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    • 41. 发明授权
    • Computing network path delays so accurate absolute time can be forwarded from a server to a client
    • 计算网络路径延迟如此精确的绝对时间可以从服务器转发到客户端
    • US06941109B2
    • 2005-09-06
    • US10079251
    • 2002-02-19
    • Hiroshi MatsushitaPaul W. McBurney
    • Hiroshi MatsushitaPaul W. McBurney
    • G04G5/00G01S1/00G01S19/25G06F13/00H04J3/06H04B7/19
    • G01S19/256H04J3/0644H04J3/0667
    • A navigation-satellite receiver support data network comprises a server connected to the Internet to provide initialization information to clients for faster cold starts. The server includes a GPS receiver that provides for tracking of a constellation of navigation satellites. When a client is started cold, time and frequency are initially unknown to it. Test messages are sent back and forth over the Internet and a path delay time is computed from the average of the quickest transit times. This yields the offset time between the server's time system and the client's time system. The server sends current time information to the client, and the computed path delay is added. The client can then compute correct time from the server and path delay information, and thereby select much sooner which satellites are correct to search.
    • 导航卫星接收机支持数据网络包括连接到因特网的服务器,以向客户端提供初始化信息以用于更快的冷启动。 服务器包括GPS接收器,用于跟踪导航卫星的星座。 当客户开始冷静时,时间和频率最初是未知的。 测试消息通过互联网来回发送,并且路径延迟时间是从最快的传输时间的平均值来计算的。 这产生了服务器的时间系统和客户端的时间系统之间的偏移时间。 服务器向客户端发送当前时间信息,并添加计算出的路径延迟。 然后,客户端可以从服务器和路径延迟信息计算正确的时间,从而选择更早的哪个卫星正确搜索。
    • 47. 发明授权
    • Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus
    • 半导体制造装置的半导体制造装置及控制系统的控制方法
    • US07970486B2
    • 2011-06-28
    • US11714231
    • 2007-03-06
    • Hiroshi MatsushitaJunji SugamotoMasafumi Asano
    • Hiroshi MatsushitaJunji SugamotoMasafumi Asano
    • G06F19/00
    • G05B19/41875G05B2219/32194G05B2219/45031Y02P90/18Y02P90/22
    • A method for controlling a semiconductor manufacturing apparatus for processing wafers divided for each lot, has acquiring quality control value data group containing quality control value data of wafers in a plurality of lots previously processed, and an equipment engineering system parameter group containing equipment engineering system parameters corresponding to the wafers; creating a prediction formula of quality control value data, acquiring a first equipment engineering system parameters; inputting the first equipment engineering system parameters to the prediction formula, and performing calculation to predict first quality control value data of the wafers in the first lot; determining processing of the wafers corresponding to the first quality control value data; acquiring measured first quality control value data of the wafers in the first lot; replacing the quality control value data corresponding to the wafers in the first processed lot; updating the prediction formula.
    • 一种用于控制用于处理每批批次的晶片的半导体制造装置的方法,具有包含先前处理的多个批次中的晶片的质量控制值数据的采集质量控制值数据组,以及包含设备工程系统参数的设备工程系统参数组 对应于晶片; 创建质量控制值数据预测公式,获取第一设备工程系统参数; 将第一设备工程系统参数输入到预测公式中,并且执行计算以预测第一批中的晶片的第一质量控制值数据; 确定与第一质量控制值数据对应的晶片的处理; 获取第一批中的晶片的测量的第一质量控制值数据; 替换与第一处理批次中的晶片对应的质量控制值数据; 更新预测公式。
    • 49. 发明申请
    • Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus
    • 半导体制造装置的半导体制造装置及控制系统的控制方法
    • US20070225853A1
    • 2007-09-27
    • US11714231
    • 2007-03-06
    • Hiroshi MatsushitaJunji SugamotoMasafumi Asano
    • Hiroshi MatsushitaJunji SugamotoMasafumi Asano
    • G06F19/00
    • G05B19/41875G05B2219/32194G05B2219/45031Y02P90/18Y02P90/22
    • A method for controlling a semiconductor manufacturing apparatus for processing wafers divided for each lot, has acquiring quality control value data group containing quality control value data of wafers in a plurality of lots previously processed, and an equipment engineering system parameter group containing equipment engineering system parameters corresponding to the wafers; creating a prediction formula of quality control value data, acquiring a first equipment engineering system parameters; inputting the first equipment engineering system parameters to the prediction formula, and performing calculation to predict first quality control value data of the wafers in the first lot; determining processing of the wafers corresponding to the first quality control value data; acquiring measured first quality control value data of the wafers in the first lot; replacing the quality control value data corresponding to the wafers in the first processed lot; updating the prediction formula.
    • 一种用于控制用于处理每批批次的晶片的半导体制造装置的方法,具有包含先前处理的多个批次中的晶片的质量控制值数据的采集质量控制值数据组,以及包含设备工程系统参数的设备工程系统参数组 对应于晶片; 创建质量控制值数据预测公式,获取第一设备工程系统参数; 将第一设备工程系统参数输入到预测公式中,并且执行计算以预测第一批中的晶片的第一质量控制值数据; 确定与第一质量控制值数据对应的晶片的处理; 获取第一批中的晶片的测量的第一质量控制值数据; 替换与第一处理批次中的晶片对应的质量控制值数据; 更新预测公式。