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    • 41. 发明申请
    • Plasma Etching Apparatus
    • 等离子蚀刻装置
    • US20110303365A1
    • 2011-12-15
    • US13203191
    • 2010-07-16
    • Takashi YamamotoNaoya Ikemoto
    • Takashi YamamotoNaoya Ikemoto
    • C23F1/08H05H1/24
    • H01J37/32422H01J37/321H01J37/32357
    • The present invention relates to a plasma etching apparatus capable of uniformly etching the entire surface of a substrate regardless of the kind of the substrate. A plasma etching apparatus 1 has a processing chamber 11 in which the outer diameter of an upper chamber 12 is formed smaller than a lower chamber 13 and the upper chamber 12 is provided at the central portion of the top surface of the lower chamber 13, a grounded plate-shaped member 14 which is provided on the ceiling of the lower chamber 13 to divide the inner space of the processing chamber 11 and which has a plurality of through holes 14a penetrating from the top surface to the bottom surface thereof, a platen 16 which is disposed in the lower chamber 13 and on which a substrate K is placed, a gas supply device 20 for supplying an etching gas into the upper chamber 12, plasma generating devices 26, 29 for exciting etching gases in the upper chamber 12 and in the lower chamber 13 into a plasma, respectively, an exhaust device 35 for reducing the pressure within the processing chamber 11, and an RF power supply unit 32 for supplying RF power to the platen 16.
    • 本发明涉及能够均匀地蚀刻基板的整个表面的等离子体蚀刻装置,而与基板的种类无关。 等离子体蚀刻装置1具有处理室11,其中上室12的外径形成为小于下室13,上室12设置在下室13的顶表面的中心部分, 设置在下室13的天花板上以分隔处理室11的内部空间并且具有从顶表面贯穿其底表面的多个通孔14a的接地板状构件14,压板16 其设置在下室13中并且其上放置有基板K的气体供应装置20,用于将蚀刻气体供应到上室12中,等离子体产生装置26,29用于激发上室12中的蚀刻气体 下室13分别成为等离子体,用于减小处理室11内的压力的排气装置35和用于向压板16提供RF功率的RF电源单元32。
    • 48. 发明申请
    • Dental Composition
    • 牙科组成
    • US20090258966A1
    • 2009-10-15
    • US12089334
    • 2006-10-04
    • Satoshi HirayamaTakuji IkemiYasufumi TsuchiyaTatsuya OriTakashi Yamamoto
    • Satoshi HirayamaTakuji IkemiYasufumi TsuchiyaTatsuya OriTakashi Yamamoto
    • A61K6/00C08K3/32
    • A61K6/0023A61K6/033C08L33/00
    • An object of the present invention is to provide a dental composition having excellent adhesive effect and simultaneously not causing microleakage.A dental composition of a first embodiment of the present invention includes (A) an acidic-group containing polymerizable monomer, (B) a polymerizable monomer, (C) a filler comprising poly(meth)acrylate particles, (D) a calcium-containing material including tetracalcium phosphate (TTCP) and dicalcium phosphate (DCP), and (E) a polymerization initiator. The component (A) is contained at 16-70 parts by weight based on a total of 100 parts by weight of (A)+(B). The component (B) is contained at 84-30 parts by weight based on a total of 100 parts by weight of (A)+(B). The component (C) is contained at 0.2-297 parts by weight relative to a total of 100 parts by weight of (A)+(B). The component (D) is contained at 0.2-297 parts by weight relative to a total of 100 parts by weight of (A)+(B).
    • 本发明的目的是提供具有优异粘合效果并同时不引起微渗漏的牙科用组合物。 本发明的第一实施方式的牙科用组合物包含(A)含酸性基的可聚合单体,(B)可聚合单体,(C)包含聚(甲基)丙烯酸酯颗粒的填料,(D)含钙 包括磷酸四钙(TTCP)和磷酸二钙(DCP)的材料和(E)聚合引发剂。 基于(A)+(B)的总计100重量份,组分(A)含量为16-70重量份。 基于总计100重量份的(A)+(B),组分(B)含有84-30重量份。 相对于总计100重量份的(A)+(B),组分(C)的含量为0.2-297重量份。 组分(D)相对于总计100重量份的(A)+(B)为0.2-297重量份。
    • 50. 发明申请
    • Liquid state detecting sensor
    • 液态检测传感器
    • US20090173152A1
    • 2009-07-09
    • US10585207
    • 2005-05-18
    • Yoshikuni SatoTakashi YamamotoTakeo SasanumaYuki Mizuno
    • Yoshikuni SatoTakashi YamamotoTakeo SasanumaYuki Mizuno
    • G01F23/26
    • G01F23/268
    • The present invention provides a liquid state detecting sensor that is free from a problem of increase in the number of parts and a problem in assembly and furthermore capable of, in support of electrodes, absorbing an error and supporting both electrodes, even in case an inner electrode has at a surface an insulation layer, without causing any damage to the layer. The liquid state detecting sensor includes an outer tubular electrode 10 shaped tubular and formed from a conductor, an inner electrode 20 in the form of a shaft and disposed along an axial direction G and within the outer tubular electrode, and a base end support member 40 that supports, at base end sides of the both electrodes 10 and 20, the both electrodes 10 and 20 while holding the electrodes insulated from each other, and detects a level of liquid within a tank 1, etc. by measuring an electrostatic capacity between the electrodes, wherein an elastic body 30 made of rubber is disposed, by insertion under pressure, at a place outside a leading end or its adjacent portion of the inner electrode 20 and inside the outer tubular electrode 10. Since the leading end or its adjacent portion of the inner electrode 20 is elastically supported on an inside of the outer tubular electrode 10, the assembly can be attained with ease and the dimensional error of the parts and vibrations thereof can be absorbed.
    • 本发明提供一种液体状态检测传感器,其不存在部件数量增加和组装问题,并且还能够支持电极吸收误差并支撑两个电极,即使在内部 电极在表面处具有绝缘层,而不会对该层造成任何损坏。 液体状态检测传感器包括:外管状电极10,其形状为管状,由导体形成;内部电极20,其形式为轴,沿轴向方向G设置;外管状电极内设有基端支撑部件40 在两个电极10和20的基端侧支撑两个电极10和20,同时保持彼此绝缘的电极,并且通过测量罐1之间的静电容量来检测罐1内的液体水平 电极,其中通过在压力下插入内部电极20的前端或其相邻部分之外的位置和外管状电极10内部的位置处设置由橡胶制成的弹性体30.由于前端或其相邻部分 内部电极20的弹性支撑在外部管状电极10的内侧,可以容易地获得组件,并且部件的尺寸误差和振动c 被吸收。