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    • 46. 发明授权
    • Optically coupled resonant pressure sensor
    • 光耦谐振压力传感器
    • US07379629B1
    • 2008-05-27
    • US11164916
    • 2005-12-10
    • David W. Burns
    • David W. Burns
    • G02B6/00
    • G02B6/4202G01L9/002
    • An optically coupled resonant pressure sensor includes a deformable diaphragm and an optically coupled resonator fixedly attached to the deformable diaphragm. The resonator includes a resonator body and a laterally offset photodiode adjacent to the resonator body. The resonator is driven by an electric field generated between the laterally offset photodiode and the resonator body when an incident light strikes the photodiode. Pressure applied to one side of the deformable diaphragm causes a shift in a resonant frequency of the resonator. Also disclosed are a method and system for determining pressure.
    • 光耦合谐振压力传感器包括可变形隔膜和固定地连接到可变形隔膜上的光耦合谐振器。 谐振器包括谐振器体和与谐振器本体相邻的横向偏移的光电二极管。 当入射光照射到光电二极管时,谐振器由横向偏移光电二极管和谐振器本体之间产生的电场驱动。 施加到可变形隔膜的一侧的压力导致谐振器的谐振频率偏移。 还公开了一种用于确定压力的方法和系统。
    • 47. 发明授权
    • Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators
    • 基于光激振荡器频率调制的光纤振动传感器
    • US06763723B1
    • 2004-07-20
    • US09695584
    • 2000-10-25
    • J. David ZookWilliam R. HerbDavid W. Burns
    • J. David ZookWilliam R. HerbDavid W. Burns
    • C01H900
    • G01P15/097G01P2015/0828
    • A sensor device for detecting vibration, including a laser light, a first optical fiber for transmitting the laser light, an oscillator to receive the transmitted laser light and reflect the light as a frequency modulated light; a second optical fiber to transmit the frequency modulated light; and a frequency modulated discriminator for receiving the frequency modulated light from the second optical fiber and producing a signal responsive of vibration of the oscillator. In a preferred embodiment, the frequency modulated discriminator further includes a frequency meter for determining the average number of cycles per unit time to provide a second signal responsive of the temperature of the oscillator. The optical fibers may be a pair of different fibers positioned for transmitting the laser light and the frequency modulated light respectively, or the same fiber positioned for transmitting both the laser light and the frequency modulated light.
    • 一种用于检测振动的传感器装置,包括激光,用于传输激光的第一光纤,用于接收所发射的激光并作为调频光反射的振荡器; 用于传输调频光的第二光纤; 以及频率调制鉴别器,用于接收来自第二光纤的调频光,并产生响应振荡器振动的信号。 在优选实施例中,频率调制鉴别器还包括一个频率计,用于根据振荡器的温度确定每单位时间的平均循环次数以提供第二信号。 光纤可以是分别用于透射激光和频率调制光的一对不同的光纤,或者相同的光纤被定位成用于透射激光和调频光。
    • 48. 发明授权
    • Zero TCF thin film resonator
    • 零TCF薄膜谐振器
    • US06557419B1
    • 2003-05-06
    • US08777652
    • 1996-12-31
    • William R. HerbDavid W. BurnsDaniel W. Youngner
    • William R. HerbDavid W. BurnsDaniel W. Youngner
    • G01B716
    • B81B3/0072B81B2201/0271H03H9/02448H03H9/2463H03H9/2473
    • A multi-material resonant thin film beam for a micromechanical sensor having a zero temperature coefficient of frequency (TCF) which is the resonant frequency shift with temperature change. One of the materials may be polysilicon and the other material may be silicon nitride or silicon oxide. Each material has a different thermal coefficient of expansion. The proportion of the various materials is adjusted and the specific geometries are determined so that the TCF is zero. One embodiment is a microbeam composed of two polysilicon thin films with a silicon nitride thin film inserted between the polysilicon films. The thickness of the silicon nitride film may be adjusted to trim the TCF to zero. The film of nitride instead may be placed on one side of a polysilicon film to form a beam. Dual or multiple beam resonators likewise may be made with several materials. The nitride may be placed in the shank areas which join and secure the ends of the beams. Such zero TCF beams may be incorporated in microsensor structures for measuring pressure, temperature, strain and other parameters.
    • 一种用于微机械传感器的多材料谐振薄膜光束,其具有零温度频率系数(TCF),其是随着温度变化的谐振频率偏移。 其中一种材料可以是多晶硅,另一种材料可以是氮化硅或氧化硅。 每种材料具有不同的热膨胀系数。 调整各种材料的比例,确定特定几何形状,使得TCF为零。 一个实施例是由两个多晶硅薄膜组成的微束,其中氮化硅薄膜插入在多晶硅膜之间。 可以调节氮化硅膜的厚度以将TCF修整为零。 氮化物膜可以放置在多晶硅膜的一侧以形成光束。 双或多束谐振器同样可以由几种材料制成。 氮化物可以放置在连接并固定梁的端部的柄部区域中。 这样的零TCF光束可以并入微传感器结构中,用于测量压力,温度,应变和其它参数。
    • 49. 发明授权
    • Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators
    • 基于光激振荡器频率调制的光纤振动传感器
    • US06246638B1
    • 2001-06-12
    • US09281388
    • 1999-03-30
    • J. David ZookWilliam R. HerbDavid W. Burns
    • J. David ZookWilliam R. HerbDavid W. Burns
    • G02B600
    • G01P15/097G01P2015/0828
    • A sensor device for detecting vibration, including a light source for providing a laser light, a first optical fiber connected to the source for transmitting the laser light, an oscillator positioned to receive the transmitted laser light and adapted to reflect the light as a frequency modulated light; a second optical fiber positioned to capture the frequency modulated light to transmit the frequency modulated light; and a frequency modulated discriminator for receiving the frequency modulated light from the second optical fiber and producing a signal responsive of vibration of the oscillator. In a preferred embodiment, the frequency modulated discriminator further includes a frequency meter for determining the average number of cycles per unit time to provide a second signal responsive of the temperature of the oscillator. The optical fibers may be a pair of different fibers positioned for transmitting the laser light and the frequency modulated light respectively, or the same fiber positioned for transmitting both the laser light and the frequency modulated light. In this latter embodiment, the device further includes a beam splitter to direct the frequency modulated light to the discriminator. The preferred oscillator includes a microchip having a microbeam mounted on a thin silicon cantilever such that deflection of the beam perpendicular to the plane of the microchip changes the tension in the microbeam to change its resonant frequency. Also preferred is a microbeam including a thin metal deposit to create a bimorph structure.
    • 一种用于检测振动的传感器装置,包括用于提供激光的光源,连接到用于传输激光的源的第一光纤,定位成接收所发射的激光并适于将光反射为频率调制的振荡器 光; 第二光纤,定位成捕获调频光以发射调频光; 以及频率调制鉴别器,用于接收来自第二光纤的调频光,并产生响应振荡器振动的信号。 在优选实施例中,频率调制鉴别器还包括一个频率计,用于根据振荡器的温度确定每单位时间的平均循环次数以提供第二信号。 光纤可以是分别用于透射激光和频率调制光的一对不同的光纤,或者相同的光纤被定位成用于透射激光和调频光。 在后一实施例中,该装置还包括一个分束器,用于将调频光引导到鉴别器。 优选的振荡器包括具有安装在薄硅悬臂上的微束的微芯片,使得垂直于微芯片的平面的光束的偏转改变微束中的张力以改变其谐振频率。 还优选的是包含薄金属沉积物以产生双压电晶片结构的微束。