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    • 47. 发明授权
    • Imprint apparatus, manufacturing method for article using the same, and imprint method
    • 印刷装置,使用其的制品的制造方法和印记法
    • US09375872B2
    • 2016-06-28
    • US13683095
    • 2012-11-21
    • CANON KABUSHIKI KAISHA
    • Naoki Miyata
    • B29C59/02G03F7/00
    • B29C59/02G03F7/0002
    • An imprint apparatus forms a pattern of an imprint material on a substrate with a mold. A holding unit holds the mold by attracting a first surface that is opposite to a second surface on which the pattern is formed, of the mold, with a suction unit. A suction force adjusting unit adjusts a suction force. A shape correcting unit applies a force to a lateral surface of the mold, such that a shape of a pattern region of the mold gets closer to a shape of a substrate-side pattern region of the substrate. The first mold surface includes first and second regions, the second region being closer to a center of the mold from the lateral surface than the first region. The suction force adjusting unit adjusts the suction force so that a suction force of the first region is lower than that of the second region.
    • 压印装置用模具在衬底上形成压印材料的图案。 保持单元通过用抽吸单元吸引与模具形成的第二表面相对的第一表面来保持模具。 抽吸力调节单元调节抽吸力。 形状校正单元对模具的侧面施加力,使得模具的图案区域的形状更接近于基板的基板侧图案区域的形状。 第一模具表面包括第一和第二区域,第二区域比第一区域更靠近模具的中心。 吸力调节单元调节吸力,使得第一区域的吸力低于第二区域的吸力。