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51. 发明授权

US06686294B2 Method and apparatus for etching silicon nitride film and manufacturing method of semiconductor device 失效
标题翻译：用于蚀刻氮化硅膜的方法和装置及半导体器件的制造方法
公开(公告)号：US06686294B2
公开(公告)日：2004-02-03
申请号：US09816403
申请日：2001-03-26
申请人： Kenji Kawai
发明人： Kenji Kawai
IPC分类号： H01L21302
CPC分类号： H01L21/31116 , H01L21/31612 , H01L21/3185
摘要： An etching method used to selectively etch a silicon nitride film is achieved that enables the selective ratio of the silicon nitride film relative to a silicon oxide film to be sufficiently high. The etching method uses a reactive ion etching apparatus including a process chamber holding herein a substrate to be etched, gas supply means for supplying a reactant gas into the process chamber, and an upper electrode and a lower electrode provided within the process chamber and applied with high-frequency currents. The etching is performed under the conditions that the reactant gas includes halogen-based gas, the pressure of the reactant gas in the chamber is 12.0 Pa-66.7 Pa, the flow rate of the reactant gas supplied into the chamber is 0.1 liter/min-0.55 liter/min, and the distance between the upper and lower electrodes is 50 mm-120 mm.
摘要翻译：实现了用于选择性地蚀刻氮化硅膜的蚀刻方法，其使氮化硅膜相对于氧化硅膜的选择比足够高。蚀刻方法使用反应离子蚀刻装置，其包括在此保持要蚀刻的基板的处理室，用于将反应气体供给到处理室中的气体供给装置，以及设置在处理室内的上部电极和下部电极，高频电流。在反应气体包括卤素系气体，室内的反应气体的压力为12.0Pa〜66.7Pa的条件下进行蚀刻，供给到室内的反应气体的流量为0.1升/ 0.55升/分钟，上下电极之间的距离为50mm〜120mm。

52. 发明授权

US06452226B2 Non-volatile semiconductor memory device and manufacturing method thereof 有权
标题翻译：非易失性半导体存储器件及其制造方法
公开(公告)号：US06452226B2
公开(公告)日：2002-09-17
申请号：US09790700
申请日：2001-02-23
申请人： Kenji Kawai , Hajime Kimura , Kazuyuki Ohmi
发明人： Kenji Kawai , Hajime Kimura , Kazuyuki Ohmi
IPC分类号： H01L2972
CPC分类号： H01L27/11521 , H01L21/28273 , H01L27/115 , H01L29/42324
摘要： A non-volatile semiconductor memory device and a manufacturing method of the same where an etching residue generating short-circuit between gates is made harmless or a device is miniaturized are obtained. The method includes the steps of forming on a semiconductor substrate, a first gate layer and a second gate layer, forming a second gate electrode by etching the second gate layer, forming a first gate electrode by etching the first gate layer using the second gate electrode as a mask, and removing a residue left on a step portion by isotropic etching.
摘要翻译：获得了非易失性半导体存储器件及其制造方法，其中在栅极之间产生短路的蚀刻残留变得无害或器件小型化。该方法包括以下步骤：在半导体衬底上形成第一栅极层和第二栅极层，通过蚀刻第二栅极层形成第二栅电极，通过使用第二栅电极蚀刻第一栅极层来形成第一栅电极作为掩模，并通过各向同性蚀刻除去残留在台阶部分上的残留物。

53. 发明授权

US6141047A Image signal processing apparatus and image pickup device 失效
标题翻译：图像信号处理装置和图像拾取装置
公开(公告)号：US6141047A
公开(公告)日：2000-10-31
申请号：US744272
申请日：1996-11-06
申请人： Kenji Kawai , Koji Takahashi
发明人： Kenji Kawai , Koji Takahashi
IPC分类号： H04N5/202 , H04N5/235 , H04N5/238 , H04N5/243 , H04N9/73
CPC分类号： H04N5/202 , H04N5/235 , H04N5/2352 , H04N5/238 , H04N5/243
摘要： Fine operation processing such as nonlinear processing is performed in units of frames in correspondence with each photographing frame. In order to effectively utilize the dynamic range of a digital processing circuit, there is provided an image processing apparatus which includes a varying circuit for varying the signal level in correspondence with the photographing contents, an A/D converter for converting an output varied by the varying circuit into a digital signal, an image memory for storing image information output from the A/D converter, an evaluation circuit for evaluating the image information, an operation circuit for performing operation processing of a signal output from the image memory, and a control circuit for controlling the varying circuit and the operation circuit on the basis of the evaluation result of the evaluation circuit. There is also provided an image pickup device in which the varying circuit includes an iris control circuit, a shutter speed control circuit, or a gain control circuit, and varies the signal level using the circuit.
摘要翻译：以与各拍摄帧对应的帧为单位进行非线性处理等精细的动作处理。为了有效地利用数字处理电路的动态范围，提供了一种图像处理装置，其包括用于根据拍摄内容改变信号电平的变化电路，用于转换由变换电路转换为数字信号;图像存储器，用于存储从A / D转换器输出的图像信息;评估电路，用于评估图像信息;操作电路，用于执行从图像存储器输出的信号的操作处理;以及控制电路，用于根据评估电路的评估结果控制变化电路和运行电路。还提供了一种图像拾取装置，其中变化电路包括光圈控制电路，快门速度控制电路或增益控制电路，并且使用电路改变信号电平。

54. 发明授权

US5819254A Method of transferring data between relational database tables 失效
标题翻译：在关系数据库表之间传输数据的方法
公开(公告)号：US5819254A
公开(公告)日：1998-10-06
申请号：US685237
申请日：1996-07-23
申请人： Kenji Kawai
发明人： Kenji Kawai
IPC分类号： G06F17/30
CPC分类号： G06F17/30595 , Y10S707/99932 , Y10S707/99943
摘要： A method of generating a computer system to determine a sequence of data transfers required to move data from one or more tables in a source database into a corresponding destination table in a relational database. A randomly ordered list of destination tables is created and sorted such that the destination tables are arranged in a least dependent order so that data is moved into tables before data is moved into tables that contain foreign keys.
摘要翻译：一种生成计算机系统以确定将数据从源数据库中的一个或多个表移动到关系数据库中的相应目的地表所需的数据传输序列的方法。创建和排序目的地表的随机排序列表，使得目的地表以最小依赖的顺序排列，以便在将数据移动到包含外键的表之前将数据移动到表中。

55. 发明授权

US5717924A Method and apparatus for modifying existing relational database schemas to reflect changes made in a corresponding object model 失效
标题翻译：用于修改现有关系数据库模式以反映相应对象模型中所做更改的方法和装置
公开(公告)号：US5717924A
公开(公告)日：1998-02-10
申请号：US499392
申请日：1995-07-07
申请人： Kenji Kawai
发明人： Kenji Kawai
IPC分类号： G06F12/00 , G06F17/30
CPC分类号： G06F17/30595 , G06F17/30607 , Y10S707/99942 , Y10S707/99943
摘要： An object model comprises one or more semantic objects that represent items about which data is stored in a relational database in a computer system. Each semantic object has one or more components that define the data stored for each item. The object model is mapped into a current relational database schema. As a user makes changes to the model the computer system generates a proposed relational database schema, and the differences between the current relational database schema and the proposed relational database schema are determined. The relation database is modified to reflect changes made in the corresponding object model based upon the differences between the current and proposed relational database schemas.
摘要翻译：对象模型包括一个或多个表示在计算机系统中的数据存储在关系数据库中的项的语义对象。每个语义对象都有一个或多个组件来定义为每个项目存储的数据。对象模型被映射到当前的关系数据库模式。当用户对模型进行更改时，计算机系统生成提出的关系数据库模式，并确定当前关系数据库模式与提出的关系数据库模式之间的差异。修改关系数据库以反映基于当前和提出的关系数据库模式之间的差异的相应对象模型中所做的更改。

56. 发明授权

US5548749A Semantic orbject modeling system for creating relational database schemas 失效
标题翻译：用于创建关系数据库模式的语义对象建模系统
公开(公告)号：US5548749A
公开(公告)日：1996-08-20
申请号：US145997
申请日：1993-10-29
申请人： David M. Kroenke , Christopher C. Olds , Kenji Kawai , Lee I. Eggebroten
发明人： David M. Kroenke , Christopher C. Olds , Kenji Kawai , Lee I. Eggebroten
IPC分类号： G06F12/00 , G06F20060101 , G06F17/30 , G06F19/00 , G06F15/40
CPC分类号： G06F17/30595 , G06F17/30607 , Y10S707/99943
摘要： A computer-based system for allowing a user to create a relational database schema. The system allows a user to create a semantic object data model of the database schema. The semantic object data model is defined by one or more semantic objects, each of which includes one or more attributes that describe a characteristic of the semantic objects. The attributes are defined as being either simple value attributes that describe a single characteristic of the semantic object; group attributes that include one or more member attributes that collectively describe a characteristic of the semantic object; formula attributes that set forth a computation that describes a characteristic of a semantic object; or object link attributes that define a relationship between two or more semantic objects. Once the semantic object data model is created, the system validates the semantic objects to ensure no modeling errors have been made and transforms the semantic objects and their included attributes into a plurality of relational database tables that will store data as defined by the semantic object data model.
摘要翻译：一种基于计算机的系统，用于允许用户创建关系数据库模式。该系统允许用户创建数据库模式的语义对象数据模型。语义对象数据模型由一个或多个语义对象定义，每个语义对象包括描述语义对象的特征的一个或多个属性。属性被定义为描述语义对象的单一特征的简单值属性; 组属性，其包括共同描述语义对象的特征的一个或多个成员属性; 公式属性，用于描述描述语义对象特征的计算; 或定义两个或多个语义对象之间关系的对象链接属性。一旦语义对象数据模型被创建，系统验证语义对象，以确保没有建模错误，并将语义对象及其包含的属性转换成多个关系数据库表，其将存储由语义对象数据定义的数据模型。

57. 发明授权

US4915979A Semiconductor wafer treating device utilizing ECR plasma 失效
标题翻译：采用ECR等离子体的半导体晶片处理装置
公开(公告)号：US4915979A
公开(公告)日：1990-04-10
申请号：US279016
申请日：1988-12-02
申请人： Tomoaki Ishida , Nobuo Fujiwara , Kyusaku Nishioka , Moriaki Akazawa , Teruo Shibano , Kenji Kawai
发明人： Tomoaki Ishida , Nobuo Fujiwara , Kyusaku Nishioka , Moriaki Akazawa , Teruo Shibano , Kenji Kawai
IPC分类号： H01L21/302 , H01J37/32 , H01L21/205 , H01L21/3065 , H01L21/31
CPC分类号： H01J37/32357
摘要： A semiconductor wafer treating device utilizing a gas plasma generated by electron cyclotron resonance (ECR) is disclosed whch comprises a wafer treating chamber and a plasma generating chamber communicating with the wafer treating chamber. Microwave energy at a frequency of not more than 2 GHz and not less than 100 MHz is supplied to the plasma generating chamber which is surrounded by a solenoidal coil and produces a magnetic field in the plasma generating chamber and in the wafer treating chamber to produce ECR and transport the plasma generated by ECR to the wafer. Thus, the Larmor radius of the electrons moving in helical paths in electron cyclotron resonance in the plasma generating chamber is optimized to make the plasma spatially uniform. Consequently, the uniformity of the treatment on the wafer is improved.
摘要翻译：公开了一种利用电子回旋共振（ECR）产生的气体等离子体的半导体晶片处理装置，包括晶片处理室和与晶片处理室连通的等离子体产生室。将频率不大于2GHz且不小于100MHz的微波能量提供给由螺线管线圈包围的等离子体发生室，并在等离子体发生室和晶片处理室中产生磁场以产生ECR 并将由ECR产生的等离子体输送到晶片。因此，优化了在等离子体发生室中的电子回旋共振中在螺旋路径中移动的电子的拉莫半径使得等离子体在空间上均匀。因此，提高了晶片上的处理的均匀性。

58. 发明授权

US4877509A Semiconductor wafer treating apparatus utilizing a plasma 失效
标题翻译：利用等离子体的半导体晶片处理装置
公开(公告)号：US4877509A
公开(公告)日：1989-10-31
申请号：US269688
申请日：1988-11-10
申请人： Toshiaki Ogawa , Nobuo Fujiwara , Kenji Kawai , Teruo Shibano , Hiroshi Morita , Kyusaku Nishioka
发明人： Toshiaki Ogawa , Nobuo Fujiwara , Kenji Kawai , Teruo Shibano , Hiroshi Morita , Kyusaku Nishioka
IPC分类号： H01L21/302 , C23C16/511 , H01J37/32 , H01L21/205 , H01L21/3065 , H01L21/31
CPC分类号： H01J37/32293 , C23C16/511 , H01J37/32192 , H01J37/32678
摘要： An apparatus for treating semiconductor wafers utilizing a plasma generated by electron cyclotron resonance (ECR) is disclosed in which a microwave is supplied to a plasma generating chamber via a rectangular waveguide, a rectangular-to-circular microwave converter, and a circular polarization converter. The polarization converter may comprise a phase shift plate of a dielectric material or an electrically conductive material disposed in a circular waveguide in the form of a metallic cylinder. The polarization converter transforms a circular TE.sub.11 mode microwave supplied from the rectangular-to-circular microwave converter to a circularly polarized one by rotating the direction of the electric field of the microwave in the TE.sub.11 mode one complete turn in one period of the microwave. Thus, the electric field strength of the microwave supplied to the plasma generating chamber is averaged over the time along the circumferential direction in the plasma generating chamber to make the density of plasma generation therein spatially uniform. The spatially uniformly distributed plasma generated in the plasma generating chamber is conveyed to the wafer in the wafer treating chamber to effect a treatment of the wafer.
摘要翻译：公开了一种利用电子回旋共振（ECR）产生的等离子体处理半导体晶片的装置，其中通过矩形波导，矩形到圆形微波转换器和圆偏振转换器将微波提供给等离子体发生室。偏振转换器可以包括介电材料的相移板或设置在金属圆筒形状的圆形波导中的导电材料。在微波的一个周期内，通过在TE11模式一周内旋转微波的电场方向，将由矩形到圆形的微波转换器提供的循环TE11模式的微波变换成圆偏振的微波。因此，供给到等离子体发生室的微波的电场强度在等离子体发生室中沿着圆周方向的时间平均化，使得其中等离子体产生的密度在空间上均匀。在等离子体发生室中产生的空间均匀分布的等离子体被输送到晶片处理室中的晶片，以对晶片进行处理。

59. 发明授权

US4257778A Process for producing synthetic coking coal of high volatile matter content 失效
标题翻译：高挥发物含量的合成焦煤的生产工艺
公开(公告)号：US4257778A
公开(公告)日：1981-03-24
申请号：US70469
申请日：1979-08-28
申请人： Tadashi Murakami , Mamoru Yamane , Toshio Tokairin , Kenji Kawai
发明人： Tadashi Murakami , Mamoru Yamane , Toshio Tokairin , Kenji Kawai
IPC分类号： C10B57/04 , C10B39/04 , C10B55/00 , C10C3/14 , C10C3/18 , C10G9/00 , C10G9/14 , C10M7/00
CPC分类号： C10B55/00 , C10B39/04
摘要： A process for producing a synthetic coking coal of high volatile matter content by thermal cracking of a heavy hydrocarbon through the delayed coking process comprising heating said heavy hydrocarbon in a furnace to a temperature between about 380.degree. C. and 500.degree. C. and sufficient to initiate cracking; introducing said heated heavy hydrocarbon into a coking drum where it is maintained at a temperature and for a time sufficient to effect cracking to thereby produce a thermally cracked residue having a volatile matter content of from about 25 to 45 wt % and a Gieseler fluidity of at least about 50,000 ddpm; withdrawing said thermally cracked residue from the coking drum at a temperature selected so as to satisfy the relation:T.ltoreq.0.293x.sup.2 -26.12x+790where T is the temperature (.degree.C.) of the thermally cracked residue; x is the volatile matter content of the residue (wt %) and is in the range of from about 25 to 45 wt %, and bringing said residue into contact with water for cooling and solidification; and the synthetic coking coal product.
摘要翻译：一种通过延迟焦化工艺通过重质烃的热裂解生产高挥发物含量的合成焦煤的方法，包括将炉中的重质烃加热至约380℃至500℃之间的温度，引发开裂; 将所述加热的重质烃引入焦化鼓中，在其中将其保持在足以实现裂化的温度和时间，从而产生挥发性物质含量为约25至45重量％的热裂解残余物，并且将Gieseler流动性为至少约50,000点在选择的温度下从焦化鼓中取出所述热裂化残渣，以满足以下关系：T <= 0.293×26.12×+ 790其中T是热裂化残余物的温度（℃）; x是残渣的挥发物含量（重量％），在约25〜45重量％的范围内，使所述残渣与水接触以进行冷却和固化; 和合成焦煤产品。

60. 发明授权

US09085124B2 Heat-sealable layered polypropylene resin film and package 有权
标题翻译：热封层压聚丙烯树脂薄膜和包装
公开(公告)号：US09085124B2
公开(公告)日：2015-07-21
申请号：US10594057
申请日：2005-02-18
申请人： Kenji Kawai , Hirokazu Oogi , Naonobu Oda , Tadashi Nakaya , Tooru Imai , Yuka Sako
发明人： Kenji Kawai , Hirokazu Oogi , Naonobu Oda , Tadashi Nakaya , Tooru Imai , Yuka Sako
IPC分类号： B32B5/16 , B32B27/00 , B32B27/08 , B32B27/32
CPC分类号： B32B27/32 , B32B27/08 , B32B2250/03 , B32B2250/242 , B32B2307/31 , B32B2439/70 , B32B2439/80 , B32B2553/00 , Y10T428/1334 , Y10T428/2495
摘要： A heat sealable polypropylene resin laminate film having good toughness and heat sealing strength and energy sufficient for packaging heavy goods, mainly fruits and vegetables, and a package made of such film, is a laminate film having three or more layers, a substrate layer made of a crystalline polypropylene resin, a heat sealable layer having a melting point of not more than 150° C., and an intermediate layer. The product of the tensile modulus of elasticity (GPa) in both orthogonal directions of the film is 3.1-6.0 (GPa)2, and the heat sealing energy is not less than 11N·cm/15 mm when the film is sealed, such that the heat sealing strength of the film is not less than 8N/15 mm.
摘要翻译：具有良好的韧性和热封强度以及足够用于包装重物，主要是水果和蔬菜的能量的热封聚丙烯树脂层压膜和由这种膜制成的包装是具有三层或更多层的层压膜，结晶聚丙烯树脂，熔点不超过150℃的可热封层和中间层。膜的两个正交方向的拉伸弹性模量（GPa）的乘积为3.1-6.0（GPa）2，当密封膜时的热封能不小于11N·cm / 15mm，使得膜的热封强度不小于8N / 15mm。

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