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    • 55. 发明申请
    • Confocal pulse stretcher
    • 共焦脉冲担架
    • US20070237192A1
    • 2007-10-11
    • US11394512
    • 2006-03-31
    • Palash DasThomas HofmannGang Lei
    • Palash DasThomas HofmannGang Lei
    • H01S3/10H01S3/03
    • H01S3/0057G03F7/7055H01S3/225
    • A gas discharge laser system producing a laser output pulse and a method of operating such a system is disclosed which may comprise a pulse stretcher which may comprise a laser output pulse optical delay initiating optic directing a portion of the laser output pulse along a laser system output pulse optical axis and diverting a portion of the output pulse into an optical delay having an optical delay path and which may comprise a plurality of confocal resonators in series aligned to deliver an output of the optical delay to the laser output pulse optical delay initiating optic; an optical axis alignment mechanism comprising an radial mirror positioning mechanism operable to position the output of the optical delay to the align with the portion of the laser output pulse transmitted along the optical axis of the portion of the laser system output pulse transmitted by the laser output pulse optical delay initiating optic.
    • 公开了一种产生激光输出脉冲的气体放电激光器系统和一种操作这种系统的方法,其可以包括脉冲展宽器,其可以包括激光输出脉冲光学延迟启动光学器件,以将激光输出脉冲的一部分沿着激光系统输出 脉冲光轴并将输出脉冲的一部分转换成具有光学延迟路径的光学延迟,并且可以包括串联对准的多个共焦谐振器,以将光学延迟的输出传递到激光输出脉冲光学延迟启动光学器件; 光轴对准机构,其包括径向镜定位机构,其可操作以将光学延迟的输出定位成与激光输出脉冲的沿激光输出脉冲发射的激光系统输出脉冲部分的光轴传输的部分对准 脉冲光学延迟启动光学器件。