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41. 发明授权

US5769110A Fluid control apparatus 失效
标题翻译：流体控制装置
公开(公告)号：US5769110A
公开(公告)日：1998-06-23
申请号：US672668
申请日：1996-06-28
申请人： Tadahiro Ohmi , Keiji Hirao , Michio Yamaji , Shigeru Itoi , Tsutomu Shinohara , Nobukazu Ikeda , Hiroshi Morokoshi , Tetsuya Kojima
发明人： Tadahiro Ohmi , Keiji Hirao , Michio Yamaji , Shigeru Itoi , Tsutomu Shinohara , Nobukazu Ikeda , Hiroshi Morokoshi , Tetsuya Kojima
IPC分类号： G05D7/06 , F15B13/00 , F15B13/08 , G05D16/20 , F16K11/22
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要： A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.
摘要翻译：流体控制装置包括质量流量控制器，设置在控制器入口侧的两个开关阀和设置在控制器出口侧的三个开关阀。在入口侧，主流体开关阀位于净化流体开关阀上，并且在出口侧，通气开关阀位于真空吸入开关阀上，主通道开关阀进一步定位在通气开关阀上。

42. 发明授权

US07988130B2 Valve for vacuum exhaustion system 有权
标题翻译：真空排气系统阀门
公开(公告)号：US07988130B2
公开(公告)日：2011-08-02
申请号：US12208949
申请日：2008-09-11
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
IPC分类号： F16K7/17
CPC分类号： F16K7/14 , F16K27/003 , F16K51/02
摘要： The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.
摘要翻译：本发明提供了一种操作阀门的阀门和方法，其使得可以减小真空排气管道的直径，从而使得真空耗尽系统的设备较小，这导致降低成本并缩短真空耗尽时间，以及哪些可以防止由流经管道的气体分解产生的物质积聚引起的管道系统内的腐蚀，堵塞和密封泄漏。特别地，根据本发明，在真空耗尽系统中使用的管道部件即阀等上施加铝钝化，以便抑制由于烘烤时由温度升高引起的气体分解提供了用于减小真空排气系统中的直径尺寸的部件。因此，防止由气体分解引起的腐蚀，堵塞和座椅泄漏。

43. 发明申请

US20090020721A1 Valve for Vacuum Exhaustion System 有权
标题翻译：真空耗尽阀系统
公开(公告)号：US20090020721A1
公开(公告)日：2009-01-22
申请号：US12208949
申请日：2008-09-11
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
IPC分类号： F16K1/00
CPC分类号： F16K7/14 , F16K27/003 , F16K51/02
摘要： The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.
摘要翻译：本发明提供了一种操作阀门的阀门和方法，其可以减小真空排气管道的直径，使得真空耗尽系统的设备变小，这导致降低成本并缩短真空耗尽时间，以及哪些可以防止由流经管道的气体分解产生的物质积聚引起的管道系统内的腐蚀，堵塞和密封泄漏。特别地，根据本发明，在真空耗尽系统中使用的管道部件即阀等上施加铝钝化，以便抑制由于烘烤时由温度升高引起的气体分解提供了用于减小真空排气系统中的直径尺寸的部件。因此，防止由气体分解引起的腐蚀，堵塞和座椅泄漏。

44. 发明授权

US06152168A Pressure-type flow rate control apparatus 有权
标题翻译：压力式流量控制装置
公开(公告)号：US06152168A
公开(公告)日：2000-11-28
申请号：US284352
申请日：1999-05-24
申请人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
发明人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
IPC分类号： F16K17/22 , G05D7/06
CPC分类号： G05D7/0647 , Y10T137/7759 , Y10T137/7761
摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q=KP1 (K=constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves a variable orifice wherein the gap is adjusted by the orifice drive.
摘要翻译： PCT No.PCT / JP98 / 03620 Sec。 371日期1999年5月24日 102（e）日期1999年5月24日PCT提交1998年8月13日PCT公布。公开号WO99 / 09463 日期1999年2月25日一种特别用于半导体制造设备中的气体供给系统的压力式流量控制装置。流量控制装置设置有可变孔口，其允许容易地切换流体流量控制范围以及压力型流量控制装置的尺寸减小，并且提供其它优点，包括改进的气体替换性，防止灰尘形成和降低流量控制系统的制造成本。该装置包括孔口，设置在孔口的上游侧的控制阀，设置在控制阀和孔口之间的压力检测器，以及控制单元，用于根据检测到的压力P1计算流体流量Q 压力检测器具有等式Q = KP1（K =常数），并且在控制阀的驱动器中输出设定流量信号Qs和计算流量信号Q之间的差作为控制信号Qy，其中压力P1 on 孔口的上游侧通过致动用于控制孔口下游流体的流速的控制阀来调节，孔口上游侧的压力P1与保持在不同的孔口的下游压力P2之间的比率P2 / P1 高于受控流体的临界压力的比例，其特征在于，直接触摸式金属隔膜阀单元用作孔口，并且阀海之间的环形间隙并且隔膜用于可变孔口，其中间隙由孔口驱动器调节。

45. 发明授权

US6145888A Pipe joint with inspection window 失效
标题翻译：管接头带检查窗
公开(公告)号：US6145888A
公开(公告)日：2000-11-14
申请号：US441989
申请日：1995-05-16
申请人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Tsutomu Shinohara , Tetsuya Kojima
发明人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Tsutomu Shinohara , Tetsuya Kojima
IPC分类号： F16L19/02 , F16L19/03 , F16L37/14
CPC分类号： F16L19/0218 , F16L19/025 , Y10S285/917
摘要： A pipe joint comprises a pair of tubular joint members made of a metal and each having an abutting end face, an annular gasket made of a metal and interposed between the abutting end faces of the respective joint members, a nut joining the joint members together and a retainer holding the gasket to one of the joint members. The joint members are made of stainless steel and silver white. The retainer is made of stainless steel and colored blue so as to be discernible from the joint members. The joint can be checked for the presence of the retainer, accordingly for the presence of the gasket, merely by discerning whether the color seen through an inspection window is blue or silver white.
摘要翻译：管接头包括一对由金属构成的每个具有邻接端面的管状接头构件，由金属制成的环形垫圈，并且插入在各个接头构件的邻接端面之间，将接头构件连接在一起的螺母和将垫圈保持在其中一个接头部件上。连接件由不锈钢和银白色制成。保持器由不锈钢制成并且呈蓝色，从而可以从接头构件中辨别出。可以通过识别通过检查窗看到的颜色是蓝色还是银白色，可以检查保持器的存在，因此存在垫圈。

46. 发明授权

US6035893A Shutoff-opening devices and fluid control apparatus comprising such devices 失效
标题翻译：包括这种装置的切开装置和流体控制装置
公开(公告)号：US6035893A
公开(公告)日：2000-03-14
申请号：US882291
申请日：1997-06-25
申请人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Masayuki Hatano , Kosuke Yokoyama , Shigeaki Tanaka
发明人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Masayuki Hatano , Kosuke Yokoyama , Shigeaki Tanaka
IPC分类号： F16K1/52 , F15B13/00 , F15B13/08 , F15C3/00 , F16K27/00 , G05D7/00 , G05D7/06 , F16K11/10
CPC分类号： F15B13/0814 , F15B13/0825 , F15B13/0835 , F15B13/0871 , F15B13/0892 , F16K27/003 , Y10T137/87249 , Y10T137/87684 , Y10T137/87877 , Y10T137/87885
摘要： A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly downward and having the first valve actuator mounted thereon.
摘要翻译：阀主体内部形成有从其后端面延伸到第一阀致动器的主通道，以及分别经由第二和第三阀致动器与主通道连通的两个子通道。阀主体具有向前延伸并且安装有第一阀致动器的倾斜面。

47. 发明授权

US5850853A Fluid control system and valve to be used therein 失效
标题翻译：流体控制系统和阀门用于其中
公开(公告)号：US5850853A
公开(公告)日：1998-12-22
申请号：US630081
申请日：1996-04-09
申请人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Hiroshi Morokoshi
发明人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Hiroshi Morokoshi
IPC分类号： B01J4/00 , C30B25/14 , C30B31/16 , F16K31/122 , F16K31/42
CPC分类号： C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
摘要翻译：流体控制系统及其阀门组件用于精确地控制流体的供给（通过快速准确地操作（打开和关闭）阀门），用于制造半导体，磁性薄膜，生物技术产品和其他产品。流体控制系统包括主控制线（L）和多个分支控制线（L1，L2 ...），用于将多种类型的流体（G1，G2 ...）馈送到耦合到主控制线和并入分支控制线（L1，L2 ...）中的多个阀组件（V），用于切换供给到处理装置（C）中的流体（G1，G2 ...）。每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀（V“）阀（V'）将工作流体（A）输送到流体压力致动器（1）中。

48. 发明授权

US06618922B2 Cooperating fixing jigs for aligning a plurality of lower members on a support member 有权
标题翻译：用于对准支撑构件上的多个下部构件的协作固定夹具
公开(公告)号：US06618922B2
公开(公告)日：2003-09-16
申请号：US10097872
申请日：2002-03-15
申请人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
发明人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
IPC分类号： B25B2714
CPC分类号： F16K27/003 , Y10T29/49895 , Y10T29/49899 , Y10T29/49902 , Y10T29/53913 , Y10T29/53978
摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.
摘要翻译：使用第一和第二两个间隔夹具81，每个具有在其底表面上形成有长方体的平行六面体81a，突出部82以等于参考孔106之间的预定间隔的间隔并排布置。首先，第一夹具81装配在下部构件31,32,33的前参考孔106中，第二夹具82的突起82装配在下部构件的后部参考孔106中。具有矩形框架形式的直角保持夹具84，其内侧面可分别与第一夹具81的前侧面，第二夹具81的后侧面和第二夹具81的左右侧面接触两个夹具81围绕两个夹具81的主体81a配合，以将孔106的布置调整成直角。在这种状态下，下部构件通过拧紧螺钉构件110而固定到支撑构件。

49. 发明授权

US5837907A Method of tightening threaded members 失效
标题翻译：拧紧螺纹构件的方法
公开(公告)号：US5837907A
公开(公告)日：1998-11-17
申请号：US862292
申请日：1997-05-22
申请人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
发明人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
IPC分类号： B23P19/06 , B25B23/14 , G01L3/06
CPC分类号： B23P19/069 , B23P19/066 , B25B23/14
摘要： A method is provided for tightening up threaded members with proper tightening torque free of unequivalent tightening. In tightening a plurality of threaded members by drive means, the amount of tightening and tightening torque of each threaded member are detected as the members are progressively tightened, and when the tightening amount of each member has reached a value within a specified range, the difference in tightening torque between the threaded members is checked as to whether it is within a predetermined range.
摘要翻译：提供了一种方法，用于以不受等效收紧的适当紧固扭矩拧紧螺纹部件。在通过驱动装置拧紧多个螺纹构件时，随着构件逐渐紧固，检测每个螺纹构件的拧紧和紧固扭矩的量，并且当每个构件的紧固量达到特定范围内的值时，检查螺纹构件之间的紧固扭矩是否在预定范围内。

50. 发明授权

US06199260B1 Method of fixing a plurality of lower members each having reference bore for installing upper member, and fixing jigs 失效
标题翻译：固定多个下部构件的方法，每个下部构件具有用于安装上部构件的基准孔和固定夹具
公开(公告)号：US06199260B1
公开(公告)日：2001-03-13
申请号：US09168859
申请日：1998-10-09
申请人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
发明人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
IPC分类号： B23Q300
CPC分类号： F16K27/003 , Y10T29/49895 , Y10T29/49899 , Y10T29/49902 , Y10T29/53913 , Y10T29/53978
摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.
摘要翻译：使用第一和第二两个间隔夹具81，每个具有在其底表面上形成有长方体的平行六面体81a，突出部82以等于参考孔106之间的预定间隔的间隔并排布置。首先，第一夹具81装配在下部构件31,32,33的前参考孔106中，第二夹具82的突起82装配在下部构件的后部参考孔106中。具有矩形框架形式的直角保持夹具84，其内侧面可分别与第一夹具81的前侧面，第二夹具81的后侧面和第二夹具81的左右侧面接触两个夹具81围绕两个夹具81的主体81a配合，以将孔106的布置调整成直角。在这种状态下，下部构件通过拧紧螺钉构件110而固定到支撑构件。

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