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    • 55. 发明授权
    • Projection aligner
    • 投影对准器
    • US06839124B2
    • 2005-01-04
    • US10327947
    • 2002-12-26
    • Yoshinori KobayashiShigetomo IshibashiMasato Hara
    • Yoshinori KobayashiShigetomo IshibashiMasato Hara
    • G03F7/20G03F9/00G03B27/42G01B11/00G03B27/54
    • G03F7/70225G03F7/70258G03F7/70275G03F7/70466G03F7/70475G03F7/70791G03F9/7003
    • A projection aligner scans a plurality of light beams over a mask in a main scanning direction to transfer an image of a mask pattern on an object by the light beams passed through the mask. The projection aligner has a plurality of optical systems for projecting light beams passed through the mask onto the object. Each of the optical system includes a lens unit, a reflector provided to one side of the lens unit and a deflector provided to the other side of the lens unit. The light beam passed through the mask is deflected by the deflector, passes through the lens unit, reflected back by the reflector, passes through the lens unit again, and deflected by the deflector toward the object. The size of the image formed by the light beam is varied by moving the reflector in the main scanning direction and moving the deflector in a direction perpendicular to the object. The location of the image on the object in the auxiliary direction is adjusted by further moving the reflector in the auxiliary direction.
    • 投影对准器在主扫描方向上扫描掩模上的多个光束,以通过通过掩模的光束将掩模图案的图像转印到物体上。 投影对准器具有多个光学系统,用于将通过掩模的光束投射到物体上。 每个光学系统包括透镜单元,设置在透镜单元的一侧的反射器和设置在透镜单元的另一侧的偏转器。 穿过掩模的光束被偏转器偏转,穿过透镜单元,被反射器反射回来,再次穿过透镜单元,并且被偏转器偏转到物体。 通过在主扫描方向上移动反射器并使偏转器沿垂直于物体的方向移动来改变由光束形成的图像的大小。 通过在辅助方向上进一步移动反射器来调整图像在辅助方向上的位置。
    • 57. 发明授权
    • Projection aligner
    • 投影对准器
    • US06727979B2
    • 2004-04-27
    • US10339301
    • 2003-01-10
    • Yoshinori KobayashiShigetomo IshibashiMasato Hara
    • Yoshinori KobayashiShigetomo IshibashiMasato Hara
    • G03B2742
    • G03B27/52
    • The projection aligner transfers the image of the pattern formed on the mask to the object by scanning a light beam across the mask and the object. The projection aligner includes a driving mechanism for synchronously moving the mask and the object and thereby scanning the light beam across the mask and the object in a predetermined beam scanning direction. The light beam scanning the mask passes through the mask and is projected onto the object by a projection optical system of which magnification is adjusted by a magnification adjusting mechanism. The magnification adjusting mechanism and the driving mechanism are controlled by a controller such that the difference between the magnification of said projection optical system and a velocity ratio of the mask and the object moved by the driving mechanism becomes below a predetermined maximum value which is determined based on a line width of the pattern formed on the mask.
    • 投影对准器通过扫描光束穿过掩模和物体将形成在掩模上的图案的图像转移到物体上。 投影对准器包括用于同步移动掩模和物体的驱动机构,从而以预定的光束扫描方向扫描光束穿过掩模和物体。 扫描掩模的光束通过掩模,并通过投影光学系统投影到物体上,投影光学系统通过放大调节机构来调节放大倍率。 放大调节机构和驱动机构由控制器控制,使得所述投影光学系统的放大率与由驱动机构移动的掩模和物体的速度比之间的差异变得低于基于确定的预定最大值 在形成在掩模上的图案的线宽上。
    • 58. 发明授权
    • Product environmental load evaluation method
    • 产品环境负荷评估方法
    • US06691044B2
    • 2004-02-10
    • US10101939
    • 2002-03-21
    • Yoshinori KobayashiKumiko AmemiyaKazuhito Haruki
    • Yoshinori KobayashiKumiko AmemiyaKazuhito Haruki
    • G06F1900
    • G06Q10/06
    • A product environmental load evaluation method comprises computing fuel input coefficients, inverse matrix coefficients and input coefficient matrix of imported goods referring to an Input-Output table regarding domestic goods, generating emission coefficients referring to an existing data stochastic document, estimating a direct emission matrix based on fuel input coefficients and emission coefficients, computing environmental load of the domestic goods based on the inverse matrix coefficients and direct emission matrix, computing overseas environmental load emission coefficients of the imported goods based on overseas parameter every addition of an imported good, computing imported good environmental load based on the input coefficient matrix of the imported goods and the overseas environmental load emission coefficients, and computing product environmental load by adding the domestic good environmental load to be provided fixedly and the imported good environmental load updated every addition of an imported good.
    • 产品环境负荷评估方法包括:参照关于国内商品的输入 - 输出表计算进口货物的燃料输入系数,逆矩阵系数和输入系数矩阵,参考现有数据随机文件产生排放系数,估计直接排放矩阵 对燃料输入系数和排放系数,根据逆矩阵系数和直接排放矩阵计算国内商品的环境负荷,根据海外参数计算进口货物的海外环境负荷排放系数,每增加一个进口商品,计算进口商品 基于进口货物的输入系数矩阵和海外环境负荷排放系数的环境负荷,以及通过增加国内良好环境负荷固定计算产品环境负荷,进口良好环境负荷更新 y加入进口商品。