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    • 41. 发明授权
    • Micro-magnetic latching switches with a three-dimensional solenoid coil
    • 具有三维电磁线圈的微型磁性开关
    • US07327211B2
    • 2008-02-05
    • US11084864
    • 2005-03-21
    • Meichun RuanCheng Ping WeiJun Shen
    • Meichun RuanCheng Ping WeiJun Shen
    • H01H51/22
    • H01F7/14H01F17/0006H01F2007/068H01H1/20H01H50/005H01H51/22H01H51/2236H01H2001/0042H01P1/127
    • A micro-machined magnetic latching switch is described. A moveable micro-machined cantilever has a magnetic material and a longitudinal axis. The cantilever has a conducting layer. A permanent magnet produces a first magnetic field, which induces a magnetization in the magnetic material. The magnetization is characterized by a magnetization vector pointing in a direction along the longitudinal axis of the cantilever. The first magnetic field is approximately perpendicular to longitudinal axis. A three-dimensional solenoid coil produces a second magnetic field to switch the cantilever between a first stable state and a second stable state. The temporary current is input to the three-dimensional solenoid coil, producing the second magnetic field such that a component of the second magnetic field parallel to the longitudinal axis changes direction of the magnetization vector. The cantilever is thereby caused to switch between the first stable state and the second stable state.
    • 描述了一种微加工的磁性闭锁开关。 可移动的微加工悬臂具有磁性材料和纵向轴线。 悬臂具有导电层。 永磁体产生第一磁场,其引起磁性材料中的磁化。 磁化的特征在于沿着悬臂的纵向轴线的方向指向的磁化矢量。 第一磁场大致垂直于纵轴。 三维电磁线圈产生第二磁场以在第一稳定状态和第二稳定状态之间切换悬臂。 临时电流被输入到三维螺线管线圈,产生第二磁场,使得与纵轴平行的第二磁场的分量改变磁化矢量的方向。 从而使悬臂在第一稳定状态和第二稳定状态之间切换。
    • 42. 发明授权
    • Laminated relays with multiple flexible contacts
    • 具有多个柔性触点的层压继电器
    • US07215229B2
    • 2007-05-08
    • US10740837
    • 2003-12-22
    • Jun ShenCheng Ping Wei
    • Jun ShenCheng Ping Wei
    • H01H51/22
    • H01H59/0009H01H50/005
    • Methods and systems of assembling and making laminated electro-mechanical system (LEMS) switches are described. A plurality of structural layers are formed that include at least two structural layers that each include a flexible member. The plurality of structural layers are stacked and aligned into a stack, to form at least one switch. Each structural layer in the stack is attached to an adjacent structural layer of the stack. When the formed switch is in an “on” state, the first flexible member is in contact with the second flexible member. When making contact with the second flexible member, the second flexible member flexes in response. In a further aspect, three flexible members may be present. When the switch is in an “on” state, the first flexible member is in contact with the second and third flexible members. When making contact with the second and third flexible members, the second and third flexible members flex in response.
    • 描述了组装和制造层压机电系统(LEMS)开关的方法和系统。 形成多个结构层,其包括至少两个各自包括柔性构件的结构层。 多个结构层被堆叠并对准成堆叠,以形成至少一个开关。 堆叠中的每个结构层连接到堆叠的相邻结构层。 当形成的开关处于“接通”状态时,第一柔性构件与第二柔性构件接触。 当与第二柔性构件接触时,第二柔性构件作为响应而弯曲。 在另一方面,可以存在三个柔性构件。 当开关处于“开”状态时,第一柔性构件与第二和第三柔性构件接触。 当与第二和第三柔性构件接触时,第二和第三柔性构件作为响应弯曲。
    • 43. 发明授权
    • Micro magnetic non-latching switches and methods of making same
    • 微型非锁定开关及其制造方法
    • US07183884B2
    • 2007-02-27
    • US10684587
    • 2003-10-15
    • Jun ShenMeichun Ruan
    • Jun ShenMeichun Ruan
    • H01H51/22
    • H01H50/005
    • A micro magnetic switch includes a reference plane and a magnet located proximate to a supporting structure. The magnet produces a first magnetic field with uniformly spaced field lines approximately orthogonal to the reference plane, symmetrically spaced about a central axis, or non-uniformly spaced fields approximately orthogonal to the reference plane. The switch also includes a cantilever supported by the support structure. The cantilever has an axis of rotation lying in the reference plane and has magnetic material that makes the cantilever sensitive to the first magnetic field, such that the cantilever is configured to rotate about the axis of rotation between first and second states. The switch further includes a conductor located proximate to the supporting structure and the cantilever. The conductor is configured to conduct a current. The current produces a second magnetic field having a component approximately parallel to the reference plane and approximately perpendicular to the rotational axis of the cantilever, which causes the cantilever to switch between the first and second states. The switch still further includes a stopping device located proximate to the supporting structure. The stopping device is operable to stop the cantilever from rotating about the axis of symmetry beyond a point at which a longitudinal axis of the cantilever is approximately parallel to a longitudinal axis of the magnet.
    • 微型磁性开关包括参考平面和位于支撑结构附近的磁体。 磁体产生具有大致垂直于参考平面的均匀间隔的场线的第一磁场,围绕中心轴对称地间隔开,或者大致垂直于参考平面的非均匀间隔的场。 开关还包括由支撑结构支撑的悬臂。 悬臂具有位于参考平面中的旋转轴线并且具有使悬臂对第一磁场敏感的磁性材料,使得悬臂构造成围绕第一和第二状态之间的旋转轴线旋转。 开关还包括位于支撑结构和悬臂附近的导体。 导体被配置为导通电流。 电流产生具有大致平行于参考平面并且大致垂直于悬臂的旋转轴线的分量的第二磁场,这导致悬臂在第一和第二状态之间切换。 开关还包括位于支撑结构附近的止动装置。 止动装置可操作以阻止悬臂围绕对称轴旋转超过悬臂的纵向轴线近似平行于磁体的纵向轴线的点。
    • 44. 发明申请
    • Wafer-level tester with magnet to test latching micro-magnetic switches
    • 具有磁铁的晶圆级测试仪用于测试锁存微型磁性开关
    • US20060284629A1
    • 2006-12-21
    • US11362281
    • 2006-02-27
    • Cheng WeiJun Shen
    • Cheng WeiJun Shen
    • G01R31/02
    • H01H50/005B81C99/005H01H11/0062H01H2050/007
    • A method, system, and apparatus for testing one or more micro-magnetic switches on a wafer is described. A magnet is positioned adjacent to a first switch on the wafer. A probe card is positioned adjacent to the first switch. The probe card mounts a first set of probes and a second set of probes. The first set of probes interface with contact areas of a coil associated with the first switch. The second set of probes interface with conductors on the wafer associated with the cantilever of the first switch. A current source is electrically coupled to the first set of probes. The current source activates the coil of the first switch using the first set of probes to switch the cantilever from a first state to a second state. A switch state monitor is electrically coupled to the second set of probes. The switch state monitor determines whether the cantilever of the first switch is in the first state prior to the current source activating the coil of the first switch. The switch state monitor also determines whether the cantilever is in the second state after the current source activates the coil of the first switch. A stepper motor moves the wafer relative to the magnet and probe card to test further switches on the wafer. An inker marks a switch on the wafer that has been determined by the switch state monitor to be defective.
    • 描述了用于测试晶片上的一个或多个微型磁性开关的方法,系统和装置。 磁体定位成与晶片上的第一开关相邻。 探针卡位于与第一开关相邻的位置。 探针卡安装第一组探头和第二组探头。 第一组探头与与第一开关相关联的线圈的接触区域接合。 第二组探头与与第一开关的悬臂相关联的晶片上的导体接合。 电流源电耦合到第一组探针。 电流源使用第一组探针激活第一开关的线圈,以将悬臂从第一状态切换到第二状态。 开关状态监视器电耦合到第二组探头。 开关状态监视器确定在当前源激活第一开关的线圈之前,第一开关的悬臂是否处于第一状态。 开关状态监视器还确定在电流源激活第一开关的线圈之后悬臂是否处于第二状态。 步进电机使晶片相对于磁体和探针卡移动,以测试晶片上的其它开关。 打印机将由开关状态监视器确定的晶片上的开关标记为有缺陷。
    • 48. 发明授权
    • Micro-magnetic latching switch with relaxed permanent magnet alignment requirements
    • 微磁锁定开关具有放松的永磁对准要求
    • US06794965B2
    • 2004-09-21
    • US10051447
    • 2002-01-18
    • Jun ShenMeichun RuanCharles Wheeler
    • Jun ShenMeichun RuanCharles Wheeler
    • H01H5122
    • H01H50/005G02B26/08H01H1/20H01H2050/007H01P1/127
    • A micro magnetic latching device. The device comprises a substrate having a moveable element supported thereon. The moveable element (cantilever) has a long axis and a magnetic material. The device also has first and second magnets that produce a first magnetic field, which induces a magnetization in the magnetic material. The magnetization is characterized by a magnetization vector pointing in a direction along the long axis of the moveable element, wherein the first magnetic field is approximately perpendicular to a major central portion of the long axis. The device also has a coil that produces a second magnetic field to switch the movable element between two stable states, wherein only temporary application of the second magnetic field is required to change direction of the magnetization vector thereby causing the movable element to switch between the two stable states.
    • 一种微型磁性闭锁装置。 该装置包括具有支撑在其上的可移动元件的基板。 可移动元件(悬臂)具有长轴和磁性材料。 该器件还具有产生第一磁场的第一和第二磁体,其在磁性材料中引起磁化。 磁化特征在于沿着可移动元件的长轴的方向指向的磁化矢量,其中第一磁场大致垂直于长轴的主要中心部分。 该装置还具有线圈,其产生第二磁场以在两个稳定状态之间切换可移动元件,其中仅需要临时施加第二磁场以改变磁化矢量的方向,从而使可移动元件在两者之间切换 稳定状态。