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51. 发明授权

US06708497B2 Gas turbine installation and an associated operating method 失效
标题翻译：燃气轮机安装和相关操作方法
公开(公告)号：US06708497B2
公开(公告)日：2004-03-23
申请号：US10183871
申请日：2002-06-28
申请人： Klaus Doebbeling , Hans-Erik Hansson , Dieter Winkler
发明人： Klaus Doebbeling , Hans-Erik Hansson , Dieter Winkler
IPC分类号： F02C330
CPC分类号： F01K21/047
摘要： The invention relates to a method of operating a gas turbine installation (1), compressed fresh air (6, 19, 38) is branched off after a compressor (2) and supplied to an evaporator device (14), in the evaporator device (14) feed water (17, 26, 28) is evaporated, while heat is supplied, and is mixed with the fresh air (6, 19, 38) in order to generate a steam/air mixture (22, 37), the steam/air mixture (22, 37) is fed back upstream of a gas turbine (10), the heat required for the evaporation of the feed water (17, 26, 28) is at least partially extracted from an exhaust gas (12) of the gas turbine (10). In order to improve the efficiency of the gas turbine installation (1), the feed water (17, 26, 28) runs down along a wall arrangement (39) heated by the exhaust gas (12) and is subjected to the fresh air (6, 19, 38). The feed water (17, 26, 28) evaporates and mixes with the fresh air (6, 19, 38), by which means the steam/air mixture (22, 37) forms for the recirculation.
摘要翻译：本发明涉及一种操作燃气轮机装置（1）的方法，压缩的新鲜空气（6,39,38）在压缩机（2）之后被分流并供应到蒸发装置（14），在蒸发器装置 14）供水（17,26,28）蒸发，同时供应热量，并与新鲜空气（6,19,38）混合以产生蒸汽/空气混合物（22,37），蒸汽 /空气混合物（22,37）被馈送到燃气轮机（10）的上游，用于蒸发给水（17,26,28）所需的热量至少部分地从排气（12）排出燃气轮机（10）。为了提高燃气轮机装置（1）的效率，供水（17,26,28）沿着由排气（12）加热的壁装置（39）向下延伸并且经受新鲜空气（ 6，19，38）。给水（17,26,28）蒸发并与新鲜空气（6,19,38）混合，由此形成用于再循环的蒸汽/空气混合物（22,37）。

52. 发明授权

US06497098B2 Method and device for generating hot combustion waste gases 失效
标题翻译：产生热燃废气的方法和装置
公开(公告)号：US06497098B2
公开(公告)日：2002-12-24
申请号：US09975325
申请日：2001-10-12
申请人： Timothy A. Griffin , Dieter Winkler , Richard Carroni
发明人： Timothy A. Griffin , Dieter Winkler , Richard Carroni
IPC分类号： F01K2506
CPC分类号： F23R3/40 , B01D53/22 , C01B13/0251 , C01B13/0255 , C01B2210/0046 , F23L7/007 , F23L2900/07001 , Y02E20/322 , Y02E20/344
摘要： The invention relates to a process for producing hot combustion waste gases (11), in particular for a gas turbine system. In a burner (2), a combustion that produces hot combustion waste gases (11) takes place. A portion (17) of the combustion waste gases (11) is branched off and fed to a first inlet (16) of an oxygen separation device (5). An oxygen-containing gas (20) is fed to a second inlet (23) of the oxygen separation device (5). The oxygen separation device (5) is provided with oxygen separation means (6) that remove oxygen from the oxygen-containing gas (20) and feed it to the branched-off waste gas (17), producing oxygen-containing gas (34) whose oxygen content has been reduced as well as oxygen-enriched, branched-off waste gas (25). The oxygen-enriched, branched-off waste gas (25) as well as a fuel (31) or a fuel/steam mixture are fed to the burner (2) and form a combustion mixture that burns in the burner (2) while forming the hot combustion waste gases (11). In order to improve the efficiency of such a method, the burner (2) contains a catalyzer that initiates and/or stabilizes the combustion.
摘要翻译：本发明涉及一种用于生产热燃烧废气（11）的方法，特别是用于燃气轮机系统。在燃烧器（2）中，产生产生热燃烧废气（11）的燃烧。燃烧废气（11）的一部分（17）被分支并供给到氧分离装置（5）的第一入口（16）。含氧气体（20）被供给到氧分离装置（5）的第二入口（23）。氧分离装置（5）设置有氧分离装置（6），其从含氧气体（20）中除去氧并将其供给到分支废气（17），产生含氧气体（34）其氧含量已经降低，以及富氧分支废气（25）。富氧分支废气（25）以及燃料（31）或燃料/蒸汽混合物被供给到燃烧器（2），并形成在燃烧器（2）中燃烧的燃烧混合物，同时形成热燃烧废气（11）。为了提高这种方法的效率，燃烧器（2）包含启动和/或稳定燃烧的催化剂。

53. 发明授权

US06247299B1 Method for feeding a gas turbine with both liquid and gaseous fuels 失效
标题翻译：为燃气轮机供给液体和气体燃料的方法
公开(公告)号：US06247299B1
公开(公告)日：2001-06-19
申请号：US08972146
申请日：1997-11-17
申请人： Johannes Buss , Klaus Döbbeling , Dieter Winkler
发明人： Johannes Buss , Klaus Döbbeling , Dieter Winkler
IPC分类号： F02C7224
CPC分类号： F23R3/36 , F02C6/18 , F02C7/224 , F02M31/18 , F05D2270/082 , F23K5/10 , F23K5/22 , F23R3/32 , Y02T10/126 , Y02T10/16 , Y02T50/677
摘要： A description is given of a method for feeding liquid and/or gaseous fuels to gas turbines, by means of which method the same feed path to the burner of the gas turbine can be used for both fuels, the liquid fuel being processed before being fed to the burner. This processing takes place in a fuel pre-evaporator which, for the purpose of processing the liquid fuel, has an evaporator tube 2, which is made of a material with good thermal conductivity, interacts with a heating device (3) and, at its one end, is connected to a feed device (4) for a flushing gas, and, at its other end, is connected to a fuel feed and discharge appliance (5).
摘要翻译：给出了向燃气涡轮机供给液体和/或气体燃料的方法的描述，借助于这种方法，燃气轮机的燃烧器的相同进料路径可以用于两种燃料，液体燃料在进料之前被加工到燃烧器。这种处理发生在燃料预蒸发器中，为了处理液体燃料，具有由具有良好导热性的材料制成的蒸发器管2与加热装置（3）相互作用，在其中一端连接到用于冲洗气体的进料装置（4），并且在另一端连接到燃料供给和排出装置（5）。

54. 发明授权

US06193940B1 Firing system for the improved performance of ethylene cracking furnaces 失效
标题翻译：用于改进乙烯裂解炉性能的燃烧系统
公开(公告)号：US06193940B1
公开(公告)日：2001-02-27
申请号：US09217210
申请日：1998-12-21
申请人： Shin G. Kang , Galen H. Richards , Majed A. Toqan , Dieter Winkler
发明人： Shin G. Kang , Galen H. Richards , Majed A. Toqan , Dieter Winkler
IPC分类号： F28D2100
CPC分类号： F23C6/045 , F23C5/00 , F23C7/02 , F23C9/006 , F23C9/08
摘要： A firing system for a thermal cracking furnace is provided. The firing system includes a plurality of air inlets for introducing air into the furnace interior, the air inlets being generally arrayed along a lengthwise row on the floor of the furnace at a predetermined proximity to one of the sidewalls, and a plurality of start up fuel ports disposed intermediate the row of air inlets and the radiant coils of the furnace. The firing system also includes a plurality of normal operation fuel ports disposed intermediate the row of start up ports and the radiant coils and an assembly for selectively controlling the overall supply of fuel to the start up fuel ports and the normal fuel operation ports to effect supply of fuel solely to the start up fuel ports during a start up mode of operation of the firing system and supply of fuel solely to the normal operation fuel ports during a normal mode of operation.
摘要翻译：提供了一种用于热裂解炉的烧制系统。燃烧系统包括用于将空气引入炉内部的多个空气入口，空气入口通常沿着位于炉底的长度方向排布在预定接近一个侧壁处，并且多个启动燃料端口设置在炉排的空气入口排和辐射线圈的中间。燃烧系统还包括设置在起动端口列和辐射线圈之间的多个正常操作燃料口和用于选择性地控制向起动燃料端口和正常燃料操作口供应的燃料的总成以实现供给的燃料仅在燃烧系统的启动操作模式期间启动燃料端口，并且在正常操作模式期间仅向正常操作燃料端口供应燃料。

55. 发明授权

US08735847B2 High resolution gas field ion column with reduced sample load 有权
标题翻译：高分辨率气田离子柱，样品负荷降低
公开(公告)号：US08735847B2
公开(公告)日：2014-05-27
申请号：US12277818
申请日：2008-11-25
申请人： Helmut Banzhof , Juergen Frosien , Dieter Winkler
发明人： Helmut Banzhof , Juergen Frosien , Dieter Winkler
IPC分类号： G21K1/08
CPC分类号： H01J37/04 , H01J37/28 , H01J2237/0473 , H01J2237/0475 , H01J2237/0492 , H01J2237/08 , H01J2237/0807
摘要： A method of operating a focused ion beam device having a gas field ion source is described. According to some embodiments, the method includes emitting an ion beam from a gas field ion source, providing an ion beam column ion beam energy in the ion beam column which is higher than the final beam energy, decelerating the ion beam for providing a final beam energy on impingement of the ion beam on the specimen of 1 keV to 4 keV, and imaging the specimen.
摘要翻译：描述了具有气体场离子源的聚焦离子束装置的操作方法。根据一些实施例，该方法包括从气体场离子源发射离子束，在离子束列中提供高于最终光束能量的离子束柱离子束能量，使离子束减速以提供最终光束将离子束撞击在1keV至4keV的样品上的能量，并对样品进行成像。

56. 发明申请

US20130270438A1 SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD OF OPERATING THEREOF 有权
标题翻译：可切换的多视角检测器，其光学器件及其操作方法
公开(公告)号：US20130270438A1
公开(公告)日：2013-10-17
申请号：US13543593
申请日：2012-07-06
申请人： Stefan LANIO , Gerald Schönecker , Dieter Winkler
发明人： Stefan LANIO , Gerald Schönecker , Dieter Winkler
IPC分类号： H01J37/244 , H01J37/21
CPC分类号： H01J37/09 , H01J37/147 , H01J37/244 , H01J2237/0453 , H01J2237/04756 , H01J2237/24465 , H01J2237/24592 , H01J2237/2817
摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.
摘要翻译：描述了用于检测信号光束的二次带电粒子检测装置。该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位孔开口和至少一个外孔开口。

57. 发明申请

US20090121160A1 CHARGED PARTICLE SOURCE WITH AUTOMATED TIP FORMATION 有权
标题翻译：充电颗粒源自动提示形成
公开(公告)号：US20090121160A1
公开(公告)日：2009-05-14
申请号：US12253042
申请日：2008-10-16
申请人： Dieter Winkler , Udo Weigel , Stefan Grimm
发明人： Dieter Winkler , Udo Weigel , Stefan Grimm
IPC分类号： G01J1/00
CPC分类号： H01J37/073 , H01J27/26 , H01J37/08 , H01J37/265 , H01J37/304 , H01J2237/06341 , H01J2237/0805 , H01J2237/0807 , H01J2237/30466 , H01J2237/30477 , H01J2237/31749
摘要： A charged particle beam device is described. The device includes an emitter unit including an emitter tip; a voltage supply unit adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit for measuring an emitter characteristic; and a control unit adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.
摘要翻译：描述带电粒子束装置。该装置包括发射器单元，其包括发射极尖端; 电压供应单元，适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件，其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元; 以及控制单元，适于接收来自测量单元的信号并用于控制脉冲电压供应构件。

58. 发明申请

US20070145269A1 ELECTRON ANTI-FOGGING BAFFLE USED AS A DETECTOR 失效
标题翻译：作为检测器使用的电子防雾剂
公开(公告)号：US20070145269A1
公开(公告)日：2007-06-28
申请号：US11537062
申请日：2006-09-29
申请人： BENYAMIN BULLER , William Devore , Juergen Frosien , Richard Lozes , Henry Pearce-Percy , Dieter Winkler
发明人： BENYAMIN BULLER , William Devore , Juergen Frosien , Richard Lozes , Henry Pearce-Percy , Dieter Winkler
IPC分类号： G21K7/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/244 , H01J2237/004 , H01J2237/0213 , H01J2237/0262 , H01J2237/2448 , H01J2237/24571
摘要： Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons collected thereby may be read out, for example, as a current signal. Thus, for such embodiments, the baffle arrangement may double as a detector, allowing an image of surface (e.g., a mask or substrate surface) to be generated.
摘要翻译：提供了有助于测量由防雾挡板装置收集的散射电子量的方法和装置。对于一些实施例，通过将引线附接到挡板装置的电隔离（浮动）部分，由此收集的散射电子的量可以例如被读出为电流信号。因此，对于这样的实施例，挡板装置可以作为检测器加倍，从而允许产生表面（例如，掩模或衬底表面）的图像。

59. 发明申请

US20070138404A1 Chamber with low electron stimulated desorption 审中-公开
标题翻译：具有低电子刺激解吸的室
公开(公告)号：US20070138404A1
公开(公告)日：2007-06-21
申请号：US10571519
申请日：2004-09-09
申请人： Juergen Frosien , Thomas Jasinski , Dieter Winkler
发明人： Juergen Frosien , Thomas Jasinski , Dieter Winkler
IPC分类号： G01K1/08
CPC分类号： H01J37/16 , H01J5/02 , H01J2237/188
摘要： The present invention provides a charged particle emission component (100) for providing a charged particle beam (17) to a chamber of a charged particle beam column. The device comprises a gun chamber for housing the charged particle emission component; an emitter (16) for emitting a beam of charged particles; at least one beam shaping element (109; 18; 108; 402); and a residual gas diffusion barrier (106; 206) directly subsequent the emitter.
摘要翻译：本发明提供了一种用于向带电粒子束柱的腔室提供带电粒子束（17）的带电粒子发射部件（100）。该装置包括用于容纳带电粒子发射部件的枪室; 用于发射带电粒子束的发射器（16）; 至少一个光束成形元件（109; 18; 108; 402）; 和直接在发射器之后的残留气体扩散阻挡层（106; 206）。

60. 发明申请

US20070085019A1 Cooling module for charged particle beam column elements 有权
标题翻译：用于带电粒子束柱元件的冷却模块
公开(公告)号：US20070085019A1
公开(公告)日：2007-04-19
申请号：US11240279
申请日：2005-09-30
申请人： Thomas Jasinski , Dieter Winkler , William Eckes
发明人： Thomas Jasinski , Dieter Winkler , William Eckes
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/002
摘要： We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.
摘要翻译：我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性带电粒子束柱。

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