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    • 41. 发明授权
    • Direct fuel injection/spark ignition engine control device
    • 直接燃油喷射/火花点火发动机控制装置
    • US07096853B2
    • 2006-08-29
    • US11038620
    • 2005-01-21
    • Masayuki Tomita
    • Masayuki Tomita
    • F02P5/00F02P5/145
    • F02D37/02F02D41/401F02D41/402F02D41/403F02D2041/389
    • A control apparatus is configured to enhance turbulence in the cylinder produced by the fuel spray, and to improve combustion stability (promote flame propagation) in an ATDC designed to reduce HC and/or achieve early activation of the catalyst. Ignition timing is set to compression top dead center or later when for example the catalyst requires warming. In one fuel injection timing, a single fuel injection is injected prior to ignition timing at compression stroke top dead center or later. Alternatively, the fuel is injected in two fuel injections with a first fuel injection occurring during either the intake stroke or the compression stroke and the second fuel injection occurring at compression stroke top dead center or later.
    • 控制装置被配置为增强由燃料喷雾产生的气缸中的湍流,并且改善设计成减少HC的催化剂和/或实现催化剂的早期活化的ATDC中的燃烧稳定性(促进火焰传播)。 点火正时设定为压缩上止点或稍后当催化剂需要变暖时。 在一个燃料喷射正时中,在压缩冲程上死点或更晚的点火正时之前喷射单次燃料喷射。 或者,燃料在两次燃料喷射中被注入,在进气冲程或压缩冲程期间发生第一次燃料喷射,而第二次燃料喷射发生在压缩冲程上死点或更后。
    • 43. 发明授权
    • Substrate processing apparatus and method of manufacturing semiconductor device
    • 基板处理装置及半导体装置的制造方法
    • US08471477B2
    • 2013-06-25
    • US13071227
    • 2011-03-24
    • Masayuki TomitaKatsunori FunakiShinji YashimaRyuichi Shimada
    • Masayuki TomitaKatsunori FunakiShinji YashimaRyuichi Shimada
    • H05B31/26
    • H01J37/32183H01J37/32091
    • A processing speed may be easily controlled over the wide range within the impedance variation range. A substrate processing apparatus includes: a processing chamber configured to process a substrate; a substrate support unit configured to support the substrate in the processing chamber; a processing gas supply unit configured to supply a processing gas into the processing chamber; a plasma generation electrode configured to convert the processing gas supplied into the processing chamber to be in a plasma state; a radio frequency power source configured to apply a radio frequency power to the plasma generation electrode; a variable impedance electrode installed at the substrate support unit and configured to control an electric potential of the substrate; a variable impedance mechanism connected to the variable impedance electrode and configured to vary an impedance according to a reciprocal of a peak-to-peak voltage of the plasma generation electrode; an exhaust unit configured to exhaust an atmosphere in the processing chamber; and a controller configured to control at least the variable impedance mechanism.
    • 可以在阻抗变化范围内的宽范围内容易地控制处理速度。 基板处理装置包括:处理室,被配置为处理基板; 衬底支撑单元,其构造成在所述处理室中支撑所述衬底; 处理气体供给单元,其构造成将处理气体供给到所述处理室中; 等离子体产生电极,被配置为将供应到处理室中的处理气体转换成等离子体状态; 射频电源,被配置为向所述等离子体产生电极施加射频电力; 可变阻抗电极,其安装在所述基板支撑单元处并且被配置为控制所述基板的电位; 连接到所述可变阻抗电极并被配置为根据所述等离子体产生电极的峰 - 峰电压的倒数改变阻抗的可变阻抗机构; 排气单元,其构造成排出处理室中的气氛; 以及控制器,被配置为至少控制所述可变阻抗机构。
    • 47. 发明授权
    • Control apparatus and method for direct-injection spark-ignition internal combustion engine
    • 直喷式火花点火内燃机的控制装置及方法
    • US06408816B1
    • 2002-06-25
    • US09658661
    • 2000-09-08
    • Masayuki TomitaKimiyoshi Nishizawa
    • Masayuki TomitaKimiyoshi Nishizawa
    • F02B1700
    • F02D41/402F02B2075/125F02D41/0255F02D41/1473F02D41/3023Y02T10/123Y02T10/26Y02T10/44
    • A control apparatus and method for a direct-injection spark-ignition internal combustion engine in which a stratified combustion is performed to raise an exhaust temperature under a condition prior to a completion of an engine warm-up. The stratified combustion is provided with a lean air-fuel mixture formed over a whole combustion chamber through a fuel injection at a suction stroke and a rich air-fuel mixture formed in an inner space surrounding a spark plug at the combustion chamber through a fuel injection at a compression stroke and a fuel injection quantity of the fuel injection at the suction stroke. A fuel injection quantity of the fuel injection at the compression stroke is corrected by use of a feedback correction coefficient so that an average air-fuel ratio over the whole combustion chamber is controlled to be a predetermined target air-fuel ratio.
    • 一种用于直喷式火花点火内燃机的控制装置和方法,其中在发动机预热完成之前的条件下进行分层燃烧以提高排气温度。 分层燃烧设置有通过在吸入行程处的燃料喷射在整个燃烧室上形成的贫空燃混合物,以及通过燃料喷射形成在燃烧室周围的火花塞周围的内部空间中的浓空气燃料混合物 在压缩行程和在吸入行程处的燃料喷射的燃料喷射量。 通过使用反馈校正系数来校正压缩冲程的燃料喷射的燃料喷射量,使得整个燃烧室的平均空燃比被控制为预定的目标空燃比。