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    • 47. 发明授权
    • Microwave plasma processing apparatus
    • 微波等离子体处理装置
    • US4512868A
    • 1985-04-23
    • US628863
    • 1984-07-09
    • Shuzo FujimuraHiroshi Yano
    • Shuzo FujimuraHiroshi Yano
    • H05H1/46H01J37/32H01L21/302H01L21/3065C23C15/00
    • H01L21/3065H01J37/32357
    • A microwave plasma processing apparatus for dry etching or ashing in a fabricating process for an integrated circuit semiconductor device is improved to provide a higher processing rate. The apparatus comprises a plasma generating region formed in a part of a waveguide through which microwave power is transmitted. A reactive gas is introduced into the plasma generating region and a plasma is generated by the microwave power applied thereto. A reacting region is coupled to the plasma generating region through a shielding member, wherein radicals of the reactive gas generated in the plasma enter the reacting region through the shielding member. The plasma generating region, the reacting region and an evacuating device comprise a vacuum system and establish a fixed gas pressure for the reactive gas. The radicals (active species) react with an object placed in the reacting region, forming volatile compounds which are removed by the evacuating device. The plasma is confined in the plasma generating region by the shielding means, thereby preventing damage of the object due to the plasma.
    • 在集成电路半导体器件的制造工艺中用于干蚀刻或灰化的微波等离子体处理设备被改进以提供更高的处理速率。 该装置包括形成在波导的一部分中的等离子体产生区域,微波功率通过该波导发射。 反应气体被引入到等离子体产生区域中,并且通过施加到其上的微波功率产生等离子体。 反应区域通过屏蔽构件耦合到等离子体产生区域,其中在等离子体中产生的反应气体的自由基通过屏蔽构件进入反应区域。 等离子体产生区域,反应区域和排气装置包括真空系统并建立用于反应气体的固定气体压力。 基团(活性物质)与放置在反应区域中的物体反应,形成由抽空装置除去的挥发性化合物。 通过屏蔽装置将等离子体限制在等离子体产生区域中,从而防止由于等离子体而造成的物体损坏。
    • 50. 发明授权
    • Multifunction electronic meter for vehicle
    • 车载多功能电子表
    • US4356470A
    • 1982-10-26
    • US188108
    • 1980-09-17
    • Kouichi KogawaTeruo KawasakiHiroyuki NomuraHiroshi Yano
    • Kouichi KogawaTeruo KawasakiHiroyuki NomuraHiroshi Yano
    • G01D7/00G01D7/02G01F15/06G07C5/08G09F9/00G09G3/12G08B19/00
    • G07C5/0825G01D7/02G01F15/063
    • A multifunction electronic meter for a vehicle can display selectively plural measured informations of fuel amount, cooling water temperature, oil pressure, battery voltage and the like of a vehicle on a single display section, the displayed informations being accompanied respectively with combinations of symbolmarks and surrounding frames thereof for identifying and warning those informations.The principal information of, for instance, fuel amount is ordinarily displayed, while the remaining informations are displayed selectively as occasion demands, for instance, in response to the occurrence of an emergency. When plural emergencies are simultaneously caused, the information corresponding to the lastly caused emergency is displayed intermittently together with the symbolmark, while only the symbolmarks and the frames of the informations corresponding to the previously caused emergencies are displayed continuously. Consequently, the most requisite measured information can be ordinarily noticed by a driver, as well as the remaining informations which are noticeable as occasion demands, regardless of the desired simplicity of configuration of an instrument panel of the vehicle.
    • 一种用于车辆的多功能电子计量表可以在单个显示部分上选择性地显示车辆的燃料量,冷却水温度,油压,电池电压等的多个测量信息,所显示的信息分别伴有符号和周围的组合 其框架用于识别和警告这些信息。 通常显示例如燃料量的主要信息,而根据需要例如响应于紧急情况的发生,有选择地显示剩余的信息。 当同时引起多个紧急情况时,与最后引起的紧急情况相对应的信息与符号标记间歇地显示,而仅连续显示与先前引起的紧急情况相对应的信息的符号标识和帧。 因此,驾驶员通常可以注意到最需要的测量信息,以及根据需要可以注意到的剩余信息,而不考虑车辆仪表板的所需简单性。