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41. 发明授权

US08825191B2 System and method for improved automated semiconductor wafer manufacturing 有权
标题翻译：用于改进自动化半导体晶片制造的系统和方法
公开(公告)号：US08825191B2
公开(公告)日：2014-09-02
申请号：US13890975
申请日：2013-05-09
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Wen-Yao Hsieh , Che-Yu Chiu , Anwei Peng , Jian-Hung Chen , Hsueh-Chen Wu
IPC分类号： G06F19/00 , G05B19/02 , G03F7/20 , G05B19/418 , G05B19/402
CPC分类号： G05B19/02 , G03F7/70458 , G05B19/402 , G05B19/41885 , G05B2219/45031 , Y02P90/20 , Y02P90/26 , Y10S438/975
摘要： A method for aligning a photolithographic machine in an automated semiconductor manufacturing system is provided. The method may include identifying a maximum precision degree for a wafer and identifying a maximum overlay correction value. The method may simulate one or more algorithms to determine whether an algorithm aligns a leading lot within alignment specifications. The method may align a photolithography machine using an algorithm selected based on the simulations.
摘要翻译：提供了一种用于在自动半导体制造系统中对准光刻机的方法。该方法可以包括识别晶片的最大精度度并且识别最大叠加校正值。该方法可以模拟一种或多种算法来确定算法是否对齐规范中的领先批次。该方法可以使用基于模拟选择的算法对准光刻机。

42. 发明申请

US20140222182A1 Process for the Manufacture of Custom Optical Elements 有权
标题翻译：定制光学元件制造工艺
公开(公告)号：US20140222182A1
公开(公告)日：2014-08-07
申请号：US14169336
申请日：2014-01-31
申请人： PowerPhotonic Ltd.
发明人： Matthew Oren Currie , Simon Clovis Younger , Roy McBride
IPC分类号： G05B15/02
CPC分类号： G05B19/41865 , B81C2201/0143 , Y02P90/20 , Y02P90/26 , Y10S977/889
摘要： A process for the manufacture of custom freeform optical elements utilising parameterized modelling. A system for the automatic manufacture of a custom optical element is also described with the manufacturing being by laser micro-machining. The process and system allow customers to specify and order via a web interface and so reduce engineering time, overhead and cost.
摘要翻译：使用参数化建模制造定制自由形状光学元件的过程。还通过激光微加工制造用于自动制造定制光学元件的系统。流程和系统允许客户通过Web界面指定和订购，从而减少工程时间，开销和成本。

43. 发明授权

US08793292B1 System and method for computer simulations 有权
标题翻译：计算机模拟的系统和方法
公开(公告)号：US08793292B1
公开(公告)日：2014-07-29
申请号：US12604501
申请日：2009-10-23
申请人： Rao Y. Mannepalli , Paul D. Albertelli
发明人： Rao Y. Mannepalli , Paul D. Albertelli
IPC分类号： G06F12/00 , G06F17/30 , G06F17/50
CPC分类号： G05B19/41885 , G05B2219/31419 , Y02P90/26
摘要： A system and computer-implemented method for tracking and displaying computer files used in computer simulations of engineered or industrial process plants. The system includes a computer processor, computer readable medium, and control logic stored on the computer readable medium and executed by the processor. The processor is operative to run the computer simulation of the plant and automatically compiles a list of all files used and/or created during the simulation. In one embodiment, the list includes information about the location/path of each file on the system and its associated software program required to open and view the file contents. The list may further be displayed to a system user and allows the selection of one or more files to be viewed. The processor retrieves, opens, and displays the selected files from the system to the user.
摘要翻译：用于跟踪和显示在工程或工业过程工厂的计算机模拟中使用的计算机文件的系统和计算机实现的方法。该系统包括存储在计算机可读介质上并由处理器执行的计算机处理器，计算机可读介质和控制逻辑。处理器可操作以运行工厂的计算机模拟，并自动编译在仿真期间使用和/或创建的所有文件的列表。在一个实施例中，该列表包括关于系统上的每个文件的位置/路径及其关联的软件程序的信息，以打开和查看文件内容。该列表可以进一步显示给系统用户，并且允许选择要查看的一个或多个文件。处理器从系统中检索，打开并显示所选文件到用户。

44. 发明授权

US08707256B2 System for writing a simulation program 有权
标题翻译：编写仿真程序的系统
公开(公告)号：US08707256B2
公开(公告)日：2014-04-22
申请号：US12673685
申请日：2007-08-16
申请人： Nicolai Plewinski , Thilo Stolper
发明人： Nicolai Plewinski , Thilo Stolper
IPC分类号： G06F9/44
CPC分类号： G05B17/02 , G05B2219/32337 , G05B2219/32339 , G05B2219/32352 , Y02P90/26
摘要： The invention relates to a system for writing a simulation program for simulating an automation installation. To facilitate the writing of a simulation program for a complex automation installation, the system comprises: means for defining a respective resource object for at least two components of the automation installation, means for defining port data for each port, which define characteristics of the values which can be interchanged on the associated port, means for identifying a first port of a first resource object, which is provided for interchanging values with a second port of a second resource object, on the basis of the port data associated with the first and second ports, means for defining precisely one variable which can be engaged with the values to be interchanged between the first and second ports, and means for integrating the program fragments associated with the first and second resource objects into the simulation program and for engaging the variables with the values to be interchanged between the first and second ports.
摘要翻译：本发明涉及一种用于编写用于模拟自动化设备的仿真程序的系统。为了便于编写用于复杂自动化安装的仿真程序，该系统包括：用于为自动化设备的至少两个组件定义相应的资源对象的装置，用于定义每个端口的端口数据的装置，其定义值的特征其可以在相关联的端口上互换，用于基于与第一和第二资源相关联的端口数据来识别提供用于与第二资源对象的第二端口交换值的第一资源对象的第一端口的装置端口，用于精确定义可与第一和第二端口之间要互换的值接合的变量的装置，以及用于将与第一和第二资源对象相关联的程序片段集成到模拟程序中并用于将变量与要在第一和第二端口之间互换的值。

45. 发明申请

US20140031969A1 Run-to-Run Control Utilizing Virtual Metrology in Semiconductor Manufacturing 有权
标题翻译：半导体制造中使用虚拟计量的运行控制
公开(公告)号：US20140031969A1
公开(公告)日：2014-01-30
申请号：US13671902
申请日：2012-11-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Robert J. Baseman , Jingrui He , Emmanuel Yashchin , Yada Zhu
IPC分类号： G06F19/00
CPC分类号： H01L22/20 , G05B13/048 , G05B19/41875 , G05B2219/32182 , G05B2219/32187 , G05B2219/32194 , G05B2219/45031 , Y02P90/14 , Y02P90/22 , Y02P90/26 , Y02P90/86
摘要： An apparatus for performing run-to-run control and sampling optimization in a semiconductor manufacturing process includes at least one control module. The control module is operative: to determine a process output and corresponding metrology error associated with an actual metrology for a current processing run in the semiconductor manufacturing process; to determine a predicted process output and corresponding prediction error associated with a virtual metrology for the current processing run; and to control at least one parameter corresponding to a subsequent processing run as a function of the metrology error and the prediction error.
摘要翻译：一种用于在半导体制造过程中执行跑步运行控制和采样优化的装置包括至少一个控制模块。控制模块可操作：确定与半导体制造过程中的当前处理运行的实际计量相关联的过程输出和相应的度量误差; 以确定与当前处理运行的虚拟计量相关联的预测过程输出和相应的预测误差; 并且根据计量误差和预测误差来控制与随后的处理运行相对应的至少一个参数。

46. 发明申请

US20130339919A1 Method and Apparatus for Hierarchical Wafer Quality Predictive Modeling 有权
标题翻译：分层晶片质量预测建模方法与装置
公开(公告)号：US20130339919A1
公开(公告)日：2013-12-19
申请号：US13526152
申请日：2012-06-18
申请人： Robert J. Baseman , Jingrui He , Yada Zhu
发明人： Robert J. Baseman , Jingrui He , Yada Zhu
IPC分类号： G06F17/50
CPC分类号： G06Q10/04 , G05B19/41875 , Y02P90/22 , Y02P90/26
摘要： A method for performing enhanced wafer quality prediction in a semiconductor manufacturing process includes the steps of: obtaining data including at least one of tensor format wafer processing conditions, historical wafer quality measurements and prior knowledge relating to at least one of the semiconductor manufacturing process and wafer quality; building a hierarchical prediction model including at least the tensor format wafer processing conditions; and predicting wafer quality for a newly fabricated wafer based at least on the hierarchical prediction model and corresponding tensor format wafer processing conditions.
摘要翻译：一种用于在半导体制造过程中执行增强的晶片质量预测的方法包括以下步骤：获得包括张量格式晶片处理条件，历史晶片质量测量和与半导体制造工艺和晶片中的至少一个相关的先前知识中的至少一个的数据质量; 构建包括至少张量格式晶片处理条件的分级预测模型; 并且至少基于分层预测模型和对应的张量格式晶片处理条件来预测新制造的晶片的晶片质量。

47. 发明申请

US20130274908A1 PROCESSING CHAMBER ALLOCATION SETTING DEVICE AND PROCESSING CHAMBER ALLOCATION SETTING PROGRAM 有权
标题翻译：加工室分配设备和加工室分配设置程序
公开(公告)号：US20130274908A1
公开(公告)日：2013-10-17
申请号：US13859812
申请日：2013-04-10
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Teruo NAKATA , Keita NOGI , Satomi INOUE
IPC分类号： G05B15/02
CPC分类号： G05B15/02 , G05B19/41865 , G05B2219/32328 , G05B2219/45031 , Y02P90/083 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/265 , Y02P90/28
摘要： Provided is a method that may quickly and simply select the allocation of the type of wafers to the processing chamber having a higher productivity in a semiconductor processing device in which a plurality of conveyance robots is disposed in a conveyance mechanism to which a processing chamber is connected and an object to be processed is delivered between the plurality of conveyance robots, when processings are performed on a plurality of types of wafers in parallel. From the information on the arrangement of the processing chambers of the semiconductor processing device and input type of wafers to be processed, the processing chamber allocation candidate is comprehensively generated and a simulation that manufactures all processing targets for each of the processing chamber allocation candidates is performed to calculate a productivity and the candidates are displayed in the order from a higher productivity to support the adoption of a user.
摘要翻译：提供了一种方法，其可以在半导体处理装置中快速简单地选择对具有较高生产率的处理室的类型的分配，其中多个输送机器人设置在处理室被连接到的输送机构中并且当在多个类型的晶片上并行执行处理时，在多个输送机器人之间传送被处理物体。根据关于半导体处理装置的处理室的布置的信息和要处理的晶片的输入类型，综合地生成处理室分配候选，并且执行为处理室分配候选中的每一个生成所有处理目标的模拟计算生产率，候选人按照更高的生产率显示顺序，以支持用户的采用。

48. 发明授权

US08532795B2 Method and system for offline code validation 有权
标题翻译：用于离线代码验证的方法和系统
公开(公告)号：US08532795B2
公开(公告)日：2013-09-10
申请号：US12897007
申请日：2010-10-04
申请人： Visweswara Prasad Adavi , Raja Balasubramaniam
发明人： Visweswara Prasad Adavi , Raja Balasubramaniam
IPC分类号： G05B13/02 , G06F7/60 , G06F17/10 , G06G7/48
CPC分类号： G05B19/41885 , G05B2219/32344 , G05B2219/32385 , Y02P90/16 , Y02P90/26
摘要： A method of offline code validation and a process control system are provided. The system includes a plurality of sensors each configured to generate a sensor output value representative of a respective sensed parameter in a process plant, at least one process controller configured to receive one or more of the sensor output values and to generate a controller output value using the one or more of the sensor output values and a control algorithm associated with the at least one process controller, a plurality of controlled components configured to receive an associated controller output value, and an offline computing environment including a selectable model controller configurable to represent the at least one process controller, the model controller selectable by a user from code representing the at least one process controller and displayed on a user interface.
摘要翻译：提供了离线代码验证方法和过程控制系统。该系统包括多个传感器，每个传感器被配置为在过程工厂中生成表示相应感测参数的传感器输出值，至少一个过程控制器被配置为接收传感器输出值中的一个或多个并且使用所述传感器输出值中的一个或多个以及与所述至少一个过程控制器相关联的控制算法，被配置为接收相关联的控制器输出值的多个受控部件，以及包括可选择模型控制器的离线计算环境，至少一个过程控制器，所述模型控制器可由用户从代表所述至少一个过程控制器的代码中选择并显示在用户界面上。

49. 发明授权

US08515718B2 Method and device for visualizing an installation of automation systems together with a workpiece 有权
标题翻译：自动化系统与工件一起可视化的方法和装置
公开(公告)号：US08515718B2
公开(公告)日：2013-08-20
申请号：US12865374
申请日：2008-01-31
申请人： Christian Heuschmann , Thilo Stolper , Dieter Walter
发明人： Christian Heuschmann , Thilo Stolper , Dieter Walter
IPC分类号： G06F19/00
CPC分类号： G05B19/41885 , Y02P90/26
摘要： A method and a device for visualizing a workpiece in a visualized model of an automated installation. In accordance with the invention, the method comprises making available a selection device to the user of the visualized model of the automated installation, visualizing the automated installation together with the workpiece and centering the workpiece in the visualized model of the automated installation, where the selection device is used by the user to preselect the workpiece.
摘要翻译：一种用于在自动化安装的可视化模型中可视化工件的方法和装置。根据本发明，该方法包括向用户提供选择装置给自动化装置的可视化模型，与工件一起可视化自动化装置并将工件对准在自动化装置的可视化模型中，其中选择设备由用户用来预选工件。

50. 发明申请

US20130191106A1 METHOD AND APPARATUS FOR DEPLOYING INDUSTRIAL PLANT SIMULATORS USING CLOUD COMPUTING TECHNOLOGIES 有权
标题翻译：使用云计算技术部署工业植物模拟器的方法和装置
公开(公告)号：US20130191106A1
公开(公告)日：2013-07-25
申请号：US13357341
申请日：2012-01-24
申请人： Richard W. Kephart , Herman Sanchez , Eugene Abruzere
发明人： Richard W. Kephart , Herman Sanchez , Eugene Abruzere
IPC分类号： G06F9/455
CPC分类号： G06F17/5009 , G05B17/02 , G05B19/41885 , G05B2219/2609 , G05B2219/31124 , G05B2219/32345 , G06F2217/04 , Y02P90/18 , Y02P90/26
摘要： A system and method for operating a remote plant simulation system is disclosed. The system and method uses a light application at the plant to collect relevant data and communicate it to a remote plant simulation. The remote plant simulation uses the relevant data, including data from the actual process, to create a process simulation and communicate the display data to the light application operating at the plant where it is displayed to a user. The remote system offers the advantage of offering decreased cost and improved simulation as the equipment cost, operator cost and set up cost is shared by a plurality of users. Further, the data may be stored remotely and subject to data analytics which may identify additional areas for efficiency in the plant.
摘要翻译：公开了一种用于操作远程工厂仿真系统的系统和方法。该系统和方法使用工厂的轻型应用来收集相关数据并将其传达给远程工厂模拟。远程工厂模拟使用相关数据（包括来自实际过程的数据）来创建过程仿真，并将显示数据传送到在显示给用户的工厂操作的光应用。远程系统提供降低成本和改进仿真的优点，因为设备成本，运营商成本和设置成本由多个用户共享。此外，数据可以远程存储并进行数据分析，这可以识别工厂效率的附加区域。

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