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    • 41. 发明授权
    • Plasma processing system and plasma processing method
    • 等离子体处理系统和等离子体处理方法
    • US06245190B1
    • 2001-06-12
    • US09048075
    • 1998-03-26
    • Toshio MasudaKatsuhiko MitaniTetsunori KajiJun'ichi TanakaKatsuya WatanabeShigeru ShirayoneToru OtsuboIchiro SasakiHideshi FukumotoMakoto Koizumi
    • Toshio MasudaKatsuhiko MitaniTetsunori KajiJun'ichi TanakaKatsuya WatanabeShigeru ShirayoneToru OtsuboIchiro SasakiHideshi FukumotoMakoto Koizumi
    • H05H146
    • H01J37/32091H01J37/32082H01J37/32165H01J37/32623H01J37/3266H01J37/32678
    • A plasma processing apparatus and a method therefor which can achieve a preferred process rate, a fine pattern process capability, a selectivity and uniformity of processing at the same time compatibly for a large size wafer, which effects are achieved by controlling the plasma state and the dissociation state of etching gas through control of the electron resonance through application of a magnetic field thereto. A high frequency power at 20-300 MHz is applied across a pair of electrodes in a vacuum process chamber, and a magnetic field is formed parallel to the plane of the electrodes in the space between the electrodes. By controlling the intensity of the magnetic field in a range of 100 gauss or smaller, formation of electron cyclotron resonance and electron sheath resonance occurring from interaction between the electrical field and the magnetic field in the electrode sheath portion is controlled. Thereby, the plasma state, i.e., the electron density, electron energy distribution and dissociation state of the process gas in the plasma, can be controlled. The magnetic field is generated by a plurality of coils, an outer shield, and pendant yoke to form magnetic field parallel to the plane of the electrodes in the space between the upper and the bottom electrodes.
    • 一种等离子体处理装置及其方法,其能够通过控制等离子体状态和等离子体状态来实现对于大尺寸晶片同时实现优选的处理速率,精细图案处理能力,同时处理的选择性和均匀性, 通过对其施加磁场来控制电子共振来蚀刻气体的解离状态。 在真空处理室中的一对电极上施加20-300MHz的高频功率,并且在电极之间的空间中形成平行于电极平面的磁场。 通过控制100高斯或更小范围内的磁场的强度,控制由电场鞘部分中的电场和磁场之间的相互作用产生的电子回旋共振和电子鞘共振的形成。 由此,可以控制等离子体状态,即等离子体中的处理气体的电子密度,电子能量分布和解离状态。 磁场由多个线圈,外屏蔽和悬挂磁轭产生,以在上电极和下电极之间的空间中形成平行于电极平面的磁场。
    • 42. 发明授权
    • Tracking control system with correction capabilities for correcting
disagreement between optical axes
    • 跟踪控制系统具有校正功能,可纠正光轴之间的不一致
    • US5566152A
    • 1996-10-15
    • US534731
    • 1995-09-27
    • Kouichi TakamineKatsuya Watanabe
    • Kouichi TakamineKatsuya Watanabe
    • G11B7/085G11B7/09
    • G11B7/094G11B7/08517G11B7/08541G11B7/08564G11B7/0903
    • A tracking control system according to the present invention includes an objective lens for converging a light beam at a point on a recording medium to form a converging spot; a galvano-mirror for receiving a driving signal and for moving the converging spot across tracks provided on the recording medium in response to the driving signal; a tracking error detecting section for generating a tracking error signal according to a position of the converging spot with respect to one of the tracks; a tracking servo control section for generating a first driving signal according to the tracking error signal end for feeding the first driving signal to the galvano-mirror as the driving signal, by which the galvano-mirror is driven so that the converging spot is located on the one track; a signal selection circuit for turning on and off the tracking servo control section; a driving section for, when tracking servo control is turned off, generating a second driving signal by which the galvano-mirror is driven so that the converging spot crosses predetermined number of tracks among the tracks; a measuring section for, when the tracking servo control is turned off, measuring a degree of disagreement of optical axes based on the tracking error signal obtained by driving the galvano-mirror with the second driving signal; and a correcting section for correcting the disagreement of optical axes by constantly supplying the galvano-mirror with a current for making the degree of disagreement of optical axes substantially zero based on the measured degree of disagreement of optical axes.
    • 根据本发明的跟踪控制系统包括用于在记录介质上的点聚焦光束以形成会聚点的物镜; 用于接收驱动信号并且用于响应于驱动信号将会聚点移动到设置在记录介质上的轨道的电流镜; 跟踪误差检测部分,用于根据所述会聚点相对于所述轨道之一的位置产生跟踪误差信号; 跟踪伺服控制部分,用于根据跟踪误差信号端生成第一驱动信号,以将第一驱动信号馈送到电流镜作为驱动信号,由此驱动电流镜,使得会聚点位于 一轨 用于接通和关断跟踪伺服控制部分的信号选择电路; 驱动部,用于当跟踪伺服控制被关闭时,产生驱动电流镜的第二驱动信号,使得会聚点跨越轨迹中的预定数量的轨道; 测量部分,用于当跟踪伺服控制关闭时,基于通过用第二驱动信号驱动电流反射镜获得的跟踪误差信号来测量光轴的不一致程度; 以及校正部分,用于通过不断地向电流镜提供基于所测量的光轴不一致程度使光轴的不一致程度基本上为零的电流来校正光轴的不一致。
    • 45. 发明授权
    • Optical disc device
    • 光盘设备
    • US08164998B2
    • 2012-04-24
    • US12302068
    • 2008-02-08
    • Yuuichi KuzeAkira YoshikawaKatsuya Watanabe
    • Yuuichi KuzeAkira YoshikawaKatsuya Watanabe
    • G11B20/18
    • G11B7/00375G11B7/00736G11B7/0948G11B20/1816G11B20/1883G11B2007/0013G11B2020/10925G11B2020/1826G11B2220/20G11B2220/237G11B2220/2537
    • The optical disc apparatus of this invention includes: an optical pickup, which irradiates an optical disc with a light beam and generates a light detection signal based on the beam reflected from the disc; a search section, which controls the pickup before data is written on a storage area of the disc, thereby adjusting the beam spot location and searching a reference one of information layers stacked for a defective area in the storage area of the disc; a defect decision section for detecting an error based on the detection signal and determining a portion of the storage area, where the error has occurred, as the defective area; a defect size measuring section for measuring the size of the defective area in an area of the reference layer and generating a defect information list indicating there is the defective area in the area of the reference layer; and a recording range control section for managing, by reference to the list, the storage area such that no data will be written on a perpendicularly projected area defined by projecting the defective area of the reference layer perpendicularly to another information layer.
    • 本发明的光盘装置包括:光学拾取器,其用光束照射光盘,并且基于从光盘反射的光束产生光检测信号; 搜索部分,其在数据被写入盘的存储区域之前控制拾取,从而调整光束位置并搜索堆叠在盘的存储区域中的缺陷区域的信息层中的参考一个; 缺陷判定部分,用于基于检测信号检测错误,并确定发生错误的存储区域的一部分作为缺陷区域; 缺陷尺寸测量部分,用于测量参考层的区域中的缺陷区域的尺寸,并产生指示在参考层的区域中存在缺陷区域的缺陷信息列表; 以及记录范围控制部分,用于通过参考列表来管理存储区域,使得不会将数据写入垂直于参考层的缺陷区垂直于另一信息层定义的垂直投影区域。
    • 46. 发明授权
    • Optical disc and optical disc device
    • 光盘和光盘设备
    • US08149671B2
    • 2012-04-03
    • US12088460
    • 2006-11-22
    • Takahiro SatoTakeshi ShimamotoKatsuya Watanabe
    • Takahiro SatoTakeshi ShimamotoKatsuya Watanabe
    • G11B20/00
    • G11B7/00736G11B7/094G11B7/0945G11B7/13925G11B2007/0013
    • An optical disc drive according to the present invention can read and/or write data from/on an optical disc with information layers including first and second information layers (L0 and L1). The drive includes: an objective lens for converging a light beam; a lens actuator for driving the lens; a photodetector section that receives the beam reflected from the disc and converts it into an electrical signal; and a control section for determining the values of a first group of parameters, which are set to read data from the first layer (L0), and those of a second group of parameters, which are set to read data from the second layer (L1), during a disc loading process. In performing the disc loading process, the control section determines the values of the first group of parameters, and then determines the values of the second group of parameters based on correlation information, representing correlation between the values of the first and second groups of parameters that were set during a previous disc loading process, and on the values of the first group of parameters that have been just determined during the current disc loading process.
    • 根据本发明的光盘驱动器可以从包括第一和第二信息层(L0和L1)的信息层读取和/或写入光盘上的数据。 该驱动器包括:用于会聚光束的物镜; 用于驱动透镜的透镜致动器; 光接收器部分,其接收从盘反射的光束并将其转换成电信号; 以及控制部分,用于确定被设置为从第一层(L0)读取数据的第一组参数的值和被设置为从第二层(L1)读取数据的第二组参数的参数的值 ),在光盘加载过程中。 在执行光盘加载过程中,控制部分确定第一组参数的值,然后基于相关信息确定第二组参数的值,表示第一和第二组参数的值之间的相关性, 在先前的光盘加载过程中被设置,以及在当前盘加载过程中刚刚确定的第一组参数的值。
    • 47. 发明授权
    • Optical disc device
    • 光盘设备
    • US08072852B2
    • 2011-12-06
    • US12090540
    • 2006-11-21
    • Junichi MinaminoKatsuya WatanabeAkira Yoshikawa
    • Junichi MinaminoKatsuya WatanabeAkira Yoshikawa
    • G11B7/00
    • G11B19/125G11B7/0045G11B7/0946G11B7/0948G11B19/045G11B2007/0006
    • An optical disc drive according to the present invention can write data on both a write-once disc and a rewritable disc. The drive includes: a disc recognizing section 110 for recognizing the type of a given optical disc as a write-once disc or a rewritable disc; and track skipping detection signal generating section, which outputs track skipping detection signal when a first condition on tracking error is satisfied if the given optical disc, on which data is being written, has turned out to be a write-once disc. On the other hand, if the given optical disc has turned out to be a rewritable disc, the track skipping detection signal generating section outputs track skipping detection signal when a second condition on tracking error, which is different from the first condition, is satisfied. A control section stops writing the data in response to the track skipping detection signal while the data is being written.
    • 根据本发明的光盘驱动器可以在一次写入盘和可重写盘上写入数据。 驱动器包括:用于将给定光盘的类型识别为一次写入盘或可重写盘的盘识别部分110; 以及轨道跳过检测信号生成部,其中当正在写入数据的给定光盘已被证明是一次写入盘时,当满足跟踪误差的第一条件时,其输出轨道跳过检测信号。 另一方面,如果给出的光盘已经被证明是可重写盘,则当满足与第一条件不同的跟踪误差的第二条件时,轨道跳过检测信号产生部分输出轨道跳过检测信号。 当数据被写入时,控制部分响应于轨道跳过检测信号停止写入数据。
    • 48. 发明授权
    • Optical disc device
    • 光盘设备
    • US07969844B2
    • 2011-06-28
    • US12301832
    • 2007-07-09
    • Katsuya WatanabeAkira YoshikawaEiji UedaHiroshige IshibashiYuuichi Kuze
    • Katsuya WatanabeAkira YoshikawaEiji UedaHiroshige IshibashiYuuichi Kuze
    • G11B27/36
    • G11B7/00375G11B7/0948
    • An optical disc apparatus includes: a defect detecting section 124 for detecting, based on a light detection signal and with respect to a preset detection reference level, a fingerprint or a bubble on the disc 102 as a defect to output a defect detection signal; and a waveform shaping section 126 to output a hold signal that holds, in response to the defect detection signal, a signal from a tracking control section 109 at a level just before the defect has occurred. The apparatus is initially operated not to hold the signal from the tracking control section 109 even if there is a defect. But once a tracking failure has occurred during a read operation, settings are changed to hold the signal from the tracking control section 109 against the defect while the read operation is retried.
    • 光盘装置包括:缺陷检测部分124,用于基于光检测信号和相对于预设检测参考电平检测盘102上的指纹或气泡作为缺陷以输出缺陷检测信号; 以及波形整形部分126,用于输出保持信号,该保持信号响应于缺陷检测信号,将来自跟踪控制部分109的信号保持在刚好在缺陷发生之前的水平。 即使存在缺陷,该装置最初也不会保持来自跟踪控制部分109的信号。 但是,一旦在读取操作期间发生跟踪故障,则在读取操作被重试时,改变设置以保持来自跟踪控制部分109的信号抵抗缺陷。
    • 49. 发明授权
    • Optical disc device
    • 光盘设备
    • US07936645B2
    • 2011-05-03
    • US12095764
    • 2007-01-30
    • Yuuichi KuzeKatsuya Watanabe
    • Yuuichi KuzeKatsuya Watanabe
    • G11B7/00
    • G11B7/08511G11B7/1275G11B2007/0013
    • This optical disc drive can read and/or write data from/on an optical disc 20 with multiple information layers including first and second information layers. The drive includes: a light source 3, 4 that emits the light beam; an objective lens 1; an actuator 2 for moving the objective lens perpendicularly to the information layers; a focus error generator 7 for generating a focus error signal representing how much the light beam has been converged on a target one of the information layers; and focus control means for forming a focal point of the light beam on the target information layer by driving the actuator in accordance with the focus error signal. According to the present invention, while a focus jump is being made to shift the focal point of the light beam from the first information layer of the optical disc 20 to the second information layer thereof by moving the objective lens 1, wavelengths and/or numerical apertures for the light beam are changeable while the objective lens 1 is moving.
    • 该光盘驱动器可以从具有包括第一和第二信息层的多个信息层的光盘20上读出数据。 驱动器包括:发射光束的光源3,4; 物镜1; 用于使物镜垂直于信息层移动的致动器2; 聚焦误差发生器7,用于产生聚焦误差信号,该聚焦误差信号表示光束已经聚集在目标信息层上的多少; 以及聚焦控制装置,用于根据聚焦误差信号驱动致动器,在目标信息层上形成光束的焦点。 根据本发明,当通过移动物镜1进行聚焦跳跃以将光束的焦点从光盘20的第一信息层移动到第二信息层时,波长和/或数字 光束的孔径在物镜1移动时是可变的。
    • 50. 发明授权
    • Optical disk apparatus
    • 光盘装置
    • US07864638B2
    • 2011-01-04
    • US11575312
    • 2005-10-20
    • Katsuya WatanabeAkira YoshikawaShin-ichi YamadaJunichi Minamino
    • Katsuya WatanabeAkira YoshikawaShin-ichi YamadaJunichi Minamino
    • G11B7/00
    • G11B7/0948G11B7/0941G11B2007/0013
    • An optical disk apparatus according to the present invention is capable of reading data from an optical disk 102 which has a plurality of information recording layers, including a first information recording layer whose distance from a disk surface is relatively small and a second information recording layer whose distance from the disk surface is relatively large. This optical disk apparatus includes: a focus control section 117 for causing a converging point of the light beam to be positioned on an arbitrary information recording layer of the optical disk 102; a tracking control section 118 for causing the converging point of the light beam to be positioned on a predetermined track of the information recording layer; and a gain switching section 108 capable of changing gain characteristics of at least one of the focus control section 117 and the tracking control section 118. The gain switching section 108 prescribes a gain crossover frequency when reading data from the first information recording layer to be a value which is lower than a gain crossover frequency when reading data from the second information recording layer.
    • 根据本发明的光盘装置能够从具有多个信息记录层的光盘102读取数据,该多个信息记录层包括与盘表面的距离相对较小的第一信息记录层和第二信息记录层, 距磁盘表面的距离比较大。 该光盘装置包括:聚焦控制部117,用于使光束的会聚点位于光盘102的任意信息记录层上; 跟踪控制部分118,用于使光束的会聚点定位在信息记录层的预定轨道上; 以及能够改变焦点控制部分117和跟踪控制部分118中的至少一个的增益特性的增益切换部分108.增益切换部分108规定从第一信息记录层读取数据时的增益交叉频率为 该值在从第二信息记录层读取数据时低于增益交叉频率。