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    • 41. 发明授权
    • Method of manufacturing flat panel displays
    • 制造平板显示器的方法
    • US07153714B2
    • 2006-12-26
    • US10838337
    • 2004-05-05
    • Hiroshi Yamanaka
    • Hiroshi Yamanaka
    • H01L21/033H01L21/00
    • G02F1/13439G02F1/1333H01J9/02H01L21/2026
    • To enable formation of a pattern of constituent elements, arranged in correspondence with an arrangement of cells in a display region, as desired or required with a minimized quantity of the film material, a method of manufacturing a flat panel display is provided, which includes depositing a film material for forming the constituent elements on a substrate so as to form films of a pattern encompassing the pattern of the constituent elements, and irradiating the films, made of the film material, with a laser beam so as to shape the pattern of the films to a shape corresponding to the pattern of the constituent elements.
    • 为了能够形成与显示区域中的单元布置相对应的构成元件的图案,根据需要或最少量的薄膜材料需要,提供了一种制造平板显示器的方法,其包括存储 用于在基板上形成构成元件的薄膜材料,以便形成包围所述构成元件的图案的图案的薄膜,并且用激光束照射由所述薄膜材料制成的薄膜,以便形成所述薄膜材料的图案 膜形成对应于构成元件的图案的形状。
    • 42. 发明申请
    • Method of manufacturing flat panel displays
    • 制造平板显示器的方法
    • US20050032454A1
    • 2005-02-10
    • US10838336
    • 2004-05-05
    • Hiroshi Yamanaka
    • Hiroshi Yamanaka
    • G09F9/00H01J9/02H01J11/12H01J11/22H01J11/26H01J11/34H01J9/00H01J9/24
    • H01J11/22H01J9/02H01J11/12
    • To enable formation of a pattern of constituent elements, arranged in correspondence with an arrangement of cells in a display region, as desired or required with a minimized quantity of the film material, a method of manufacturing a flat panel display is provided which includes printing on a substrate a surface treating material capable of partially enhancing the wettability of the substrate, in a predetermined pattern sufficient to encompass the eventually formed pattern of constituent elements of the flat panel display. Undercoats made of the surface treating material so printed is then patterned by irradiation of light. Thereafter, utilizing the undercoats, a film material is thereafter selectively deposited on the substrate to thereby complete the predetermined pattern of the constituent elements.
    • 为了形成与显示区域中的单元布置相对应的构成元件的图案,根据期望或需要的最小量的薄膜材料,提供了一种制造平板显示器的方法,其包括在 基板,能够以足以包围平板显示器的最终形成的构成元件的图案的预定图案部分地提高基板的润湿性的表面处理材料。 然后通过照射光使由这样印刷的表面处理材料制成的底衣图案化。 此后,利用底涂层,然后在基板上选择性地沉积膜材料,从而完成组成元件的预定图案。
    • 45. 发明授权
    • Production method of diffraction grating
    • 衍射光栅的制作方法
    • US5716762A
    • 1998-02-10
    • US744325
    • 1996-11-07
    • Junji NishiiHiroshi Yamanaka
    • Junji NishiiHiroshi Yamanaka
    • G02B5/18G02B6/124G02B1/12
    • G02B6/124G02B5/1857G02B6/02066Y10S430/146
    • This invention provides a method of producing a diffraction grating of a spectroscope by applying light to a thin film of glass having characteristics such that a density change occurs with the change of a glass structure upon irradiation of light and volume expansion occurs irreversibly. The method comprises applying light to a diffraction grating formation of a surface of the thin film by applying light through a phase mask or applying interference light, and causing the light irradiation portion of glass to expand and to thereby form the diffraction grating. Light to be applied is generally laser beams of ultraviolet rays, such as an excimer laser, a Nd-YAG laser or UV higher harmonics of a dye laser. A laser beam of a visible light region can be used, too. Preferably, a silica single crystal plate is used for the substrate of the thin film, and sputter vacuum deposition is used for forming the thin film. The glass composition whose volume expands upon irradiation of light is GeO.sub.2 --SiO.sub.2 type glass having a GeO.sub.2 content of 20 to 95 mol %, but this composition is not particularly limitative, and any glass compositions can be used so long as they have a high volume expansion coefficient.
    • 本发明提供了一种通过将光照射到玻璃薄膜上而制成衍射光栅的方法,其特征在于,随着光照射下的玻璃结构的变化而发生密度变化,体积膨胀不可逆地发生。 所述方法包括通过将相位掩模照射或施加干涉光照射到所述薄膜表面的衍射光栅形成上,并使所述玻璃的光照射部分膨胀并形成所述衍射光栅。 要施加的光通常是紫外线的激光束,例如准分子激光器,Nd-YAG激光器或染料激光器的UV高次谐波。 也可以使用可见光区域的激光束。 优选地,将二氧化硅单晶板用于薄膜的基板,并且使用溅射真空沉积来形成薄膜。 在光照射下体积膨胀的玻璃组合物为GeO 2含量为20〜95摩尔%的GeO 2 -SiO 2型玻璃,但该组成没有特别限制,可以使用任何玻璃组合物,只要它们具有高体积 膨胀系数。