会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 47. 发明授权
    • Laser scanner
    • 激光扫描仪
    • US07626690B2
    • 2009-12-01
    • US11899289
    • 2007-09-05
    • Kaoru KumagaiKen-ichiro YoshinoYasushi Tanaka
    • Kaoru KumagaiKen-ichiro YoshinoYasushi Tanaka
    • G01C1/00G01C3/08G02B23/00
    • G01C15/002G01S7/4817G01S17/42
    • A laser scanner, comprising a mirror rotatably provided, a driving unit for rotating the mirror, a distance measuring unit for projecting a distance measuring light for scanning to a measurement range via the mirror and for obtaining a position data by receiving the reflected distance measuring light via the mirror, a measuring direction observing means for indicating a projecting direction of the distance measuring light, and an operation unit for setting the measurement range by designating at least two measuring directions based on the result of observation of the measuring direction obtained by the measuring direction observing means.
    • 一种激光扫描仪,包括可旋转地设置的反射镜,用于旋转反射镜的驱动单元,用于经由反射镜将用于扫描的距离测量光投射到测量范围的距离测量单元,以及通过接收反射距离测量光来获得位置数据 通过反射镜,用于指示距离测量光的投影方向的测量方向观察装置,以及用于通过基于通过测量获得的测量方向的观察结果指定至少两个测量方向来设置测量范围的操作单元 方向观察装置。
    • 49. 发明授权
    • Electrostatic chuck and its manufacturing method
    • 静电吸盘及其制造方法
    • US06992876B1
    • 2006-01-31
    • US10030592
    • 1999-07-08
    • Shu NakajimaYasushi Tanaka
    • Shu NakajimaYasushi Tanaka
    • H01G23/00
    • H01L21/67109H01L21/6831H01L21/6833Y10S269/903Y10T279/23
    • An electrostatic chuck for preventing warpage of a ceramic layer and cooling gas leakage while providing enhanced electrostatic attraction and an improved detachment performance and its manufacturing method is disclosed. The chuck comprises at least one electrode (90, 91, 92) located in the middle of the ceramic layer (80) in its thickness direction, a cooling gas channel (81) is formed on a surface of the ceramic layer within an outer edge of the electrode and above the electrode, wherein the electrode extends beyond the cooling gas channel. Preferably the electrodes are shaped in the form of two interlocked structures comprising multiple interconnected C-shaped ring portion (91c, 92c).
    • 公开了一种静电吸盘,用于防止陶瓷层的翘曲和冷却气体泄漏,同时提供增强的静电吸引力和改进的脱离性能及其制造方法。 卡盘包括位于陶瓷层(80)的厚度方向中间的至少一个电极(90,91,92),在外边缘的陶瓷层的表面上形成冷却气体通道(81) 的电极和电极上方,其中电极延伸超过冷却气体通道。 优选地,电极以包括多个互连的C形环部分(91c,92c)的两个互锁结构的形式成形。