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41. 发明授权

US06293288B2 Cleaning method and apparatus 有权
公开(公告)号：US06293288B2
公开(公告)日：2001-09-25
申请号：US09783956
申请日：2001-02-16
申请人： Naoki Shindo , Shigenori Kitahara , Hironobu Hyakutake
发明人： Naoki Shindo , Shigenori Kitahara , Hironobu Hyakutake
IPC分类号： B08B304
CPC分类号： H01L21/67248 , B08B3/044 , H01L21/67057
摘要： Cleaning liquid supply nozzles 32 are provided within a processing tank 30 for cleaning semiconductor wafers W. A distilled water source 31 and the cleaning liquid supply nozzles 32 are connected via a distilled water supply pipeline 33 and a chemical supply tank 36 and the cleaning liquid supply nozzles 32 are connected via a chemical supply pipeline 35. A flow-rate adjustment valve 37 is provided in the distilled water supply pipeline 33, and the supply of distilled water from the distilled water supply pipeline 33 to the processing tank 30 and the supply of a chemical from the chemical supply pipeline 35 to the processing tank 30 are switched by a switching valve 34. A temperature sensor 39 is disposed within the processing tank 30 for detecting the temperature of a processing liquid (the chemical or rinse liquid) therein and a CPU 40 controls the flow-rate adjustment valve 37 and the switching valve 34 on the basis of a temperature signal from the temperature sensor 39, so that the time required for the processing can be determined from the temperature of the cleaning liquid, thus improving the cleaning capability and cleaning precision.

42. 发明授权

US06235963B1 Method for decomposing PCB 失效
标题翻译：分解PCB的方法
公开(公告)号：US06235963B1
公开(公告)日：2001-05-22
申请号：US09060281
申请日：1998-04-14
申请人： Yasuhiro Yamauchi , Kan Ogata , Naoki Shindo , Nobuhiro Hokao , Yoshihiko Tsuchiyama , Masakazu Tateishi , Tadatsugu Fukuzumi
发明人： Yasuhiro Yamauchi , Kan Ogata , Naoki Shindo , Nobuhiro Hokao , Yoshihiko Tsuchiyama , Masakazu Tateishi , Tadatsugu Fukuzumi
IPC分类号： A62D300
CPC分类号： A62D3/38 , A62D3/35 , A62D2101/22 , A62D2203/10 , B01D3/14 , B01D3/4211
摘要： The present invention provides a PCB decomposing apparatus capable of decomposing PCB efficiently. The PCB decomposing apparatus comprises a PCB extracting container for extracting PCB from a PCB-containing material with an organic solvent. A distilling tower provided on the downstream side of the PCB extracting container distills the organic solvent to separate the PCB. A primary reactor provided on the downstream side of the distilling tower includes a nozzle for supplying aqueous Na2CO3 solution and a nozzle for supplying an oxidizing agent into the container. A liquid cyclone provided on the downstream side of the primary reactor can remove Na2CO3 having a large particle size. A secondary reactor formed by a long pipe is connected to the liquid cyclone. A gas-liquid separator provided on the further downstream side of the secondary reactor can separate a gas from a solution. A film separator separates treated water into purified water and a concentrated solution, and the purified water is supplied as circulating water to the upstream side of a pressure pump.
摘要翻译：本发明提供能够有效地分解PCB的PCB分解装置。 PCB分解装置包括用于从含有PCB的材料用有机溶剂提取PCB的PCB提取容器。设置在PCB提取容器下游侧的蒸馏塔蒸馏有机溶剂以分离PCB。设置在蒸馏塔的下游侧的主反应器包括用于供给Na 2 CO 3水溶液的喷嘴和用于将氧化剂供应到容器中的喷嘴。设置在初级反应器的下游侧的液体旋风分离器可以除去大粒径的Na 2 CO 3。由长管形成的二次反应器连接到液体旋风分离器。设置在次级反应器的更下游侧的气液分离器可以将气体与溶液分离。膜分离器将经处理的水分离成纯水和浓缩溶液，将纯化水作为循环水供给到压力泵的上游侧。

43. 发明授权

US06203627B1 Cleaning method 有权
标题翻译：清洗方法
公开(公告)号：US06203627B1
公开(公告)日：2001-03-20
申请号：US09291970
申请日：1999-04-15
申请人： Naoki Shindo , Shigenori Kitahara , Hironobu Hyakutake
发明人： Naoki Shindo , Shigenori Kitahara , Hironobu Hyakutake
IPC分类号： B08B304
CPC分类号： H01L21/67248 , B08B3/044 , H01L21/67057
摘要： A cleaning method for cleaning, an object to be, processed. The object is cleaned by immersing the object into a cleaning liquid within a processing tank. The cleaning method includes the steps of: detecting the temperature of the cleaning liquid in which the object to be processed is immersed or to be immersed, and generating a corresponding temperature signal; determining an immersion time for the immersion of the object in the cleaning liquid, based on the temperature signal; and immersing the object to be processed in the cleaning liquid, for the immersion time.
摘要翻译：一种清洁方法，一种待处理的物体。通过将物体浸入处理槽内的清洁液中来清洁物体。清洗方法包括以下步骤：检测被处理物体浸入或浸没的清洗液的温度，并产生相应的温度信号; 基于所述温度信号确定用于将所述物体浸入所述清洁液体中的浸渍时间; 并将待处理物体浸渍在清洗液中浸渍时间。

44. 发明授权

US06082381A Treatment apparatus 有权
标题翻译：治疗仪器
公开(公告)号：US06082381A
公开(公告)日：2000-07-04
申请号：US156754
申请日：1998-09-16
申请人： Yuji Kamikawa , Naoki Shindo , Shigenori Kitahara
发明人： Yuji Kamikawa , Naoki Shindo , Shigenori Kitahara
IPC分类号： H01L21/304 , B08B3/10 , F04B43/04 , F04B43/073 , H01L21/00 , B08B3/04
CPC分类号： H01L21/67028 , B08B3/10 , F04B43/04 , F04B43/0736 , F04B2205/063 , Y10S134/902
摘要： A cleaning tank 30 stores a cleaning liquid to clean the surfaces of semiconductor wafers W immersed in the cleaning liquid. A cleaning liquid supply pipe 33 connects the cleaning tank 30 to a pure water supply source 31. A chemical liquid container 34 stores a chemical liquid, and a chemical liquid supply pipe 36 connects the cleaning liquid supply pipe 33 to the chemical liquid container 34 via an infusion open/close switching valve 35, and a chemical liquid feed means is interposed in the chemical liquid supply pipe 36. The chemical liquid feed means is a reciprocal pump, such as diaphragm pump 37. Thus, a predetermined quantity of the chemical liquid can be infused into pure water or to a drying gas generator to ensure that the chemical liquid of a predetermined concentration be available for washing or drying treatment, regardless of fluctuations in flow amount or pressure of pure water or a drying gas carrier gas.
摘要翻译：清洗槽30储存清洗液体以清洁浸在清洗液中的半导体晶片W的表面。清洗液供给管33将清洗槽30连接到纯水供给源31.药液容器34储存药液，药液供给管36将清洗液供给管33与药液容器34连接，经由输液开闭切换阀35以及化学液体供给装置插入化学液体供给管36中。药液供给装置是隔膜泵37等往复泵。因此，预定量的药液可以输入纯水或干燥气体发生器，以确保预定浓度的化学液体可用于洗涤或干燥处理，而与纯水或干燥气体载体气体的流量或压力的波动无关。

45. 发明授权

US5862823A Substrate cleaning method and a substrate cleaning apparatus 失效
标题翻译：基板清洗方法和基板清洗装置
公开(公告)号：US5862823A
公开(公告)日：1999-01-26
申请号：US729283
申请日：1996-10-10
申请人： Yuji Kamikawa , Naoki Shindo
发明人： Yuji Kamikawa , Naoki Shindo
IPC分类号： B08B11/02 , B08B3/04 , H01L21/00 , H01L21/304 , H01L21/677 , B08B3/00
CPC分类号： H01L21/67057 , Y10S134/902
摘要： The substrate cleaning method for performing cleaning processing on a plurality of substrates disposed such that front surfaces of the substrates on which a circuit pattern is to be formed extend substantially in a vertical direction. This method includes a step of picking up substrates contained in a cassette, all together, from the cassette, a step of making front surfaces of adjacent substrates face each other without bringing the front surfaces into contact with each other, while making back surfaces of adjacent substrates face each other without bringing the back surfaces into contact with each other, the front surfaces of the adjacent substrates being situated with a pitch interval L.sub.1 interposed therebetween, and the pitch interval being set to be larger than a pitch interval L.sub.2 interposed between the back surfaces of the adjacent substrates, a step of dipping the plurality of substrates thus disposed, all together, into a chemical solution, and a step of making the chemical solution flow between the front surfaces of adjacent substrates of the plurality of substrates, facing each other, and between the back surfaces of adjacent substrates of the plurality of substrates, facing each other.
摘要翻译：用于对多个基板进行清洁处理的基板清洗方法，所述基板设置成使得要形成电路图案的基板的正面基本上沿垂直方向延伸。该方法包括从盒子一起拾取包含在盒中的基板的步骤，使相邻基板的前表面彼此面对的步骤，而不使表面彼此接触，同时使相邻的基板的背面基板彼此面对而不会使背面彼此接触，相邻基板的前表面间隔有间距间隔L1，并且间距间隔被设定为大于插入在背面之间的间距间隔L2 相邻基板的表面，将如此设置的多个基板一起浸入化学溶液的步骤，以及使化学溶液在彼此面对的多个基板的相邻基板的前表面之间流动的步骤，并且在多个基板的相邻基板的背面之间彼此面对。

46. 发明授权

US09280642B2 Method of managing clinical testing apparatus, clinical testing system, and maintenance management apparatus 有权
标题翻译：临床检测仪器，临床检测系统和维护管理仪器的管理方法
公开(公告)号：US09280642B2
公开(公告)日：2016-03-08
申请号：US13459848
申请日：2012-04-30
申请人： Yusuke Suga , Naoki Shindo , Atsumasa Sone , Hiroyuki Koyama , Shunsuke Ariyoshi
发明人： Yusuke Suga , Naoki Shindo , Atsumasa Sone , Hiroyuki Koyama , Shunsuke Ariyoshi
IPC分类号： G01R35/00 , G06F19/00 , G01N35/00
CPC分类号： G06F19/366 , G01N35/00623 , G01N35/00871 , G05B2219/24001 , G05B2219/2657 , G06F19/00 , G16H10/40
摘要： A management system connected with a clinical testing apparatus is disclosed. The system acquires, from the clinical testing apparatus, a parameter that varies according to deterioration of the unit at a plurality of points of time, stores the parameters and/or analysis results that are obtained by analyzing the parameters, and provides a screen data for showing the stored parameters and/or the stored analysis results in a time-series format. A method for managing a clinical testing apparatus and a clinical testing system for the method are also disclosed.
摘要翻译：公开了一种与临床试验装置连接的管理系统。该系统从临床测试装置获取根据多个时间点的单元的劣化而变化的参数，存储通过分析参数获得的参数和/或分析结果，并提供用于以时间序列格式显示存储的参数和/或存储的分析结果。还公开了用于管理该方法的临床测试装置和临床测试系统的方法。

47. 发明授权

US08868370B2 Sample analyzing system, sample analyzer and management apparatus 有权
标题翻译：样品分析系统，样品分析仪和管理仪器
公开(公告)号：US08868370B2
公开(公告)日：2014-10-21
申请号：US13240536
申请日：2011-09-22
申请人： Naoki Shindo , Yusuke Suga , Aya Konishi , Daigo Fukuma , Keisuke Kuwano
发明人： Naoki Shindo , Yusuke Suga , Aya Konishi , Daigo Fukuma , Keisuke Kuwano
IPC分类号： G06F19/00 , G01N35/00
CPC分类号： G01N35/00871 , G06F19/00 , G16H10/40 , G16H40/40
摘要： The present invention is a sample analyzing system, including a sample analyzer and a management apparatus connected to the sample analyzer via a communication network. The management apparatus includes: a first memory that stores a computer program for the sample analyzer and manual data which corresponds to a version of the computer program; a first communication device; and a first controller configured to transmit, via the first communication device to the sample analyzer, the computer program and the manual data corresponding to the version of the computer program stored in the first memory. The sample analyzer includes: a second communication device; a second memory that stores the computer program and the manual data received by the second communication device; and a second controller configured to execute the computer program stored in the second memory.
摘要翻译：本发明是一种样本分析系统，包括样本分析器和经由通信网络连接到样本分析器的管理装置。管理装置包括：第一存储器，其存储用于样本分析器的计算机程序和对应于计算机程序的版本的手动数据; 第一通信设备; 以及第一控制器，被配置为经由第一通信设备向样本分析器发送与存储在第一存储器中的计算机程序的版本对应的计算机程序和手动数据。样品分析仪包括：第二通信装置; 存储由第二通信装置接收的计算机程序和手动数据的第二存储器; 以及第二控制器，被配置为执行存储在第二存储器中的计算机程序。

48. 发明申请

US20130014786A1 LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD 有权
标题翻译：液体过程设备和液体过程方法
公开(公告)号：US20130014786A1
公开(公告)日：2013-01-17
申请号：US13546372
申请日：2012-07-11
申请人： Norihiro Ito , Kazuhiro Aiura , Naoki Shindo , Yosuke Hachiya , Takashi Nagai
发明人： Norihiro Ito , Kazuhiro Aiura , Naoki Shindo , Yosuke Hachiya , Takashi Nagai
IPC分类号： B08B3/04 , F17D1/00
CPC分类号： H01L21/02041 , H01L21/67051 , H01L21/6719 , Y02E60/34 , Y10T137/0318 , Y10T137/598
摘要： A top plate 32 is provided with a top plate rotation mechanism configured to rotate the top plate 32 in a horizontal plane. An outside cup peripheral case 50 disposed around a cup 40 is configured to move between an upper position, in which a top end of the cylinder 50 is positioned above the cup 40, and a lower position located below the upper position. A nozzle support arm 82 configured to support a nozzle 82a is moved, in a horizontal direction, between an advanced position, in which the arm 82 is advanced into the outside cup peripheral case 50 via a side opening 50m formed in a side surface of the outside cup peripheral case 50 when the cylinder 50 is located in the upper position, and a retracted position, in which the arm 82 is retracted outward from the outside cup peripheral case 50.
摘要翻译：顶板32设置有顶板旋转机构，其被配置为使顶板32在水平面中旋转。设置在杯40周围的外杯周边壳体50被构造成在缸体50的上端位于杯40的上方的位置和位于上部位置下方的下部位置之间移动。构造成支撑喷嘴82a的喷嘴支撑臂82在水平方向上在前进位置之间移动，在前进位置，臂82经由形成在外侧杯外周壳50的侧面中的侧开口50m前进到外杯外壳50 当圆筒50位于上部位置时，外侧杯形外壳50以及从外侧杯状外壳50向外侧缩回的缩回位置。

49. 发明申请

US20120160274A1 Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Program for Executing Liquid Processing Method Recorded Therein 有权
标题翻译：液体处理装置，液体处理方法和记录介质，其中记录有用于执行液体处理方法的程序
公开(公告)号：US20120160274A1
公开(公告)日：2012-06-28
申请号：US13334406
申请日：2011-12-22
申请人： Shigeru Kasai , Ayuta Suzuki , Ikuo Sawada , Naoki Shindo , Masatake Yoneda , Kazuhiro Ooya
发明人： Shigeru Kasai , Ayuta Suzuki , Ikuo Sawada , Naoki Shindo , Masatake Yoneda , Kazuhiro Ooya
IPC分类号： B08B3/00
CPC分类号： H01L21/67115 , H01L21/02052 , H01L21/02057 , H01L21/67028 , H01L21/67051
摘要： Disclosed is a liquid processing apparatus that processes a substrate with a processing liquid. The processing apparatus includes: a substrate holder configured to hold the substrate; a processing liquid supply unit configured to supply the processing liquid to the substrate held by the substrate holder; a rinsing liquid supply unit configured to supply a rinsing liquid to the substrate; and a light emitting element configured to emit light of a wavelength range, which is absorbed only by the substrate, and irradiate the emitted light to the substrate.
摘要翻译：公开了一种用处理液处理基板的液体处理装置。所述处理装置包括：基板保持器，其构造成保持所述基板; 处理液供给部，其将处理液供给到由所述基板保持体保持的基板; 冲洗液体供给单元，其配置为向所述基板供给冲洗液; 以及发光元件，被配置为发射仅被衬底吸收的波长范围的光，并将发射的光照射到衬底。

50. 发明申请

US20120029934A1 CLINICAL SAMPLE ANALYZING SYSTEM, CLINICAL SAMPLE ANALYZER, MANAGEMENT APPARATUS, AND METHOD OF MANAGING CLINICAL SAMPLE ANALYZER 审中-公开
标题翻译：临床样本分析系统，临床样本分析仪，管理设备和临床样品分析仪的管理方法
公开(公告)号：US20120029934A1
公开(公告)日：2012-02-02
申请号：US13190075
申请日：2011-07-25
申请人： Naoki Shindo , Atsumasa Sone , Taizo Kishida , Tsukasa Hirata
发明人： Naoki Shindo , Atsumasa Sone , Taizo Kishida , Tsukasa Hirata
IPC分类号： G06Q50/00
CPC分类号： G01N35/00871 , G06Q50/22 , G16H10/40 , G16H40/40 , Y02A90/22 , Y02A90/26
摘要： A clinical sample analyzing system is disclosed. The system comprises a clinical sample analyzer installed in a facility of a user and a management apparatus which is able to perform data communication with the clinical sample analyzer and is installed in a facility different from the facility of the user. The clinical sample analyzer automatically transmits report data to the management apparatus when a predetermined event related to an initiation of a sample measurement occurs. The management apparatus outputs a notification when receiving the report data from the clinical sample analyzer. A clinical sample analyzer, a management apparatus and a method for managing a clinical sample analyzer are also disclosed.
摘要翻译：公开了临床样品分析系统。该系统包括安装在用户的设施中的临床样本分析器和能够与临床样本分析器进行数据通信并且安装在与用户设施不同的设施中的管理设备。当与样本测量的开始相关的预定事件发生时，临床样本分析器自动将报告数据发送到管理装置。当从临床样本分析器接收到报告数据时，管理装置输出通知。还公开了临床样品分析仪，管理装置和用于管理临床样品分析仪的方法。

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