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    • 45. 发明授权
    • Multidirectional leakage path test structure
    • 多向泄漏路径测试结构
    • US07332741B2
    • 2008-02-19
    • US10996365
    • 2004-11-26
    • Mon-Chin TsaiXinghua PuNing JiangJun He
    • Mon-Chin TsaiXinghua PuNing JiangJun He
    • H01L29/40
    • G01R31/025H01L22/34
    • A test structure for testing a multidirectional current leakage path. A first doped region of a first conductivity is in the first well of the first conductivity in a substrate, in which the first doped region has a dopant concentration higher than the first well has. A first contact is on the first doped region and contacts the first doped region. The first contact has first and second portions respectively parallel to the first and second directions. A plurality of second doped regions of a second conductivity are in the first well and isolated from the first doped region. In a third direction, the second regions are adjacent to each another and isolate the first portion from the second portion. A plurality of second contacts are on the second doped regions and each one is corresponding to each the second doped region. With a relative shift between the first contact and the second doped region, the partial overlap is used in the test of a multidirectional leakage path.
    • 用于测试多向电流泄漏路径的测试结构。 第一导电性的第一掺杂区域在衬底中位于第一导电性的第一阱中,其中第一掺杂区域具有高于第一阱的掺杂剂浓度。 第一接触在第一掺杂区域上并接触第一掺杂区域。 第一触点具有分别平行于第一和第二方向的第一和第二部分。 具有第二导电性的多个第二掺杂区域位于第一阱中并与第一掺杂区隔离。 在第三方向上,第二区域彼此相邻并且将第一部分与第二部分隔离。 多个第二触点位于第二掺杂区域上,并且每个第二触点对应于每个第二掺杂区域。 通过第一接触和第二掺杂区域之间的相对移动,在多向泄漏路径的测试中使用部分重叠。
    • 49. 发明授权
    • Mechanically robust interconnect for low-k dielectric material using post treatment
    • 使用后处理的低k电介质材料的机械稳健互连
    • US06998216B2
    • 2006-02-14
    • US10253723
    • 2002-09-24
    • Jun HeJihperng Leu
    • Jun HeJihperng Leu
    • G03C5/00H01L21/31
    • H01L21/76831H01L21/76801H01L21/76808H01L21/7682H01L21/76825H01L23/5222H01L23/5226H01L2924/0002Y10S430/143H01L2924/00
    • In an embodiment, a trench is formed above a via from a photo resist (PR) trench pattern in a dielectric layer. The trench is defined by two sidewall portions and base portions. The base portions of the sidewalls are locally treated by a post treatment using the PR trench pattern as mask to enhance mechanical strength of portions of the dielectric layer underneath the base portions. Seed and barrier layers are deposited on the trench and the via. The trench and via are filled with a metal layer. In another embodiment, a trench is formed from a PR trench pattern in a dielectric layer. A pillar PR is deposited and etched to define a pillar opening having a pillar surface. The pillar opening is locally treated on the pillar surface by a post treatment to enhance mechanical strength of portion of the dielectric layer underneath the pillar surface.
    • 在一个实施例中,在电介质层中的光致抗蚀剂(PR)沟槽图案的通孔上方形成沟槽。 沟槽由两个侧壁部分和基部限定。 通过使用PR沟槽图案作为掩模的后处理对侧壁的基部进行局部处理,以增强在基部下方的介电层的部分的机械强度。 种子和阻挡层沉积在沟槽和通孔上。 沟槽和通孔填充有金属层。 在另一个实施例中,沟槽由电介质层中的PR沟槽图案形成。 沉积并蚀刻柱PR以限定具有柱表面的柱开口。 通过后处理在柱面上局部处理立柱开口,以提高柱表面下方的电介质层的部分的机械强度。