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    • 44. 发明授权
    • Printhead for thermal ink jet devices
    • 用于热喷墨设备的打印头
    • US6109733A
    • 2000-08-29
    • US976461
    • 1997-11-21
    • Alan D. RaisanenCathie J. Burke
    • Alan D. RaisanenCathie J. Burke
    • B41J2/05B41J2/14B41J2/16
    • B41J2/1626B41J2/14129B41J2/1601B41J2/1646
    • The efficiency of a thermal ink jet printhead is improved by providing a thermally grown field oxide layer and a deposited oxide layer, the two combined layers providing thermal insulation between a resistor layer and a silicon substrate. In a preferred embodiment, zirconium diboride is sputtered in the presence of oxygen to form a thin field oxide layer on a field oxide layer grown on the surface of the silicon substrate. At a predetermined time, during the sputtering process, oxygen is removed and the sputtering continues to form a conductive ZrB.sub.2 layer. The combined thickness of the two oxide layers provides the required thermal isolation between silicon substrate and heater resistor while the thermally grown field oxide layer enables the closer packing of resistor transistor drive circuits.
    • 通过提供热生长的场氧化物层和沉积的氧化物层来改善热喷墨打印头的效率,两个组合层在电阻层和硅衬底之间提供热绝缘。 在优选的实施方案中,二硼化锆在氧的存在下溅射以在在硅衬底的表面上生长的场氧化物层上形成薄的场氧化物层。 在预定的时间,在溅射过程中,去除氧并且溅射继续形成导电的ZrB 2层。 两个氧化物层的组合厚度提供硅衬底和加热电阻器之间所需的热隔离,而热生长的场氧化物层能够使电阻晶体管驱动电路更紧密地堆积。
    • 47. 发明授权
    • Printhead for thermal ink jet devices
    • 用于热喷墨设备的打印头
    • US5943076A
    • 1999-08-24
    • US805098
    • 1997-02-24
    • Cathie J. BurkeMichael P. O'HoroDonald J. DrakeAlan D. Raisanen
    • Cathie J. BurkeMichael P. O'HoroDonald J. DrakeAlan D. Raisanen
    • B41J2/05B41J2/14B41J2/16
    • B41J2/1626B41J2/14129B41J2/1601B41J2/1642B41J2202/03B41J2202/11
    • The nucleation efficiency of a thermal ink jet printhead is improved by forming a heater element with a planar surface. A heater resistor, polysilicon in a preferred embodiment, has an irregular surface which can trap gas or vapors in the cracks or crevices. When the heater resistor is pulsed, the nucleation temperature is reduced by these trapped vapors requiring an increase in electrical input to the resistors, thereby reducing efficiency. The invention recognizes that a heater resistor with a planar surface in contact with an ink layer results in a higher nucleation temperature and increased efficiency. In one embodiment, a phosphosilicate glass (PSG) is flowed directly onto the resistor surface forming a planarization layer. Subsequent deposition of tantalum substantially replicates the underlying topography creating a heater resistor with a smooth surface adjacent the ink.In a second embodiment, a diffusion layer which is conformal is formed on the resistor surface with the PSG layer formed on the oxide layer. The diffusion layer can be a pyrolytic CVD deposited silicon nitride or a thermally grown oxide layer. The PSG layer has a planarized surface to which the tantalum conforms.
    • 通过形成具有平坦表面的加热器元件来改善热喷墨打印头的成核效率。 加热电阻器,多晶硅在优选实施例中具有不规则的表面,其可以在裂纹或缝隙中捕获气体或蒸汽。 当加热电阻器被脉冲时,通过这些被捕获的蒸汽减少成核温度,这需要增加对电阻器的电输入,从而降低效率。 本发明认识到,具有与油墨层接触的平坦表面的加热电阻器导致更高的成核温度和更高的效率。 在一个实施例中,磷硅玻璃(PSG)直接流到形成平坦化层的电阻器表面上。 随后的钽的沉积基本上复制了底层的形貌,形成了具有与墨水相邻的光滑表面的加热电阻器。 在第二实施例中,在电阻器表面上形成具有共形的扩散层,其中形成在氧化物层上的PSG层。 扩散层可以是热解CVD沉积的氮化硅或热生长的氧化物层。 PSG层具有钽符合的平坦化表面。