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    • 44. 发明申请
    • Measuring method and apparatus of thin film thickness
    • 薄膜厚度的测量方法和装置
    • US20050073323A1
    • 2005-04-07
    • US10902132
    • 2004-07-30
    • Ryuji KohnoTatsuya NagataNaoki WataseMichihiro Watanabe
    • Ryuji KohnoTatsuya NagataNaoki WataseMichihiro Watanabe
    • G01B7/06G01R27/26H01L21/66
    • G01R27/2605
    • In an apparatus for measuring thickness of a thin film, which is formed through a conductor, preventing the measurement from an error due to the curve or bend on a substrate surface or a moving surface of a stage, but without necessity of a large-scaled facility, an electric filed is applied between a probe 10 and a stage 8, so as to obtain an electrostatic capacitance of the substrate 3, an electrostatic capacitance of an insulating film, which is formed between the substrate 3, and an electrostatic capacitance defined starting from the substrate 3 to the thin film 4. The electrostatic capacitance between the substrate 3 and the thin film 4 is measured at plural numbers of places covering over the entire surface of the thin film 4. The probe 10 is so supported that the contact load “P” comes to be constant, by the probe 10 onto the thin film 4. A contact area of the probe 10 between the thin film 4 is calculated out through a predetermined equation, assuming the load “P” is constant. From respective electrostatic capacitances and the contact area measured, a distribution of thickness of the thin film 4 over the entire area thereof.
    • 在用于测量通过导体形成的薄膜厚度的装置中,防止测量由于基板表面或台的移动表面上的曲线或弯曲引起的误差,而不需要大尺寸 在探针10和载物台8之间施加电场,以获得基板3的静电电容,形成在基板3之间的绝缘膜的静电电容与开始定义的静电电容 从基板3到薄膜4.在覆盖在薄膜4的整个表面上的多个位置处测量基板3和薄膜4之间的静电电容。探针10被支撑为接触负载 假定负载“P”是恒定的,则通过探针10将薄膜4固定在薄膜4上的探针10的接触区域。 从相应的静电电容和测量的接触面积,薄膜4的整个面积的厚度分布。
    • 48. 发明授权
    • Sound-electricity conversion device, array-type ultrasonic transducer, and ultrasonic diagnostic apparatus
    • 声电转换装置,阵列式超声波换能器和超声波诊断装置
    • US07817811B2
    • 2010-10-19
    • US11341655
    • 2006-01-30
    • Shinichiro UmemuraTakashi AzumaTatsuya NagataHiroshi FukudaToshiyuki MineSyuntaro Machida
    • Shinichiro UmemuraTakashi AzumaTatsuya NagataHiroshi FukudaToshiyuki MineSyuntaro Machida
    • H04R25/00
    • B06B1/0292
    • The present invention aims to stabilize sound-electricity conversion characteristics of a diaphragm-type sound-electricity conversion device as well as to decrease the noise level of an ultrasonic diagnostic apparatus using the sound-electricity conversion device. The sound-electricity conversion device is configured by a capacitor cell including a lower electrode formed on a silicon substrate and an upper electrode over the lower electrode, the lower and upper electrodes sandwiching a cavity. An electrode short-circuit prevention film is formed on the upper electrode on the cavity side. The electrode short-circuit prevention film is formed of a material with an electrical time constant shorter than 1 second and longer than 10 microseconds, such as silicon nitride containing a stoichiometrically excessive amount of silicon. As a result, the electrode short-circuit prevention film has small electric conductivity, and thus it is made possible to prevent the film from being charged with electric charge and to avoid the drift of the electric charge. Consequently, the sound-electricity conversion characteristics of the sound-electricity conversion device stabilize, and further the sound noise level of the ultrasonic diagnostic apparatus decreases.
    • 本发明旨在稳定隔膜式声电转换装置的声电转换特性,并且降低使用声电转换装置的超声波诊断装置的噪声水平。 声电转换装置由包括形成在硅基板上的下电极和下电极上的上电极的电容器单元构成,下电极和上电极夹着空腔。 在空腔侧的上部电极上形成电极短路防止膜。 电极短路防止膜由电气时间常数短于1秒且长于10微秒的材料形成,例如含有化学计量过量的硅的氮化硅。 结果,电极短路防止膜具有小的导电性,因此可以防止膜被充电并避免电荷的漂移。 因此,声电转换装置的声电转换特性稳定,超声波诊断装置的声音噪声水平进一步降低。
    • 50. 发明申请
    • ULTRASONOGRAPHIC DEVICE
    • 超声波设备
    • US20090301199A1
    • 2009-12-10
    • US11996532
    • 2006-01-30
    • Takashi AzumaShinichiro UmemuraTatsuya NagataHiroshi FukudaShuntaro MachidaToshiyuki Mine
    • Takashi AzumaShinichiro UmemuraTatsuya NagataHiroshi FukudaShuntaro MachidaToshiyuki Mine
    • G01N29/34H02N1/08
    • A61B8/4483A61B8/08A61B8/4281B06B1/0292G01N29/2431G01S15/00
    • The receive sensitivity of an ultrasound array transducer structured with a diaphragm electro-acoustic transducer (101) being a basic unit is affected by change in a charge amount with elapsed time due to leakage or the like, which causes drift of the primary beam sensitivity, degradation in the acoustic SN ratio due to a rise in the acoustic noise level, and degradation in the directivity of an ultrasound beam. To addressing this problem, a charge controller (charge monitor 211) is provided to control charge in an electro-acoustic transducer (101). A charge monitoring section (102) monitors the change in the charge amount. When change in the charge amount is small, transmit sensitivity or receive sensitivity is calibrated by a controller (104) by, for example, multiplying a receive signal by a calibration coefficient corresponding to the change amount. Further, when the change in the charge amount is large, for example, charges can be re-emitted from a charge emitter (103). The series of operations is controlled by the controller (104), and thus sensitivity variation caused by difference in the changes with elapsed time, particularly between the plural transducers, is calibrated.
    • 由作为基本单元的隔膜电声换能器(101)构成的超声波阵列换能器的接收灵敏度受到由于泄漏等引起的经过时间的电荷量的变化的影响,导致主光束灵敏度的漂移, 由于声学噪声水平的上升引起的声学SN比的降低,以及超声波束的方向性的劣化。 为了解决这个问题,提供一种充电控制器(充电监视器211)来控制电声换能器(101)中的电荷。 充电监视部(102)监视充电量的变化。 当充电量的变化小时,通过例如将接收信号乘以对应于变化量的校准系数,由控制器(104)校准发射灵敏度或接收灵敏度。 此外,当电荷量的变化大时,例如,电荷可以从电荷发射体(103)重新发射。 一系列操作由控制器(104)控制,因此校正了由于经过时间的变化,特别是多个换能器之间的差异引起的灵敏度变化。