像分辨方法的特征在于，在图像的整个区域或图像的一部分上获得图像的部分区域中的分辨率，在图像的整个区域或图像的整个区域上进行平均化，建立平均值作为图像的整个区域或图像的部分的分辨率评估值。该方法消除了评估者对显微镜图像分辨率评估的主观印象，因此可以获得高精度和良好重复性的图像分辨率评估值。

57. 发明授权

US06936818B2 Charged particle beam apparatus 失效
标题翻译：带电粒子束装置
公开(公告)号：US06936818B2
公开(公告)日：2005-08-30
申请号：US10681116
申请日：2003-10-09
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： G01Q10/00 , G01Q30/04 , G01Q30/02 , H01J37/22 , H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

58. 发明授权

US06875984B2 Bio electron microscope and observation method of specimen 失效
标题翻译：生物电子显微镜和样品观察方法
公开(公告)号：US06875984B2
公开(公告)日：2005-04-05
申请号：US10621444
申请日：2003-07-18
申请人： Hiroshi Kakibayashi , Shigeyuki Hosoki , Yuji Takagi , Ryo Miyake , Kuniyasu Nakamura , Mitsugu Sato , Hiroyuki Kobayashi
发明人： Hiroshi Kakibayashi , Shigeyuki Hosoki , Yuji Takagi , Ryo Miyake , Kuniyasu Nakamura , Mitsugu Sato , Hiroyuki Kobayashi
IPC分类号： G01N23/04 , G01N1/28 , G01N23/225 , G01N33/483 , G01N37/00 , H01J37/20 , H01J37/22 , H01J37/26 , H01J37/28 , H01J49/44
CPC分类号： H01J37/22 , H01J37/26 , H01J2237/05 , H01J2237/2809 , H01J2237/2813
摘要： A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.
摘要翻译：一种生物电子显微镜和观察方法，可以通过低损伤和高对比度观察生物样品，进行高精度图像分析，并进行高通量样品制备。 1）在可能传输在预定条件下获得的样品的临界电子加速电压的1.2至4.2倍的加速电压下观察样品。 2）在样品和电子检测器之间提供小而简化结构的电子能过滤器，用于通过电子束在传输样品的电子束的规定能量区域内的电子束进行成像。 3）通过图像处理对样本中的观察图像（例如病毒或蛋白质）与已知病毒或蛋白质等参考图像之间的相似性进行定量分析。 4）使用MEMS技术将生物样品的制备方案制成芯片，然后将其安装在电子显微镜的样品台部分上，以将样品引入，准备和转移到样品架上。

59. 发明授权

US06864493B2 Charged particle beam alignment method and charged particle beam apparatus 有权
标题翻译：带电粒子束对准方法和带电粒子束装置
公开(公告)号：US06864493B2
公开(公告)日：2005-03-08
申请号：US10082288
申请日：2002-02-26
申请人： Mitsugu Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
发明人： Mitsugu Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
IPC分类号： H01J37/147 , H01J37/28 , H01J37/04
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/1501 , H01J2237/153
摘要： An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
摘要翻译：本发明的目的是提供一种带电粒子束装置和带电粒子束装置的对准方法，其使得即使当带电粒子束的状态改变时也能够容易地对准带电粒子束的光轴。本发明包括用于计算对物镜执行轴对准的对准偏转器的偏转量的计算装置，用于计算偏转量的多种计算方法被存储在计算装置中，以及选择装置，用于至少选择提供了一种计算方法。

60. 发明授权

US06855931B2 Scanning electron microscope and sample observation method using the same 有权
标题翻译：扫描电子显微镜和使用其的样品观察方法
公开(公告)号：US06855931B2
公开(公告)日：2005-02-15
申请号：US10815817
申请日：2004-04-02
申请人： Tetsuya Sawahata , Mitsugu Sato
发明人： Tetsuya Sawahata , Mitsugu Sato
IPC分类号： H01J37/22 , G01N23/225 , G01Q30/02 , G01Q30/20 , G21K7/00 , H01J37/141 , H01J37/21 , H01J37/256 , G01N23/00 , H01J37/28
CPC分类号： H01J37/256 , G01N23/2252 , H01J37/141 , H01J2237/2561
摘要： According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.
摘要翻译：根据本发明，在具有透镜系统的扫描电子显微镜中，新提供将物镜的电流设定为零或弱激励状态的第一低倍率模式，将物镜的电流设定为与加速电压的平方根成比例地变化的值的倍率模式。扫描电子显微镜具有在第一低倍率模式下进行正常的样本图像（二次电子图像）观察的结构，并且当执行X射线分析时，将第一低倍率模式切换到第二低倍率模式。结果，可以以低倍率模式进行样本图像（二次电子图像）观察和X射线分析。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式