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41. 发明授权

US08003935B2 Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer 失效
标题翻译：用四极质谱仪进行化学电离反应或质子转移反应质谱
公开(公告)号：US08003935B2
公开(公告)日：2011-08-23
申请号：US11869978
申请日：2007-10-10
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/26
CPC分类号： H01J49/145
摘要： A system and methods are described for generating reagent ions and product ions for use in a quadruple mass spectrometry system. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a quadruple mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于四重质谱系统的试剂离子和产物离子的系统和方法。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由四重质谱仪模块进行检测。该系统包括各种控制模块，用于设置系统参数值和分析模块，用于在光谱测定和系统内故障时检测离子物质的质量值。

42. 发明授权

US07764140B2 Radio frequency power delivery system 有权
标题翻译：射频发射系统
公开(公告)号：US07764140B2
公开(公告)日：2010-07-27
申请号：US11554979
申请日：2006-10-31
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith , Ilya Bystryak
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith , Ilya Bystryak
IPC分类号： H03H7/38
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

43. 发明申请

US20060217903A1 External volume insensitive flow verification 有权
标题翻译：外部体积不灵敏流量验证
公开(公告)号：US20060217903A1
公开(公告)日：2006-09-28
申请号：US11090120
申请日：2005-03-25
申请人： Ali Shajii , Daniel Smith
发明人： Ali Shajii , Daniel Smith
IPC分类号： G01F1/00
CPC分类号： G01F25/0038 , G01F25/0053
摘要： A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media connecting the inlet to the vessel, an outlet valve connecting the vessel to the outlet for controlling flow from the vessel to the outlet, at least one temperature sensor operatively connected to the vessel for providing temperature measurements from within the vessel, and a pressure transducer operatively connected to the vessel for providing pressure measurements from within the vessel.
摘要翻译：一种用于原位验证被测设备（DUT）的流量验证器，包括可连接到DUT的入口，可连接到用于通过DUT抽吸气体的真空泵的出口和流量验证器，具有预定体积的容器，将入口连接到容器的扩散介质，将容器连接到出口用于控制从容器到出口的流动的出口阀，至少一个可操作地连接到容器的温度传感器，用于从容器内提供温度测量值，以及压力传感器可操作地连接到容器，用于从容器内提供压力测量值。

44. 发明授权

US06986359B2 System and method for controlling pressure in remote zones 有权
标题翻译：控制偏远地区压力的系统和方法
公开(公告)号：US06986359B2
公开(公告)日：2006-01-17
申请号：US10796723
申请日：2004-03-09
申请人： Ali Shajii , Siddharth P. Nagarkatti
发明人： Ali Shajii , Siddharth P. Nagarkatti
IPC分类号： G05D16/20 , B24B51/00
CPC分类号： G05D16/206 , G05D16/2053 , Y10T137/0396 , Y10T137/7761
摘要： A system for controlling fluid flow through i lines, wherein the i lines are connectable through tubing to i zones, respectively, and wherein i=1, 2, . . . , N. The system includes at least one valve and a pressure transducer in each of the i lines, a control device for controlling the valves, and a zone pressure estimator. The zone pressure estimator is connected to the pressure transducers and is programmed to calculate an estimated pressure in each the i zones and provide the estimated pressures to the control device.
摘要翻译：用于控制通过i线的流体流动的系统，其中i线分别通过管道连接到i区域，并且其中i = 1,2。。。该系统包括在i行中的每一个中的至少一个阀和压力传感器，用于控制阀的控制装置和区域压力估计器。区域压力估计器连接到压力传感器，并被编程为计算每个i区域中的估计压力，并将估计的压力提供给控制装置。

45. 发明申请

US20050223979A1 Pulsed mass flow delivery system and method 有权
标题翻译：脉冲质量流量输送系统及方法
公开(公告)号：US20050223979A1
公开(公告)日：2005-10-13
申请号：US10822358
申请日：2004-04-12
申请人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
IPC分类号： C23C16/44 , C23C16/452 , C23C16/455 , C23C16/52 , B05C11/00 , B01D59/44 , C23C16/00 , H01J49/00
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.
摘要翻译：一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置以及连接到阀门，压力传感器和输入装置的控制器。控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。然后将控制器编程为等待预定的等待时间段以允许室内的气体接近平衡状态，然后在时间= 0℃下打开出口阀，并在时间关闭出口阀当排出的气体质量等于所需质量时，= t *。

46. 发明申请

US20050026447A1 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling 失效
标题翻译：用于快速热处理（RTP）的分段冷板用于传导冷却
公开(公告)号：US20050026447A1
公开(公告)日：2005-02-03
申请号：US10879463
申请日：2004-06-29
申请人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
发明人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
IPC分类号： C23C16/52 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： C23C16/463 , C23C16/52 , H01L21/67109
摘要： The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and method are disclosed which provides a segmented cold plate situated within a process chamber, wherein a plurality of segments of the cold plate are operable to radially translate between an engaged position and a disengaged position, wherein a substrate holder may pass between the plurality of segments when the segments are in the disengaged position. According to another aspect, an elevator is operable to linearly translate a substrate residing on a substrate holder between a heating position proximate to a heater assembly and a cooling position proximate to the segmented cold plate. According to another aspect, the cold plate comprises a plurality of holes through which one or more gases may flow, wherein an amount or mixture of the one or more gases is controllable via a controller, and wherein one or more temperature sensors are operable to provide temperature feedback at the substrate. According to another aspect the substrate resides within close proximity to the cold plate, wherein when gas is flowed through the holes, the substrate is cooled in the viscous regime, and the amount and/or mixture of gases flowed through the holes is controlled, based, at least in part, on the one or more measured temperatures.
摘要翻译：本发明涉及半导体热处理系统和用于热冷却半导体衬底的装置。根据本发明的一个方面，公开了一种半导体热处理系统及相关设备和方法，其提供位于处理室内的分段冷板，其中冷板的多个段可操作以在啮合位置和脱离位置，其中当所述段处于分离位置时，衬底保持器可以在所述多个段之间通过。根据另一方面，电梯可操作以将位于基板保持器上的基板线性平移在靠近加热器组件的加热位置和靠近分段冷板的冷却位置之间。根据另一方面，冷板包括一个或多个气体可流过的多个孔，其中一个或多个气体的量或混合物可经由控制器控制，并且其中一个或多个温度传感器可操作以提供衬底温度反馈。根据另一方面，衬底位于紧邻冷板的位置，其中当气体流过孔时，衬底在粘性状态下被冷却，并且基于孔流动的气体的量和/或混合物被基于，至少部分地基于一个或多个测量的温度。

47. 发明授权

US09155181B2 Distributed multi-zone plasma source systems, methods and apparatus 有权
标题翻译：分布式多区域等离子体源系统，方法和装置
公开(公告)号：US09155181B2
公开(公告)日：2015-10-06
申请号：US12852352
申请日：2010-08-06
申请人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
发明人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
IPC分类号： H01L21/306 , C23C16/00 , H05H1/46 , H01J37/32
CPC分类号： H05H1/46 , H01J37/321 , H01J37/3211 , H01J37/32357 , H01J37/32422 , H01J37/3244 , H01J37/32449 , H01J37/3266 , H01J37/32669 , H01J37/32816 , H01J2237/334 , H05H2001/4652 , H05H2001/4682
摘要： A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber and multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites. A system and method for generating a plasma are also described.
摘要翻译：等离子体源包括环等离子体室，围绕环等离子体室的外部的初级绕组和多个铁氧体，其中环等离子体室穿过每个铁氧体。还描述了用于产生等离子体的系统和方法。

48. 发明授权

US08999104B2 Systems, methods and apparatus for separate plasma source control 有权
标题翻译：用于单独等离子体源控制的系统，方法和装置
公开(公告)号：US08999104B2
公开(公告)日：2015-04-07
申请号：US12852364
申请日：2010-08-06
申请人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
发明人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
IPC分类号： C23F1/00 , H01J37/32
CPC分类号： H01J37/32449 , H01J37/32422 , H01J37/3266 , H01J37/32669 , H01J37/32816 , H01J2237/334
摘要： A plasma source includes multiple ring plasma chambers, multiple primary windings, multiple ferrites and a control system. Each one of the primary windings is wrapped around an exterior one of the ring plasma chambers. Each one of the plurality of the ring plasma chamber passes through a respective portion of the plurality of ferrites. The control system is coupled to each of the ring plasma chambers. A system and method for generating and using a plasma are also described.
摘要翻译：等离子体源包括多个环等离子体室，多个初级绕组，多个铁氧体和一个控制系统。每个初级绕组缠绕在环形等离子体室的外部一个周围。多个环形等离子体室中的每一个穿过多个铁氧体的相应部分。控制系统耦合到每个环形等离子体室。还描述了用于产生和使用等离子体的系统和方法。

49. 发明授权

US07829353B2 Pulsed mass flow delivery system and method 有权
标题翻译：脉冲质量流量输送系统及方法
公开(公告)号：US07829353B2
公开(公告)日：2010-11-09
申请号：US11586782
申请日：2006-10-26
申请人： Ali Shajii , Siddharth P. Nagarkatti , Matthew Mark Besen , William R. Clark , Daniel Alexander Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth P. Nagarkatti , Matthew Mark Besen , William R. Clark , Daniel Alexander Smith , Bora Akgerman
IPC分类号： H01L21/00
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.
摘要翻译：一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置以及连接到阀门，压力传感器和输入装置的控制器。控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。然后将控制器编程为等待预定的等待时间，以允许室内的气体达到平衡状态，然后在时间= t0时打开出口阀，并且当气体质量在时间= t *时关闭出口阀放电等于所需质量。

50. 发明申请

US20090320677A1 PARTICLE TRAP FOR A PLASMA SOURCE 失效
标题翻译：用于等离子体源的颗粒捕获
公开(公告)号：US20090320677A1
公开(公告)日：2009-12-31
申请号：US12147078
申请日：2008-06-26
申请人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
发明人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
IPC分类号： B01D53/22 , B01J19/08 , B01D46/46 , B01D45/08 , B01D50/00
CPC分类号： H01J37/32357 , H01J37/32871 , Y10S55/15 , Y10T29/4935
摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.
摘要翻译：用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。冷却剂构件可以与气体通道热连通。

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