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41. 发明授权

US08052376B2 Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump 有权
标题翻译：涡轮分子泵，基板处理装置以及用于抑制沉积物附着于涡轮分子泵的方法
公开(公告)号：US08052376B2
公开(公告)日：2011-11-08
申请号：US12057767
申请日：2008-03-28
申请人： Jun Yamawaku , Tsuyoshi Moriya
发明人： Jun Yamawaku , Tsuyoshi Moriya
IPC分类号： F04D17/06
CPC分类号： F04D19/042 , F04D29/701 , F05D2260/607 , Y02T50/675
摘要： A turbo-molecular pump that enables reliable suppression of attachment of depositions onto component parts thereof. The turbo-molecular pump discharges a deposition-causing gas from a processing chamber. A rotor has a rotor shaft aligned with an exhaust stream. A cylindrical casing houses the rotor therein. A plurality of blade-form rotor blades projects from the rotor orthogonally with respect to the rotor shaft and are divided into a plurality of rotor blade groups. A plurality of blade-form stator blades projects orthogonally with respect to the rotor shaft from a rotor-facing surface and are divided into a plurality of stator blade groups. Gas supply ports are located on an upstream side of the rotor blade group that is located furthest downstream in the exhaust stream, and supply a deposition-suppressing gas which includes gas molecules having a large molecular weight.
摘要翻译：涡轮分子泵，其能够可靠地抑制沉积物附着到其组分部分上。涡轮分子泵从处理室排出沉积物。转子具有与排气流对准的转子轴。圆柱形壳体将转子放在其中。多个叶片形转子叶片相对于转子轴正交地从转子突出并分成多个转子叶片组。多个叶片形定子叶片相对于转子轴从转子相对表面突出突出并被分成多个定子叶片组。气体供给口位于转子叶片组的位于排气流中最下游的上游侧，并且供给包含分子量大的气体分子的沉积抑制气体。

42. 发明申请

US20100214557A1 ABSORPTION SPECTROMETRIC APPARATUS FOR SEMICONDUCTOR PRODUCTION PROCESS 失效
标题翻译：用于半导体生产工艺的吸收光谱仪器
公开(公告)号：US20100214557A1
公开(公告)日：2010-08-26
申请号：US12707418
申请日：2010-02-17
申请人： Osamu Akiyama , Masashi Akimoto , Tsuyoshi Moriya , Jun Yamawaku
发明人： Osamu Akiyama , Masashi Akimoto , Tsuyoshi Moriya , Jun Yamawaku
IPC分类号： G01N21/17
CPC分类号： G01N21/3554 , G01N21/031 , G01N21/05 , G01N21/3504 , G01N21/9501 , H01L21/67253
摘要： This absorption spectrometric apparatus for semiconductor production process includes a flow passageway switching mechanism connected to a discharging flow passageway of a processing chamber for a semiconductor production process and a multiple reflection type moisture concentration measuring absorption spectrometric analyzer that allows a laser beam from a laser light source to undergo multiple reflection within a cell, detects a light absorbancy change by a gas within the cell, and measures a moisture concentration within the gas. The flow passageway switching mechanism connects the discharging flow passageway by switching between a measuring flow passageway through which the gas is discharged by passing through the cell and a bypass flow passageway through which the gas is discharged without passing through the cell.
摘要翻译：该半导体制造用吸收光谱测定装置包括与半导体制造工序的处理室的排出流路连接的流路切换机构以及多反射型水分浓度测定用吸收光谱分析装置，该分析装置允许来自激光光源在电池内进行多次反射，通过电池内的气体检测光吸收变化，并测量气体内的水分浓度。流动通道切换机构通过在通过电池的排出气体的测量流动通道和通过气体而不通过电池的旁路流动通道之间切换来连接排出流动通道。

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