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    • 59. 发明授权
    • Method for fabricating NAND type dual bit nitride read only memory
    • 用于制造NAND型双位氮化物只读存储器的方法
    • US07179710B2
    • 2007-02-20
    • US11171353
    • 2005-07-01
    • Chien-Hung Liu
    • Chien-Hung Liu
    • H01L21/336
    • H01L27/11568H01L27/115H01L29/513H01L29/518H01L29/7923
    • A NAND type dual bit nitride read only memory and a method for fabricating thereof are provided. Firstly, a plurality of isolation layers, which are spaced and parallel to each other are formed in the substrate. Next, a plurality of word lines and a plurality of oxide-nitride-oxide (ONO) stack structures are formed on the substrate. The word lines are spaced and parallel to each other, and also the word lines are perpendicular to the isolation layers. Each of the ONO stack structure is located between the corresponding word line and the substrate. And then a plurality of discontinuous bit lines, which are located between the word lines and between the isolation layers are formed on the substrate. The structure of the present invention of the NAND type dual bit nitride read only memory is similar to that of a complementary metal-oxide semiconductor (CMOS), and their fabrication processes are fully compatible.
    • 提供NAND型双位氮化物只读存储器及其制造方法。 首先,在衬底中形成彼此间隔开并平行的多个隔离层。 接下来,在基板上形成多个字线和多个氧化物 - 氮化物 - 氧化物(ONO)堆叠结构。 字线彼此间隔开并平行,字线也垂直于隔离层。 每个ONO堆叠结构位于相应的字线和基板之间。 然后在衬底上形成位于字线之间和隔离层之间的多个不连续位线。 本发明的NAND型双位氮化物只读存储器的结构类似于互补金属氧化物半导体(CMOS)的结构,并且它们的制造工艺是完全兼容的。