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41. 发明授权

US07492455B1 Discrete polarization state spectroscopic ellipsometer system and method of use 有权
标题翻译：离散偏振态光谱椭偏仪系统及其使用方法
公开(公告)号：US07492455B1
公开(公告)日：2009-02-17
申请号：US11483888
申请日：2006-07-10
申请人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
发明人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0224 , G01J3/10 , G01N21/274 , G01N2021/213
摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.
摘要翻译：一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。优选的光谱椭偏仪系统没有在数据采集期间移动的部件，并且其提供渐进多个顺序离散而不是连续变化的偏振状态。

42. 发明授权

US5963327A Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems 失效
标题翻译：全内反射电磁辐射束进入和离开椭偏仪，偏振计，反射计等系统
公开(公告)号：US5963327A
公开(公告)日：1999-10-05
申请号：US33694
申请日：1998-03-03
申请人： Ping He , Blaine D. Johs , Craig M. Herzinger
发明人： Ping He , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01J3/14 , G01J3/447 , G01J4/00
CPC分类号： G01J3/447 , G01J3/14
摘要： Disclosed are laterally compact ellipsometer, polarimeter, reflectometer and the like material system investigating systems, and methods for their use. Input and output optical elements effect changes in orientation, (propagation direction), of a beam of electromagnetic radiation caused to pass therethrough by an essentially total internal reflection therein. In addition, a propagation direction diverted beam of electromagnetic radiation can be simultaneously, optionally, caused to have a phase retardation entered between orthogonal polarization components thereof by at least one of the input and output optical elements. The present invention enables relatively simple investigation of a sample system with a polarized beam of electromagnetic radiation which impinges thereupon at a less than Brewster Angle, small "spot" size effecting angle-of-incidence, with respect to a normal to a surface of an investigated material system.
摘要翻译：公开了横向紧凑型椭圆计，偏振计，反射计等物质系统调查系统及其使用方法。输入和输出光学元件通过其中基本上全内反射而影响通过其中的电磁辐射束的方向（传播方向）的变化。此外，电磁辐射的传播方向转向光束可以同时被选择性地由输入和输出光学元件中的至少一个在其正交偏振分量之间输入相位延迟。本发明使得能够相对简单地研究具有电磁辐射的偏振光束的样品系统，该偏振光束照射在小于布鲁斯特角度的小的“斑点”尺寸上，影响入射角小于相对于调查材料系统。

43. 发明授权

US07535566B1 Beam chromatic shifting and directing means 有权
标题翻译：光束色移和定向方式
公开(公告)号：US07535566B1
公开(公告)日：2009-05-19
申请号：US11453656
申请日：2006-06-15
申请人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden , Brian D. Guenther , Martin M. Liphardt , Ping He
发明人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden , Brian D. Guenther , Martin M. Liphardt , Ping He
IPC分类号： G01J4/00 , G02B5/20 , F21V9/06
CPC分类号： G01N21/211 , G01J3/02 , G01J3/021 , G01J3/0224 , G01J2003/1213 , G01J2003/1282 , G01N21/274 , G01N2021/213 , G02B27/141
摘要： An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a first range of wavelengths, (eg. the Visible wavelengths), and simultaneously relatively emphasizing intensity in another wavelength range, (eg. UV wavelengths).
摘要翻译：一种用于反射地引导电磁辐射的分光束同时在第一波长范围（例如可见波长）中强调强度的电磁光束色移和引导装置，同时相对强调另一波长范围内的强度，（例如UV波长）。

44. 发明授权

US07301631B1 Control of uncertain angle of incidence of beam from Arc lamp 有权
标题翻译：控制来自弧灯的光束入射角不确定
公开(公告)号：US07301631B1
公开(公告)日：2007-11-27
申请号：US11084827
申请日：2005-03-21
申请人： Blaine D. Johs , Ping He , Galen L. Pfeiffer , Steven E. Green , Christopher A. Goeden , Martin M. Liphardt
发明人： Blaine D. Johs , Ping He , Galen L. Pfeiffer , Steven E. Green , Christopher A. Goeden , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/021 , G01J3/0224 , G01J3/10 , G01N21/211 , G01N2201/061 , G01N2201/0636
摘要： A system for stabilizing the angle of incidence a beam of electromagnetic radiation from a vertically oriented Arc lamp onto a horizontally oriented sample surface.
摘要翻译：一种用于将来自垂直取向的弧光灯的电磁辐射束入射到水平取向的样品表面上的入射角的系统。

45. 发明授权

US07075650B1 Discrete polarization state spectroscopic ellipsometer system and method of use 有权
标题翻译：离散偏振态光谱椭偏仪系统及其使用方法
公开(公告)号：US07075650B1
公开(公告)日：2006-07-11
申请号：US10613118
申请日：2003-07-07
申请人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
发明人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.
摘要翻译：一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。优选的光谱椭偏仪系统在数据收集期间没有移动的部分，并且其提供顺序的多个顺序离散而不是连续变化的偏振状态。

46. 发明授权

US07450231B2 Deviation angle self compensating substantially achromatic retarder 有权
标题翻译：偏差角自补偿基本上消色差延迟器
公开(公告)号：US07450231B2
公开(公告)日：2008-11-11
申请号：US11633138
申请日：2006-12-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B5/3083 , G01J1/0407 , G01N21/211 , G01N2021/213 , G02B26/06
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译：用于宽光谱范围（例如，190-1700nm）旋转补偿光谱椭偏仪和/或偏振计系统的基本上无色多元素补偿器系统。多个全内反射进入进入的电磁辐射束的延迟，并且这些元件被定向成使得由延迟元件的位置和/或旋转的变化而导致的净延迟与输入光束角的变化最小化。

47. 发明授权

US6100981A Dual horizontally oriented triangle shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：双水平取向三角形光学延迟元件，用于光谱椭偏仪和偏振计系统
公开(公告)号：US6100981A
公开(公告)日：2000-08-08
申请号：US225371
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G01J4/00 , G02B5/30
CPC分类号： G01J4/00 , G02B5/3083 , G01J2003/2866
摘要： A retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second triangular shaped elements arranged so that the first triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and downward from an upper point, with a third side which is oriented essentially horizontally and is continuous with, and present below the first and second sides; and so that the second triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and upward from a lower point, with a third side which is oriented essentially horizontally and is continuous with, and present above the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
摘要翻译：一种延迟器系统，用于在电磁辐射束的正交分量之间输入延迟，具有第一和第二三角形元件，其布置成使得如在侧视图中看到的第一三角形元件呈现向左突出的第一和第二侧并且从上点向下和向下，第三侧基本上水平地定向并且与第一和第二侧连续并存在下方; 并且使得从侧视图看出的第二三角形元件呈现出从第一和第二侧面向下突出的第一和第二侧面，其中第三侧面基本上水平地定向并与之连续，并且目前在第一和第二边。在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转电磁辐射束。

48. 发明授权

US6084674A Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭偏仪和偏振计系统的平行四边形光学延迟器元件
公开(公告)号：US6084674A
公开(公告)日：2000-07-04
申请号：US225118
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G02B5/30 , G01J4/00
CPC分类号： G02B5/3083 , G01J2003/2866
摘要： A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides which are parallel to one another, with both the right and left sides being oriented at an angle to the top and bottom sides. The retarder system is made of a material with an index of refraction greater than that of a surrounding ambient. In use an input beam of electromagnetic radiation is caused to enter the right or left side of the retarder system, is diffracted inside the retarder system, and follows a locus which causes it to essentially totally internally reflect from internal interfaces of both the top and bottom sides, then emerge from the retarder system at the opposite, left or right respectively, side in a direction which is essentially undeviated and undisplaced from the locus of the input beam of electromagnetic radiation, even when the retarder system is caused to rotate about an axis coincident with the locus of the electromagentic beam.
摘要翻译：公开了一种用于椭偏仪和偏振计的延迟器系统及其方法。延迟器系统是平行四边形元件，从侧视图看，具有彼此平行的顶侧和底侧。缓速器系统还具有彼此平行的左右两侧，左右两侧与顶侧和底侧成一定角度。缓速器系统由折射率大于周围环境的材料制成。在使用中，导致电磁辐射的输入束进入延迟器系统的右侧或左侧，在延迟器系统内部衍射，并且跟随一个轨迹，使得其基本上完全内部从顶部和底部的内部接口反射侧面，然后即使当延迟器系统绕轴线旋转时，从相对的左侧或右侧的延迟器系统以从电磁辐射的输入光束的轨迹基本上未变形和未放置的方向出现与电磁光束的轨迹一致。

49. 发明授权

US06940595B1 Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters 有权
$Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters$
标题翻译：光谱椭偏仪在多层交替高/低折射率滤波器的原位实时制造中的应用
公开(公告)号：US06940595B1
公开(公告)日：2005-09-06
申请号：US10194881
申请日：2002-07-15
申请人： Blaine D. Johs , Jeffrey S. Hale , John A. Woollam , Craig M. Herzinger
发明人： Blaine D. Johs , Jeffrey S. Hale , John A. Woollam , Craig M. Herzinger
IPC分类号： G01J4/00
CPC分类号： G01J4/00
摘要： Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.
摘要翻译：公开了倾斜入射角，反射和/或透射模式分光椭偏仪PSI和/或DELTA（包括其组合和/或数学等价物）与波长数据的应用以监测和/或控制多层高/ 低折射率带通，带阻和变化的衰减相对于波长滤波器，单独地或与透射非椭圆电磁波转折点相比，在基本上正常的入射角获得的层数据。

50. 发明授权

US6141102A Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭偏仪和偏光计系统的单三角形光学延迟器元件
公开(公告)号：US6141102A
公开(公告)日：2000-10-31
申请号：US232257
申请日：1999-01-19
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G01J4/00
CPC分类号： G01J4/00 , G01J2003/2866
摘要： Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
摘要翻译：公开了一种用于在电磁辐射束的正交分量之间输入延迟的三角形延迟器系统。从侧视图看，三角形元件具有从上部向左和向右突出的第一和第二侧面。第三面基本上水平地定向并且与第一和第二面连续并存在于第一和第二面之下。在分光椭偏仪/偏振计系统中使用时，输入的电磁辐射束在传播方向上离开，即传播方向基本上未发生变化，并且从其入射方向未脱离，即使延迟器系统围绕光束电磁辐射。

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