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    • 44. 发明授权
    • Method for low temperature plasma enhanced chemical vapor deposition
(PECVD) of an oxide and nitride antireflection coating on silicon
    • 硅上氧化物和氮化物抗反射涂层的低温等离子体增强化学气相沉积(PECVD)方法
    • US5418019A
    • 1995-05-23
    • US248473
    • 1994-05-25
    • Zhizhang ChenAjeet Rohatgi
    • Zhizhang ChenAjeet Rohatgi
    • C23C16/34C23C16/40C23C16/56G02B1/11B05D3/06G02B5/26
    • H01L31/02168C23C16/345C23C16/402C23C16/56G02B1/115Y02E10/50
    • A sequential plasma-enhanced chemical vapor deposition (PECVD) of SiN and SiO.sub.x produces a very effective double-layer antireflection coating. This antireflection coating is compared with the frequently used and highly efficient double-layer MgF.sub.2 /ZnS coating. It is shown that the double-layer SiO.sub.x /SiN coating improves the short-circuited current (J.sub.sc) by 47%, open-circuit voltage (V.sub.oc) by 3.7%, and efficiency (Eff) by 55% for silicon cells with oxide surface passivation. The counterpart MgF.sub.2 /ZnS coating gives smaller improvement in V.sub.oc and Eff. However, if silicon cells do not have the oxide passivation, the PECVD SiO.sub.x /SiN gives much greater improvement in the cell parameters, 57% in J.sub.sc, 8% in V.sub.oc, and 66% in efficiency, compared to the MgF.sub.2 /ZnS coating which improves J.sub.sc by 50%, V.sub.oc by 2%, and cell efficiency by 54%. This significant additional improvement results from the PECVD deposition-induced surface/defect passivation. The internal quantum efficiency (IQE) measurements showed that the PECVD SiO.sub.x /SiN coating absorbs fair amount of photons in the short-wavelength range (
    • SiN和SiOx的顺序等离子体增强化学气相沉积(PECVD)产生非常有效的双层抗反射涂层。 将该抗反射涂层与经常使用且高效的双层MgF2 / ZnS涂层进行比较。 显示双层SiOx / SiN涂层将氧化物表面的硅电池的短路电流(Jsc)提高了47%,开路电压(Voc)提高了3.7%,效率(Eff)提高了55% 钝化。 对应的MgF2 / ZnS涂层在Voc和Eff方面提供较小的改进。 然而,如果硅电池不具有氧化物钝化,则与MgF 2 / ZnS涂层相比,PECVD SiO x / SiN在电池参数方面提供了更大的改进,在Jsc中为57%,Voc为8%,效率为66% 将Jsc提高50%,Voc提高2%,电池效率提高54%。 这种显着的附加改进来自于PECVD沉积诱导的表面/缺陷钝化。 内部量子效率(IQE)测量表明,PECVD SiOx / SiN涂层在短波长范围(<500 nm)吸收了相当数量的光子,然而,改进的表面/缺陷钝化比补偿Jsc和 与MgF2 / ZnS涂层相比,电池效率提高了很多。