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    • 41. 发明授权
    • Method for fabricating a thyristor
    • 制造晶闸管的方法
    • US4613381A
    • 1986-09-23
    • US644257
    • 1984-08-27
    • Tsuneo Ogura
    • Tsuneo Ogura
    • H01L21/225H01L29/167H01L29/74H01L29/744
    • H01L29/74H01L21/2252H01L29/167H01L29/744Y10S438/904
    • In a method for fabricating a thyristor in which n-type impurities are diffused in a p-base of a pnp wafer to form an n.sup.+ -emitter, the step of diffusing the n-type impurities for forming the n.sup.+ -emitter has the conditions which are set not to exceed the range where the amount of doped impurities is smaller than that which is electrically activated, thereby performing the gettering process by diffusing n-type impurities in two surfaces of the pnpn wafer in which the n.sup.+ -emitter having no defects is formed. Even if a thyristor obtained by the above processes has a high off-state voltage, it has a low on-state voltage, a short turn-off time and a small variation in a reverse recovery charge.
    • 在制造其中n型杂质扩散到pnp晶片的p基底以形成n +发射体的晶闸管的方法中,扩散用于形成n +型发射器的n型杂质的步骤具有以下条件: 被设定为不超过掺杂杂质的量比电激活的量少的范围,从而通过在其中没有缺陷的n +发射体的pnpn晶片的两个表面扩散n型杂质来进行吸杂过程 形成。 即使通过上述处理获得的晶闸管具有高截止电压,它具有低导通状态电压,短关断时间和反向恢复电荷的小变化。
    • 43. 发明授权
    • Power semiconductor device
    • 功率半导体器件
    • US08217420B2
    • 2012-07-10
    • US12852193
    • 2010-08-06
    • Tsuneo Ogura
    • Tsuneo Ogura
    • H01L29/43
    • H01L29/7397H01L29/0619H01L29/0696H01L29/0834H01L29/41708H01L29/7395
    • According to one embodiment, a power semiconductor device includes an IGBT region, first and second electrodes, and a first conductivity-type second semiconductor layer. The region functions as an IGBT element. The first electrode is formed in a surface of a second conductivity-type collector layer opposite to a first conductivity-type first semiconductor layer in the region. The second electrode is connected onto a first conductivity-type emitter layer and a second conductivity-type base layer in a surface of the first conductivity-type base layer and insulated from a gate electrode in the region. The first conductivity-type second semiconductor layer extends from the surface of the first conductivity-type base layer to the first conductivity-type first semiconductor layer around the IGBT region, and connected to the first electrode.
    • 根据一个实施例,功率半导体器件包括IGBT区域,第一和第二电极以及第一导电型第二半导体层。 该区域用作IGBT元件。 第一电极形成在与该区域中的第一导电型第一半导体层相反的第二导电型集电极的表面中。 第二电极在第一导电型基极层的表面中连接到第一导电型发射极层和第二导电型基极层,并且与该区域中的栅电极绝缘。 第一导电型第二半导体层从第一导电型基底层的表面延伸到IGBT区域周围的第一导电型第一半导体层,并与第一电极连接。
    • 46. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20070007537A1
    • 2007-01-11
    • US11478623
    • 2006-07-03
    • Tsuneo OguraIchiro Omura
    • Tsuneo OguraIchiro Omura
    • H01L31/0312
    • H01L29/7802H01L21/26586H01L29/0619H01L29/0696H01L29/086H01L29/0869H01L29/0878H01L29/1033H01L29/1045H01L29/105H01L29/1095H01L29/1608H01L29/41766H01L29/42368H01L29/66068H01L29/7397H01L29/7813H01L29/7828
    • A semiconductor device comprises: a first semiconductor layer of silicon carbide of a first conductivity type; a second semiconductor layer of silicon carbide of a second conductivity type selectively provided on the first semiconductor layer; a main electrode layer of silicon carbide of the first conductivity type selectively provided on the second semiconductor layer; a gate insulating film provided on the second semiconductor layer; a gate electrode formed on the gate insulating film; and a third semiconductor layer of the first conductivity type intervening a current path which is formed between the main electrode layer and the first semiconductor layer when an ON voltage is applied to the gate electrode. The third semiconductor layer is selectively provided on the first semiconductor layer and is adjacent to the second semiconductor layer. A doping density of the third semiconductor layer is higher than a doping density of the first semiconductor layer.
    • 半导体器件包括:第一导电类型的碳化硅的第一半导体层; 选择性地设置在所述第一半导体层上的第二导电类型的碳化硅的第二半导体层; 选择性地设置在第二半导体层上的第一导电类型的碳化硅主电极层; 设置在所述第二半导体层上的栅极绝缘膜; 形成在栅极绝缘膜上的栅电极; 以及第一导电类型的第三半导体层,当在栅电极施加导通电压时,插入形成在主电极层和第一半导体层之间的电流路径。 第三半导体层选择性地设置在第一半导体层上并与第二半导体层相邻。 第三半导体层的掺杂浓度高于第一半导体层的掺杂密度。
    • 49. 发明授权
    • Semiconductor device
    • 半导体器件
    • US09029918B2
    • 2015-05-12
    • US13232839
    • 2011-09-14
    • Tsuneo Ogura
    • Tsuneo Ogura
    • H01L21/02H01L29/417H01L29/10H01L29/66H01L29/739H01L29/78H01L29/06
    • H01L29/42356H01L29/0696H01L29/1095H01L29/41741H01L29/41766H01L29/66348H01L29/7397H01L29/7805H01L29/7813H01L29/7831
    • According to one embodiment, a semiconductor device includes a first major electrode, a first semiconductor layer, a first conductivity-type base layer, a second conductivity-type base layer, a second semiconductor layer, a buried layer, a buried electrode, a gate insulating film, a gate electrode, and a second major electrode. The buried layer of the second conductivity type selectively is provided in the first conductivity-type base layer. The buried electrode is provided in a bottom portion of a trench which penetrates the second conductivity-type base layer to reach the buried layer. The buried electrode is in contact with the buried layer. The gate electrode is provided inside the gate insulating film in the trench. The second major electrode is provided on the second semiconductor layer and is electrically connected to the second semiconductor layer and the buried electrode.
    • 根据一个实施例,半导体器件包括第一主电极,第一半导体层,第一导电型基极层,第二导电型基极层,第二半导体层,埋层,埋电极,栅极 绝缘膜,栅电极和第二主电极。 选择性地将第二导电类型的掩埋层设置在第一导电型基底层中。 掩埋电极设置在穿过第二导电型基极层以到达掩埋层的沟槽的底部。 掩埋电极与埋层接触。 栅电极设置在沟槽内的栅极绝缘膜的内部。 第二主电极设置在第二半导体层上并与第二半导体层和埋电极电连接。