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    • 42. 发明授权
    • Method for implementing an efficient and economical cathode process
    • 实现高效和经济的阴极工艺的方法
    • US06923918B2
    • 2005-08-02
    • US09968186
    • 2001-09-28
    • Jueng-Gil LeeMatthew A. BonnHidenori KemmotsuKazuo Kikuchi
    • Jueng-Gil LeeMatthew A. BonnHidenori KemmotsuKazuo Kikuchi
    • H01J1/30H01J9/02H01B13/00G02F1/136H01L21/44
    • H01J9/148H01J1/30
    • The present invention provides a method of fabricating a cathode requiring relatively few and somewhat simple steps. In one embodiment, a novel etchant gas chemistry dispenses with needing a second passivation layer. In one embodiment, a direct via is formed without a separate mask. In one embodiment, access and isolation features of a metallic gate are patterned in the same patterning operation as an associated passivation layer, dispensing with a need for separate patterning of each. In one embodiment, etching is effectuated with high selectivity for nitrides of silicon. In one embodiment, the requirement for at least one passivation layer deposition, a direct via masking step, and separate patterning steps for the passivation layer and metallic gate are eliminated. This effectively eliminates or substantially reduces associated costs, concomitantly reducing process completion time. Advantageously, this increases efficiency and productivity, correspondingly reducing fabrication costs and unit costs of finished devices.
    • 本发明提供一种制造阴极的方法,其需要相对较少和有些简单的步骤。 在一个实施方案中,新颖的蚀刻剂气体化学物质需要第二钝化层。 在一个实施例中,形成直通通孔而没有单独的掩模。 在一个实施例中,金属栅极的访问和隔离特征在与相关联的钝化层相同的图案化操作中被图案化,分配了对每个钝化层的分离图案化的需要。 在一个实施方案中,以高选择性对硅的氮化物进行蚀刻。 在一个实施例中,消除了对钝化层和金属栅极的至少一个钝化层沉积,直接通孔掩模步骤和单独的图案化步骤的要求。 这有效地消除或显着降低了相关成本,同时缩短了工艺完成时间。 有利地,这提高了效率和生产率,相应地降低了成品设备的制造成本和单位成本。
    • 43. 发明授权
    • Field emission display with separated upper electrode structure
    • 具有分离的上电极结构的场发射显示
    • US06911782B2
    • 2005-06-28
    • US10633553
    • 2003-08-05
    • Jae-eun JangJae-eun Jung
    • Jae-eun JangJae-eun Jung
    • H01J29/04G09G3/00H01J1/30H01J1/62H01J29/08H01J29/18H01J31/12H01J6/62
    • H01J29/085H01J29/04H01J31/127
    • A field emission display with a separated upper electrode structure is provided. The field emission display includes: a lower substrate; lower electrodes arranged as stripes on the lower substrate; a field emitter array including a plurality of emitters arranged at a predetermined interval on each of the lower electrodes; an upper substrate which faces the lower substrate; upper electrodes arranged as stripes on the upper substrate to intersect the lower electrodes; and a phosphor array including a plurality of phosphors arranged on the upper electrodes, each phosphor pair of different colors being aligned with a respective one of the emitters, wherein an upper electrode aligned with each emitter is comprised of first and second upper electrodes connected to a respective phosphor pair of different colors. Such an upper electrode arrangement can be achieved through simple processes. In addition, a cross-talk phenomenon is prevented with the upper electrode structure and image quality is enhanced.
    • 提供具有分离的上电极结构的场致发射显示器。 场发射显示器包括:下基板; 在下基板上排列成条状的下电极; 场发射器阵列,包括在每个下电极上以预定间隔布置的多个发射器; 面向下基板的上基板; 上电极在上基板上排列成与下电极相交的条纹; 以及包括布置在上电极上的多个荧光体的荧光体阵列,每个不同颜色的荧光体对与相应的一个发射体对准,其中与每个发射极对准的上电极由与第一和第二上电极连接的第一上电极 各种不同颜色的荧光体对。 这样的上电极布置可以通过简单的工艺实现。 此外,通过上部电极结构防止串扰现象,并提高图像质量。