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    • 41. 发明申请
    • High-throughput HDP-CVD processes for advanced gapfill applications
    • US20060154494A1
    • 2006-07-13
    • US11031926
    • 2005-01-08
    • Bo QiYoung Lee
    • Bo QiYoung Lee
    • H01L21/469
    • H01L21/02164C23C16/045C23C16/401C23C16/45523H01L21/02274H01L21/31612
    • Methods are provided of depositing a silicon oxide film on a substrate disposed in a substrate processing chamber. The substrate has a gap formed between adjacent raised surfaces. A silicon-containing gas, an oxygen-containing gas, and a fluent gas are flowed into the substrate processing chamber. The fluent gas has an average molecular weight less than 5 amu. A first high-density plasma is formed from the silicon-containing gas, the oxygen-containing gas, and the fluent gas to deposit a first portion of the silicon oxide film over the substrate and within the gap with a first deposition process that has simultaneous deposition and sputtering components having relative contributions defined by a first deposition/sputter ratio. A second high-density plasma is formed from the silicon-containing gas, the oxygen-containing gas, and the fluent gas to deposit a second portion of the silicon oxide film over the substrate and within the gap with a second deposition process that has simultaneous deposition and sputtering components having relative contributions defined by a second deposition/sputter ratio. The second deposition/sputter ratio is less than the first deposition/sputter ratio. Each of the first and second deposition/sputter ratios is defined as a ratio of a sum of a net deposition rate and a blanket sputtering rate to the blanket sputtering rate.
    • 44. 发明申请
    • Electroactive solid-state actuator and method of manufacturing the same
    • 电活性固态致动器及其制造方法
    • US20060086596A1
    • 2006-04-27
    • US11080294
    • 2005-03-15
    • Kwi LeeYoung LeeJae NamHyouk ChoiMi ChoJa Koo
    • Kwi LeeYoung LeeJae NamHyouk ChoiMi ChoJa Koo
    • H01H57/00
    • F03G7/00Y10S310/80Y10T29/42
    • The present invention provides an electroactive solid-state actuator, including a solid polymer electrolyte film having first and second main surfaces facing each other, and first and second conductive polymer layers infiltrated into the first and second main surfaces of the solid polymer electrolyte film. Further, a method of manufacturing the electroactive solid-state actuator is provided, the method including preparing a solid polymer film having first and second main surfaces facing each other, infiltrating a monomer of a conductive polymer into the first and second main surfaces of the solid polymer film, followed by polymerization, to form first and second conductive polymer layers, and immersing the solid polymer film into an ionic liquid or liquid electrolyte to be converted to an electrically conductive polymer.
    • 本发明提供了一种电活性固态致动器,其包括具有彼此面对的第一和第二主表面的固体聚合物电解质膜以及浸入固体聚合物电解质膜的第一和第二主表面中的第一和第二导电聚合物层。 此外,提供了一种制造电活性固态致动器的方法,该方法包括制备具有彼此相对的第一和第二主表面的固体聚合物膜,将导电聚合物的单体浸入固体的第一和第二主表面 聚合物膜,然后聚合,以形成第一和第二导电聚合物层,并将固体聚合物膜浸入离子液体或液体电解质中以转化为导电聚合物。
    • 49. 发明申请
    • Apparatus for detecting touched-position using surface acoustic wave
    • 使用表面声波检测触摸位置的装置
    • US20050212775A1
    • 2005-09-29
    • US10852430
    • 2004-05-25
    • Young Lee
    • Young Lee
    • G06F3/03G09G5/00
    • G06F3/0436
    • A touched-position detection device detects a touched position by measuring a propagation time of a SAW (Surface Acoustic Wave) signal generated on a touch panel. The touched-position detection device using the SAW signal includes: a touch panel; a controller for controlling signal generation and a signal generation time; an impulse signal generator for generating an impulse signal; a SAW generator for converting the impulse signal generated from the impulse signal generator into a SAW signal on the touch panel; a SAW sensor for detecting the SAW signal received via the touch panel's surface; a signal analyzer for classifying the SAW signal detected by the SAW sensor into a DW (Direct Surface Wave) signal and an RW (Reflected Surface Wave) signal according to the SAW signal intensity so as to identify the SAW signal, and measuring arrival times of the DW and RW signals upon receiving arrival times of the DW and RW signals and the signal control time of the controller; and a position calculator for calculating the touched positions x and y on the touch panel upon receiving the arrival times from the signal analyzer.
    • 触摸位置检测装置通过测量在触摸面板上产生的SAW(表面声波)信号的传播时间来检测触摸位置。 使用SAW信号的触摸位置检测装置包括:触摸面板; 用于控制信号产生和信号产生时间的控制器; 用于产生脉冲信号的脉冲信号发生器; SAW发生器,用于将从脉冲信号发生器产生的脉冲信号转换成触摸面板上的SAW信号; 用于检测经由触摸面板的表面接收的SAW信号的SAW传感器; 信号分析器,用于根据SAW信号强度将由SAW传感器检测的SAW信号分类为DW(直接表面波)信号和RW(反射表面波)信号),以识别SAW信号,并且测量到 DW和RW信号在DW和RW信号的到达时间和控制器的信号控制时间之间; 以及位置计算器,用于在从信号分析器接收到到达时间时计算触摸面板上的触摸位置x和y。