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    • 46. 发明授权
    • Microstructure and method of manufacturing the same
    • 微结构及其制造方法
    • US08842353B2
    • 2014-09-23
    • US13047670
    • 2011-03-14
    • Takahisa Kato
    • Takahisa Kato
    • G02B26/08B81B3/00
    • G02B26/0841B81B3/0037B81B2201/038B81B2203/0163B81B2203/053G02B26/085Y10S359/904
    • A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.
    • 微结构包括基板,固定在基板上的固定支撑部分,第一可移动部分,增强第一可动部分的刚性的第二可移动部分和弹性地互连第一可移动部分和固定支撑部分的弹性支撑部分。 第二可移动部分以间隙插入第一可移动部分,并且以覆盖弹性支撑部分和固定支撑部分的方式固定。 第一可动部和第二可动部由弹性支撑部弹性地支撑,以能够相对于固定支撑部一起移位。
    • 49. 发明授权
    • Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it
    • 制造振荡器装置的方法,以及基于此的振荡器装置的光偏转器和光学仪器
    • US08305674B2
    • 2012-11-06
    • US12673694
    • 2008-10-28
    • Suguru MiyagawaTakahiro AkiyamaKazutoshi TorashimaTakahisa KatoKazunari Fujii
    • Suguru MiyagawaTakahiro AkiyamaKazutoshi TorashimaTakahisa KatoKazunari Fujii
    • G02B26/10
    • G02B26/105G02B26/085H04N1/1135Y10T29/49774
    • A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.
    • 一种制造振荡器装置的方法,该振荡器装置具有通过用于围绕扭转轴线摆动并被以共振频率驱动的扭转弹簧相对于固定构件支撑的振荡器的方法,该方法包括用于确定惯性的假定值的第一步骤 振荡器的力矩,用于测量共振频率的第二步骤,用于计算扭簧的弹簧常数的第三步骤,根据在所述第一和第二步骤获得的惯性力矩的假定值和测得的共振频率, 基于在所述第三步骤计算的弹簧常数和相对于振荡器的共振频率确定的目标共振频率,计算用于振荡器的惯性矩或扭簧的弹簧常数的调节量的第四步骤 ,以便将谐振频率调节到目标谐振频率,以及用于调整res的第五步骤 基于计算出的调整量,振荡器的频率与目标谐振频率成正比。