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    • 42. 发明授权
    • Method for prediction random defect yields of integrated circuits with accuracy and computation time controls
    • 用于精确计算时间控制的集成电路预测随机缺陷产量的方法
    • US06738954B1
    • 2004-05-18
    • US09636478
    • 2000-08-10
    • Archibald J. AllenWilm E. DonathAlan D. DziedzicMark A. LavinDaniel N. MaynardDennis M. NewnsGustavo E. Tellez
    • Archibald J. AllenWilm E. DonathAlan D. DziedzicMark A. LavinDaniel N. MaynardDennis M. NewnsGustavo E. Tellez
    • G06F1750
    • H01L22/20G01R31/31705
    • A method of computing a manufacturing yield of an integrated circuit having device shapes includes sub-dividing the integrated circuit into failure mechanism subdivisions (each of the failure mechanism subdivisions includes one or more failure mechanism and each of the failure mechanisms includes one or more defect mechanisms), partitioning the failure mechanism subdivisions by area into partitions, pre-processing the device shapes in each partition, computing an initial average number of faults for each of the failure mechanisms and for each partition by numerical integration of an average probability of failure of each failure mechanism, (the numerical integration produces a list of defect sizes for each defect mechanism, and the computing of the initial average includes setting a maximum integration error limit, a maximum sample size for a population of each defect size, and a maximum number of allowable faults for each failure mechansim), and computing a final average number of faults for the integrated circuit by iterativelly reducing a statistical error of the initial average number of faults for each of the failure mechanisms until the statistical error is below an error limit.
    • 一种计算具有装置形状的集成电路的制造成品率的方法包括将集成电路分为故障机构细分(每个故障机构细分包括一个或多个故障机制,并且每个故障机制包括一个或多个缺陷机构 ),将故障机制细分为每个区域的分区,预处理每个分区中的设备形状,通过对每个分区的每个故障机制和每个分区的平均故障概率的数值积分计算每个故障机制的初始平均故障数 故障机制(数值积分产生每个缺陷机制的缺陷尺寸列表,初始平均值的计算包括设置最大积分误差极限,每个缺陷尺寸的总体最大样本量, 每个故障的可允许故障mechansim),并计算最终的平均数fau 通过迭代地减少每个故障机制的初始平均故障数量的统计误差,直到统计误差低于误差极限为止,用于集成电路。