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41. 发明授权

US10167187B2 Physical quantity sensor having an elongated groove, and manufacturing method thereof 有权
公开(公告)号：US10167187B2
公开(公告)日：2019-01-01
申请号：US14326866
申请日：2014-07-09
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： B81B3/00
摘要： A physical quantity sensor includes a first sensor element, and an outer edge portion arranged in at least part of the outer periphery of the first sensor element, and a first groove extending in a first direction provided in the outer edge portion in a plan view of the outer edge portion.

42. 发明授权

US09739643B2 Physical quantity sensor, vibratory device, electronic apparatus, and moving object 有权
公开(公告)号：US09739643B2
公开(公告)日：2017-08-22
申请号：US14479868
申请日：2014-09-08
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01D5/241 , G01R27/26
CPC分类号： G01D5/241
摘要： A physical quantity sensor includes a substrate, a fixation section and a wiring line provided to the substrate, a contact section adapted to electrically connect the fixation section and the wiring line to each other, and a movable electrode electrically connected to the wiring line via the fixation section. The contact section is disposed in the fixation section in a second area outside a first area obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view. The fixed support area is sandwiched by edge portions of an area where the movable electrode and the fixation section are connected to each other.

43. 发明授权

US09446939B2 Functional element, electronic apparatus, and moving object 有权
标题翻译：功能元件，电子设备和移动物体
公开(公告)号：US09446939B2
公开(公告)日：2016-09-20
申请号：US14305259
申请日：2014-06-16
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： B81B3/00 , B81B7/00
CPC分类号： B81B3/0097 , B81B7/0006 , B81B2201/0235 , B81B2201/0242 , B81B2201/0285
摘要： A functional element includes a first electrode section, a second electrode section, a first wiring line connected to the first electrode section, and a second wiring line connected to the second electrode section, the first wiring line is provided with at least one first intersecting section intersecting with a wiring line other than the second wiring line, the second wiring line includes at least one second intersecting section intersecting with a wiring line other than the first wiring line, and a difference between a number of the first intersecting sections and a number of the second intersecting sections satisfies a condition one of equal to and lower than 50% with respect to larger one of the number of the first intersecting sections and the number of the second intersecting sections.
摘要翻译：功能元件包括第一电极部分，第二电极部分，连接到第一电极部分的第一布线和连接到第二电极部分的第二布线，第一布线设置有至少一个第一相交部分与第二布线以外的布线相交，第二布线包括与第一布线以外的布线交叉的至少一个第二交叉部，第一相交部的数量与第第二交叉部分相对于第一交叉部分的数量和第二交叉部分的数量中的较大的一个满足等于或小于50％的条件一。

44. 发明授权

US09376313B2 Mems having a cutout section on concave portion of a substrate 有权
标题翻译：在基板的凹部具有切口部的金属件
公开(公告)号：US09376313B2
公开(公告)日：2016-06-28
申请号：US14687057
申请日：2015-04-15
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01L9/00 , H01L21/00 , H05K7/02 , G01P15/08 , B81C1/00 , H01L23/00 , B81B3/00 , H01L23/528 , H01L21/762 , B81B7/00 , G01C19/5656
CPC分类号： B81B3/0072 , B81B3/0018 , B81B7/007 , B81B2201/0235 , B81B2201/0242 , B81B2203/0118 , B81B2207/097 , B81C1/00158 , B81C2203/0109 , G01C19/5656 , G01L9/0042 , H01L21/76205 , H01L23/528 , H01L24/02 , H01L2224/0212 , H01L2924/15 , H01L2924/351
摘要： According to an aspect of the invention, a functional element includes a substrate which is provided with a concave section; a stationary section connected to a wall section that defines the concave section of the substrate; an elastic section which extends from the stationary section and is capable of stretching and contracting in a first axis direction; a movable body connected to the elastic section; a movable electrode section which extends from the movable body. The concave section includes a cutout section which is provided on the wall section. The stationary section includes an overlap section which is spaced with the substrate, and overlaps the concave section when seen in a plan view. At least a portion of the overlap section overlaps the cutout section when seen in the plan view, and the elastic section extends from the overlap section.
摘要翻译：根据本发明的一个方面，功能元件包括设置有凹部的基板; 连接到限定所述基板的凹部的壁部的固定部; 弹性部分，其从固定部分延伸并且能够在第一轴线方向上伸缩; 连接到所述弹性部分的可移动体; 从可动体延伸的可动电极部。凹部包括设置在壁部上的切口部。固定部分包括与基板间隔开的重叠部分，并且在平面图中看时与凹部重叠。当在平面图中看时，重叠部分的至少一部分与切口部分重叠，并且弹性部分从重叠部分延伸。

45. 发明授权

US11573246B2 Inertial sensor and inertial measurement unit 有权
公开(公告)号：US11573246B2
公开(公告)日：2023-02-07
申请号：US17389462
申请日：2021-07-30
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/125
摘要： An inertial sensor includes: a substrate; a fixing part arranged at one surface of the substrate; a moving element having an opening and configured to swing about a rotation axis along a first direction; a support beam supporting the moving element as the rotation axis in the opening of the moving element; and a support part supporting the support beam. The support part includes a first part fixed to the fixing part, and a second part formed only of a part not fixed to the fixing part. A length in the first direction of the second part is longer than a length in the first direction of the first part.

46. 发明授权

US11204367B2 Physical quantity sensor, physical quantity sensor device, complex sensor device, inertial measurement unit, and vehicle 有权
公开(公告)号：US11204367B2
公开(公告)日：2021-12-21
申请号：US16201198
申请日：2018-11-27
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/125 , G01P15/08 , B81B5/00 , G01P15/18 , G01P3/00
摘要： A physical quantity sensor includes a substrate, a support portion fixed to the substrate, a movable body which is displaceable in a first direction with respect to the support portion and has a movable electrode provided therein, and a fixed electrode fixed to the substrate. The fixed electrode includes first and second fixed electrode fingers positioned on one side of the support portion, third and fourth fixed electrode fingers positioned on the other side thereof. The movable electrode includes first to fourth movable electrode fingers which face the first to fourth fixed electrode fingers in the first direction, respectively.

47. 发明授权

US10663481B2 Physical quantity sensor, electronic device, and mobile body 有权
公开(公告)号：US10663481B2
公开(公告)日：2020-05-26
申请号：US16255975
申请日：2019-01-24
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/13 , G01C19/5712 , G01P15/125 , G01P15/08 , B81B3/00
摘要： A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section.

48. 发明授权

US10656174B2 Physical quantity sensor, electronic device, and mobile body 有权
公开(公告)号：US10656174B2
公开(公告)日：2020-05-19
申请号：US16251555
申请日：2019-01-18
申请人： Seiko Epson Corporation
发明人： Shota Kigure , Satoru Tanaka
IPC分类号： G01P15/125 , G01P15/08
摘要： A physical quantity sensor has a first movable electrode section which has a portion facing a first fixed electrode section and a second movable electrode section which has a portion facing a second fixed electrode section, and is provided with a movable mass section which is formed in a shape which encloses a first fixed electrode side fixed section, a second fixed electrode side fixed section, a first movable electrode side fixed section, and a second movable electrode side fixed section in planar view.

49. 发明授权

US10408856B2 Electronic device, method of manufacturing electronic device, physical quantity sensor, electronic apparatus and moving object 有权
公开(公告)号：US10408856B2
公开(公告)日：2019-09-10
申请号：US14987186
申请日：2016-01-04
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： B81B3/00 , G01P15/08 , G01P15/125
摘要： A physical quantity sensor includes a first sensor element, an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element, in which a first groove portion extending in a first direction is provided on the outer edge portion when the outer edge portion is seen in plan view.

50. 发明授权

US10197591B2 Physical quantity sensor, electronic device, and moving object 有权
公开(公告)号：US10197591B2
公开(公告)日：2019-02-05
申请号：US15919527
申请日：2018-03-13
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08
摘要： A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate.

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