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51. 发明授权

US07712206B2 Method for manufacturing a magnetic write head having a trailing shield with an accurately controlled trailing shield gap thickness 有权
标题翻译：一种制造具有后挡板的磁写头的方法，其具有精确控制的后屏蔽间隙厚度
公开(公告)号：US07712206B2
公开(公告)日：2010-05-11
申请号：US11439297
申请日：2006-05-22
申请人： Ming Jiang , Aron Pentek , Yi Zheng
发明人： Ming Jiang , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , H01R31/00
CPC分类号： G11B5/3143 , G11B5/112 , G11B5/1278 , G11B5/3163 , Y10T29/49021 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.
摘要翻译：一种用于构造用于垂直磁记录的磁写头的方法，该写头具有带后挡板的写极。在通过掩蔽和离子铣削磁性写入磁极层形成磁性写入磁极之后，沉积薄层的氧化铝。随后沉积一层薄薄的Rh。然后，沉积厚的氧化铝层，其厚度优选至少等于写入极层的高度。然后执行化学机械抛光，直到暴露在写柱的顶部（后缘）上的Rh层的一部分。然后进行诸如离子研磨的材料去除工艺以除去暴露在其下面的薄氧化铝层的暴露的Rh层。由于Rh拖尾间隙层是导电的，所以它也可以用作用于电镀磁性后屏蔽的种子层。

52. 发明授权

US07536774B2 Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head 失效
标题翻译：用于将台阶缺口和间隙凸起集成在写头中的极尖处的方法和装置
公开(公告)号：US07536774B2
公开(公告)日：2009-05-26
申请号：US11399821
申请日：2006-04-07
申请人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
发明人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , Y10T29/49043
摘要： A method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head is disclosed. A protective plated layer is formed over the bump to prevent the bump form being damaged during formation of the notch at the pole tip. The flux from the second pole outside of the track will be effectively channeled to the first pole piece under the alumina bump.
摘要翻译：公开了一种用于将写入头中的极尖处的台阶缺口和间隙凸起集成的方法和装置。在凸起之上形成保护镀层，以防止在极尖处形成凹口期间凸起形状被损坏。来自轨道外部的第二极的磁通将有效地引导到氧化铝凸块下方的第一极靴。

53. 发明申请

US20080144215A1 ELECTRICAL LAPPING GUIDE FOR FLARE POINT CONTROL AND TRAILING SHIELD THROAT HEIGHT IN A PERPENDICULAR MAGNETIC WRITE HEAD 有权
标题翻译：用于磁头控制和导航屏蔽的电气导线指南在一个完整的磁性写头
公开(公告)号：US20080144215A1
公开(公告)日：2008-06-19
申请号：US11611824
申请日：2006-12-15
申请人： Wen-Chien David Hsiao , Ming Jiang , Vladimir Nikitin , Aron Pentek , Yi Zheng
发明人： Wen-Chien David Hsiao , Ming Jiang , Vladimir Nikitin , Aron Pentek , Yi Zheng
IPC分类号： G11B5/147 , G11B5/23
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3163 , G11B5/3166 , G11B5/3173 , G11B5/6005 , Y10T29/49021 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetic write head using an electrical lapping guide to carefully control critical dimensions dining a lapping operation used to define an air bearing surface. The lapping guide is photolithographically patterned in a common photolithographic step with another write head structure so that special relation between the lapping guide and critical dimensions of the write head structure can be carefully maintained. For example, the electrical lapping guide can be patterned in a common photolithographic step as the write pole so that the location of the flare point can he carefully controlled with respect to the location of the lapping guide. A stitched flare structure can also be built together with the electrical lapping guide, then a self-aligned shield can be further built over this stitched flare structure so that both flare point and shield throat can be controlled tightly together by this electrical lapping guide during lapping process. Similarly, the lapping guide can be formed in a common photolithographic step with a trailing shield, so that a critical dimension such as throat height of the trailing shield can be carefully controlled with respect to the electrical lapping guide.
摘要翻译：一种使用电研磨导向器构造磁性写入头的方法，以仔细控制关键尺寸，以用于界定空气轴承表面的研磨操作。研磨导向器在具有另一写头结构的普通光刻步骤中光刻图案化，使得研磨引导件与写入头结构的关键尺寸之间的特殊关系可以被小心地保持。例如，电研磨引导件可以以普通的光刻步骤图案化为写入极，使得可以相对于研磨导轨的位置仔细地控制闪光点的位置。缝合的火炬结构也可以与电研磨导轨一起构建，然后可以在该缝合的火炬结构上进一步构建自对准的屏蔽，使得在研磨过程中这种电研磨引导件可以将喇叭口和屏蔽喉两者紧密地一起控制处理。类似地，研磨引导件可以在具有后挡板的普通光刻步骤中形成，使得可以相对于电研磨导轨小心地控制关键尺寸，例如后挡板的喉部高度。

54. 发明申请

US20070245557A1 Process to open connection vias on a planarized surface 有权
标题翻译：在平坦化表面上打开连接通孔的过程
公开(公告)号：US20070245557A1
公开(公告)日：2007-10-25
申请号：US11411555
申请日：2006-04-25
申请人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek
发明人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek
IPC分类号： H01K3/10
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49021 , Y10T29/49032 , Y10T29/49044 , Y10T29/49126 , Y10T29/49139 , Y10T29/49153 , Y10T29/49155 , Y10T29/49165 , Y10T29/49169
摘要： A method for forming a via in an alumina protective layer on a structure such as a magnetic write head for use in perpendicular magnetic recording. A substrate such as an alumina fill layer, magnetic shaping layer, etc. is formed with region having a contact pad formed therein. A structure such as a magnetic pole, and or magnetic trailing shield, is formed over the substrate and is covered with a thick layer of alumina. The alumina can be applied by a high deposition rate process that does not form voids or seams in the alumina layer. The alumina layer can then be planarized by a chemical mechanical polishing process (CMP) and then a mask structure, such as a photoresist mask, is formed over the alumina layer. The mask structure is formed with an opening disposed over the contact pad. A reactive ion mill is then performed to remove portions of the alumina layer that are exposed at the opening in the mask, thereby forming a via in the alumina layer. The mask can then be lifted off and an electrically conductive material can be deposited into the via. Forming the via by a subtractive method rather than by a liftoff process allows the alumina to be deposited in a manner that does not result in voids. The use of reactive ion milling allows the via to be well defined and formed with substantially vertical side walls rather than in a conical or outward spreading fashion as would be formed by other material removal processes such as wet etching.
摘要翻译：在用于垂直磁记录的诸如磁写头的结构上的氧化铝保护层中形成通孔的方法。在其中形成有形成有接触垫的区域形成诸如氧化铝填充层，磁性成形层等的基板。诸如磁极和/或磁性后屏蔽的结构形成在衬底之上，并被厚层氧化铝覆盖。可以通过在氧化铝层中不形成空隙或接缝的高沉积速率工艺来施加氧化铝。然后可以通过化学机械抛光工艺（CMP）将氧化铝层平坦化，然后在氧化铝层上形成诸如光致抗蚀剂掩模的掩模结构。掩模结构形成有设置在接触垫上方的开口。然后执行反应离子研磨机以除去在掩模中的开口处暴露的部分氧化铝层，从而在氧化铝层中形成通孔。然后可以将掩模剥离，并且可以将导电材料沉积到通孔中。通过减法法而不是通过剥离工艺形成通孔允许以不会导致空隙的方式沉积氧化铝。使用反应离子研磨允许通孔被良好地限定并且形成有基本垂直的侧壁，而不是以其它材料去除工艺（例如湿蚀刻）形成的锥形或向外扩展方式。

55. 发明申请

US20070236833A1 Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head 失效
标题翻译：用于将台阶缺口和间隙凸起集成在写头中的极尖处的方法和装置
公开(公告)号：US20070236833A1
公开(公告)日：2007-10-11
申请号：US11399821
申请日：2006-04-07
申请人： Daniel Bedell , Wen-Chien Hsiao , Ming Jiang , Hieu Lam , Kim Lee , Jyh-Shuey Lo , Aron Pentek
发明人： Daniel Bedell , Wen-Chien Hsiao , Ming Jiang , Hieu Lam , Kim Lee , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , Y10T29/49043
摘要： A method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head is disclosed. A protective plated layer is formed over the bump to prevent the bump form being damaged during formation of the notch at the pole tip. The flux from the second pole outside of the track will be effectively channeled to the first pole piece under the alumina bump.
摘要翻译：公开了一种用于将写入头中的极尖处的台阶缺口和间隙凸起集成的方法和装置。在凸起之上形成保护镀层，以防止在极尖处形成凹口期间凸起形状被损坏。来自轨道外部的第二极的磁通将有效地引导到氧化铝凸块下方的第一极靴。

56. 发明授权

US08619391B2 Magnetic write heads with bi-layer wrap around shields having dissimilar shield layer widths 有权
标题翻译：具有双层缠绕屏蔽的磁性写头具有不同的屏蔽层宽度
公开(公告)号：US08619391B2
公开(公告)日：2013-12-31
申请号：US12914543
申请日：2010-10-28
申请人： Yimin Hsu , Aron Pentek , Thomas Roucoux , Jing Zhang , Honglin Zhu
发明人： Yimin Hsu , Aron Pentek , Thomas Roucoux , Jing Zhang , Honglin Zhu
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/3163
摘要： Magnetic write heads and corresponding fabrication methods for bi-layer wrap around shields resulting in dissimilar shield layer widths are disclosed. A gap structure is formed around a main write pole for a magnetic write head. A wrap around shield for the main write pole is fabricated to include a first magnetic layer proximate to the main write pole and a second magnetic layer on the first magnetic layer. A width of the first magnetic layer is less than the width of the second magnetic layer, and back edges of the first and second magnetic layers are coplanar. Further, a throat height of the wrap around shield is maintained between the first and the second magnetic layers because their back edges are coplanar.
摘要翻译：公开了用于双层缠绕屏蔽的磁性写头和相应的制造方法，导致不同的屏蔽层宽度。在用于磁写头的主写磁极周围形成间隙结构。制造用于主写极的环绕屏蔽件，以包括靠近主写磁极的第一磁性层和第一磁性层上的第二磁性层。第一磁性层的宽度小于第二磁性层的宽度，第一和第二磁性层的后边缘是共面的。此外，由于它们的后边缘是共面的，缠绕屏蔽的喉部高度保持在第一和第二磁性层之间。

57. 发明授权

US08318031B2 Method for manufacturing a perpendicular magnetic write head having a tapered write pole 有权
标题翻译：一种具有锥形写入极的垂直磁性写入头的制造方法
公开(公告)号：US08318031B2
公开(公告)日：2012-11-27
申请号：US12748182
申请日：2010-03-26
申请人： Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
发明人： Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge and a tapered trailing edge. The method includes forming a non-magnetic bump player over a surface, forming a mask over the non-magnetic bump layer and performing a first ion milling to form a tapered back edge on the non-magnetic bump layer. A magnetic write pole material is then deposited over the surface and over the non-magnetic bump layer. Then a non-magnetic step structure is formed over the magnetic write pole material and an ion milling is performed to form a taper on the upper surface of the write pole. The write pole lateral dimensions can then be defined, and a non-magnetic bump formed over the tapered portion of the upper surface of the write pole. Another ion milling can then be performed to extend the taper of the surface of the write pole.
摘要翻译：一种用于制造具有带有锥形前缘和锥形后缘的写极的磁写头的方法。所述方法包括在表面上形成非磁性碰撞播放器，在非磁性凸块层上形成掩模，并执行第一离子铣削以在非磁性凸块层上形成锥形后缘。然后将磁性写入磁极材料沉积在表面上并在非磁性凸起层上方。然后在磁性写入磁极材料上形成非磁性阶梯结构，并且执行离子铣削以在写入极的上表面上形成锥形。然后可以限定写入极横向尺寸，并且在写入极的上表面的锥形部分上形成非磁性凸块。然后可以执行另一种离子铣削来延伸写极的表面的锥度。

58. 发明申请

US20120106002A1 MAGNETIC WRITE HEADS WITH BI-LAYER WRAP AROUND SHIELDS HAVING DISSIMILAR SHIELD LAYER WIDTHS 有权
标题翻译：带有双层屏蔽的磁性写头，具有不同的屏蔽层宽度
公开(公告)号：US20120106002A1
公开(公告)日：2012-05-03
申请号：US12914543
申请日：2010-10-28
申请人： Yimin Hsu , Aron Pentek , Thomas Roucoux , Jing Zhang , Honglin Zhu
发明人： Yimin Hsu , Aron Pentek , Thomas Roucoux , Jing Zhang , Honglin Zhu
IPC分类号： G11B5/127 , B05D5/12
CPC分类号： G11B5/3116 , G11B5/3163
摘要： Magnetic write heads and corresponding fabrication methods for bi-layer wrap around shields resulting in dissimilar shield layer widths are disclosed. A gap structure is formed around a main write pole for a magnetic write head. A wrap around shield for the main write pole is fabricated to include a first magnetic layer proximate to the main write pole and a second magnetic layer on the first magnetic layer. A width of the first magnetic layer is less than the width of the second magnetic layer, and back edges of the first and second magnetic layers are coplanar. Further, a throat height of the wrap around shield is maintained between the first and the second magnetic layers because their back edges are coplanar.
摘要翻译：公开了用于双层缠绕屏蔽的磁性写头和相应的制造方法，导致不同的屏蔽层宽度。在用于磁写头的主写磁极周围形成间隙结构。制造用于主写极的环绕屏蔽件，以包括靠近主写磁极的第一磁性层和第一磁性层上的第二磁性层。第一磁性层的宽度小于第二磁性层的宽度，第一和第二磁性层的后边缘是共面的。此外，由于它们的后边缘是共面的，缠绕屏蔽的喉部高度保持在第一和第二磁性层之间。

59. 发明申请

US20120094009A1 MAGNETIC WRITE HEAD FABRICATION WITH INTEGRATED ELECTRICAL LAPPING GUIDES 有权
标题翻译：具有集成电气导线指导的磁性写头制造
公开(公告)号：US20120094009A1
公开(公告)日：2012-04-19
申请号：US12904636
申请日：2010-10-14
申请人： Donald Allen , Jennifer Ai-Ming Leung , Aron Pentek , Thomas Roucoux
发明人： Donald Allen , Jennifer Ai-Ming Leung , Aron Pentek , Thomas Roucoux
IPC分类号： C23C16/52 , B05D5/00
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/6082 , Y10T29/49039 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.
摘要翻译：描述了使用分割间隙沉积工艺制造磁性写入头和电气研磨导向器（ELG）的方法。在磁性材料上执行移除过程以限定主写极并且为主写极定义相应的ELG。沉积第一非磁隙层。执行掩模和剥离处理以将导电材料沉积在沿着ELG的前边缘设置的第一间隙层上。然后沉积第二非磁性间隙层，并为写入极制造屏蔽。

60. 发明申请

US20110262774A1 METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD HAVING A WRAP AROUND TRAILING MAGNETIC SHIELD WITH A TAPERED SIDE GAP 有权
标题翻译：用于制造具有带隙边缘的带有磁带的磁带的磁性写头的方法
公开(公告)号：US20110262774A1
公开(公告)日：2011-10-27
申请号：US12766769
申请日：2010-04-23
申请人： Aron Pentek , Yi Zheng
发明人： Aron Pentek , Yi Zheng
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T428/1171
摘要： A magnetic write head having write pole and a wrap-around-trailing magnetic shield having side portions that are separated from the write pole by tapered non-magnetic side gap layers. The tapered non-magnetic side gap layers provide a non-magnetic side gap width that increases with increasing distance from the ABS, thereby providing optimal protection against adjacent track interference at the ABS while minimizing write field loss to the shield in regions away from the ABS.
摘要翻译：具有写磁极的磁写头和卷绕后磁屏蔽，其具有通过锥形非磁性侧间隙层与写极分离的侧部。锥形非磁性侧间隙层提供随着与ABS的距离的增加而增加的非磁性侧间隙宽度，从而为ABS提供最佳保护，以防止相邻的轨道干涉，同时最小化远离ABS的区域对屏蔽的写入场损失。

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