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    • 45. 发明授权
    • Liquid immersion microscope
    • 液浸式显微镜
    • US07868996B2
    • 2011-01-11
    • US12083835
    • 2006-10-18
    • Hiromasa ShibataManabu KomatsuToshio Uchikawa
    • Hiromasa ShibataManabu KomatsuToshio Uchikawa
    • G03B27/52
    • G02B21/33
    • To provide a liquid immersion microscope device enabling nondestructive liquid immersion observation of a substrate without deteriorating quality of the substrate. To attain this, a liquid immersion microscope device of the present invention includes a supporting unit supporting a substrate as an observation target, an objective lens of a liquid immersion type, a first supplying unit supplying ultrapure water as a liquid for observation to a gap between a tip of the objective lens and the substrate, a first draining unit draining the liquid for observation after observation of the substrate, a second supplying unit supplying a liquid for cleaning, which is different from the liquid for observation drained by the first draining unit, to an area, of the substrate, that has been in contact with the liquid for observation, and a second draining unit draining the liquid for cleaning after the substrate is cleaned.
    • 提供一种液晶显微镜装置,其能够对基板进行非破坏性液浸观察,而不会降低基板的质量。 为此,本发明的液浸式显微镜装置包括:支撑单元,其支撑作为观察对象的基板,液浸型物镜;第一供给单元,其将超纯水作为观察用液体供给到第 物镜的尖端和基板,在观察基板之后排出用于观察的液体的第一排水单元,供给与第一排水单元排出的观察用液体不同的清洗用液体的第二供给单元, 与已经与用于观察的液体接触的基板的区域,以及在清洁基板之后排出用于清洁的液体的第二排出单元。
    • 46. 发明授权
    • Adaptor for microscope and microscope apparatus (microscope-use adaptor and microscope device)
    • 显微镜和显微镜装置适配器(显微镜使用适配器和显微镜装置)
    • US07864437B2
    • 2011-01-04
    • US11817316
    • 2006-02-23
    • Manabu KomatsuToshio UchikawaHiromasa Shibata
    • Manabu KomatsuToshio UchikawaHiromasa Shibata
    • G02B21/02G03B27/52
    • G02B21/33
    • A microscope apparatus efficiently supplies and collects a liquid for observation by local liquid immersion. The apparatus includes an objective of a liquid immersion system, a discharging member for discharging the liquid between a front edge of the objective and a substrate, and a sucking member for sucking the liquid. Inclined faces are provided respectively in two positions adjacent to the front edge in the periphery of the objective, and protruded portions are provided in positions adjacent to the inclined faces. An aperture portion bounded by the protruded portions and the substrate is formed at the side face. The discharging member includes a tubular member provided on the inclined face for discharging the liquid. The sucking member includes another tubular member for sucking the liquid while taking in air via the aperture portion.
    • 显微镜装置通过局部液浸有效地供给和收集用于观察的液体。 该装置包括液浸系统的目的,用于在物体的前边缘和基板之间排出液体的排出构件和用于吸取液体的抽吸构件。 倾斜面分别设置在与物镜周边的前缘相邻的两个位置,突出部分设置在与倾斜面相邻的位置。 在侧面形成有由突出部和基板界定的开口部。 排出构件包括设置在倾斜面上用于排出液体的管状构件。 抽吸构件包括用于在通过孔部分吸入空气的同时吸取液体的另一个管状构件。
    • 47. 发明申请
    • Adaptor for Microscope and Microscope Apparatus (Microscope-Use Adaptor and Microscope Device)
    • 显微镜和显微镜装置适配器(显微镜使用适配器和显微镜装置)
    • US20080259446A1
    • 2008-10-23
    • US11817316
    • 2006-02-23
    • Manabu KomatsuToshio UchikawaHiromasa Shibata
    • Manabu KomatsuToshio UchikawaHiromasa Shibata
    • G02B21/26
    • G02B21/33
    • Providing a microscope apparatus supplying efficiently and collecting a liquid upon observation with local liquid immersion. The apparatus including an objective of a liquid immersion system, discharging means discharging the liquid between a front edge of the objective and a substrate, and sucking means sucking the liquid. Inclined faces are provided respectively in two positions adjacent to the front edge in the periphery of the objective, and protruded portions are provided in positions adjacent to the inclined faces. An aperture portion surrounded by the protruded portions and the substrate is formed in the side face. The discharging means includes a tubular member provided on the inclined face and the liquid is discharged by using the tubular member. The sucking means includes a tubular member and the liquid is sucked while taking in the air via the aperture portion by use of the tubular member.
    • 提供一种显微镜装置,在用局部液浸观察时有效提供并收集液体。 该装置包括液浸系统的目的,将物体的前边缘与基板排出液体的排出装置以及吸入液体的吸引装置。 倾斜面分别设置在与物镜周边的前缘相邻的两个位置,突出部分设置在与倾斜面相邻的位置。 在侧面形成由突出部和基板包围的开口部。 排出装置包括设置在倾斜面上的管状构件,并且通过使用管状构件排出液体。 抽吸装置包括管状构件,并且通过使用管状构件经由孔部吸入空气而吸入液体。