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    • 44. 发明申请
    • Displacement Sensor Using GMR Elements, Angle Sensor Using GMR Elements, And Semiconductor Device Used For Them
    • 使用GMR元件的位移传感器,使用GMR元件的角度传感器及其半导体器件
    • US20080116886A1
    • 2008-05-22
    • US11926583
    • 2007-10-29
    • Masamichi YamadaNobuyasu KanekawaKenji Nakabayashi
    • Masamichi YamadaNobuyasu KanekawaKenji Nakabayashi
    • G01B7/30H01L43/08
    • G01D5/145
    • A highly accurate displacement sensor using GMR elements for detecting a displacement of a physical quantity such as angle is to be provided wherein a waveform distortion of output voltage is diminished.There are installed at least two Wheatstone bridge circuits having a predetermined angular offset and each comprising a plurality of GMR elements, the GMR elements each having a fixed magnetic layer set to a predetermined magnetization direction. An AC power supply is use as a power supply of the Wheatstone bridge circuits and a displacement of a physical quantity such as a rotational angle is detected on the basis of AC-modulated outputs from the Wheatstone bridge circuits.An anisotropic self-bias effect of a free magnetic layer in each GMR element can be diminished and hence it is possible to remedy a waveform distortion of an output signal based on the anisotropic self-bias effect of the free magnetic layer.
    • 提供一种使用GMR元件检测诸如角度的物理量的位移的高精度位移传感器,其中输出电压的波形失真减小。 安装有至少两个具有预定角度偏移的惠斯通电桥电路,每个包含多个GMR元件,每个具有固定的磁性层设置为预定的磁化方向的GMR元件。 使用交流电源作为惠斯登电桥电路的电源,并且基于惠斯通电桥电路的交流调制输出来检测物理量(例如旋转角度)的位移。 可以减少每个GMR元件中的自由磁性层的各向异性自偏置效应,因此可以基于自由磁性层的各向异性自偏置效应来补偿输出信号的波形失真。