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    • 55. 发明申请
    • PIEZOELECTRIC MATERIAL
    • 压电材料
    • US20090026408A1
    • 2009-01-29
    • US12135980
    • 2008-06-09
    • Kaoru MiuraToshihiro IfukuKenichi TakedaTetsuro FukuiHiroshi Funakubo
    • Kaoru MiuraToshihiro IfukuKenichi TakedaTetsuro FukuiHiroshi Funakubo
    • H01L41/187
    • H01L41/1871H01L41/43
    • The present invention provides a piezoelectric material which can be applied even to the MEMS technique, exhibits satisfactory piezoelectricity even at high ambient temperatures and is environmentally clean, namely, a piezoelectric material including an oxide obtained by forming a solid solution composed of two perovskite oxides A(1)B(1)O3 and A(2)B(2)O3 different from each other in crystalline phase, the oxide being represented by the following general formula (1): X{A(1)B(1)O3}−(1−X){A(2)B(2)O3}  (1) wherein “A(1)” and “A(2)” are each an element including an alkali earth metal and may be the same or different from each other; “B(1)” and “B(2)” each include two or more metal elements, and either one of “B(1)” and “B(2)” contains Cu in a content of 3 atm % or more; and “X” satisfies the relation 0
    • 本发明提供一种甚至可以应用于MEMS技术的压电材料,即使在高环境温度下也表现出令人满意的压电性,并且是环境清洁的,即包括通过形成由两种钙钛矿氧化物A形成的固溶体获得的氧化物的压电材料 (1)在结晶相中彼此不同的B(1)O 3和A(2)B(2)O 3,所述氧化物由以下通式(1)表示:<?in-line-formula description =“In (1)B(1)O3} - (1-X){A(2)B(2)O3}(1)<?在线公式 description =“In-line Formulas”end =“tail”?>其中“A(1)”和“A(2)”分别是包含碱土金属的元素,可以相同或不同; “B(1)”和“B(2)”各自包含两个或更多个金属元素,“B(1)”和“B(2)”中的任一个含有3atm%以上的Cu; 和“X”满足0