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    • 42. 发明申请
    • RADIATION DETECTOR
    • 辐射探测器
    • US20110163305A1
    • 2011-07-07
    • US13054942
    • 2009-07-23
    • Koichi OgusuOsamu NakaneYasunori IgasakiYoshinori OkamuraTadaaki Hirai
    • Koichi OgusuOsamu NakaneYasunori IgasakiYoshinori OkamuraTadaaki Hirai
    • H01L31/0272
    • G01T1/244H01L27/1462H01L27/14676H01L31/115
    • An X-ray detector 1 includes: an X-ray conversion layer 17 which is made of amorphous selenium and absorbs incident radiation and generates charges; a common electrode 23 provided on a surface on the side on which radiation is made incident of the X-ray conversion layer 17; and a signal readout substrate 2 on which a plurality of pixel electrodes 7 for collecting charges generated by the X-ray conversion layer 17 are arrayed, and further includes: an electric field relaxation layer 13 provided between the X-ray conversion layer 17 and the signal readout substrate 2 and containing arsenic and lithium fluoride; a crystallization suppressing layer 11 provided between the electric field relaxation layer 13 and the signal readout substrate 2 and containing arsenic; and a first thermal property enhancement layer 15 provided between the electric field relaxation layer 13 and the X-ray conversion layer 17 and containing arsenic.
    • X射线检测器1包括:由非晶硒制成并吸收入射的辐射并产生电荷的X射线转换层17; 设置在X射线转换层17入射侧的表面上的公共电极23; 以及信号读出基板2,其上排列有用于收集由X射线转换层17产生的电荷的多个像素电极7,并且还包括:电场弛豫层13,设置在X射线转换层17和 信号读出基板2,并含有砷和氟化锂; 设置在电场弛豫层13和信号读出基板2之间并含有砷的结晶抑制层11; 以及设置在电场缓和层13和X射线转换层17之间并含有砷的第一热性质增强层15。