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    • 45. 发明授权
    • Nonvolatile semiconductor memory device and method of fabricating the same
    • 非易失性半导体存储器件及其制造方法
    • US08207560B2
    • 2012-06-26
    • US11873104
    • 2007-10-16
    • Minori Kajimoto
    • Minori Kajimoto
    • H01L29/76
    • H01L27/115H01L27/11521H01L27/11524Y10S257/90
    • A nonvolatile semiconductor memory device includes a gate electrode formed on a gate insulating film, a source/drain region formed at each side of the gate electrode and including a first region, a second region and a third region located between the first and second regions, a first silicon oxide film formed on a sidewall of the gate electrode, a second silicon oxide film formed on the third region, and a silicon nitride film formed on an upper surface of the second silicon oxide film. The first silicon oxide film, the second silicon oxide film having the silicon nitride film, and a contact plug are contiguously arranged on the first, third and second regions of the source/drain region. The contact plug extends through the second silicon oxide film and the second nitride file to contact the source/drain region.
    • 非易失性半导体存储器件包括形成在栅极绝缘膜上的栅电极,形成在栅电极的每一侧的源极/漏极区,并且包括位于第一和第二区之间的第一区,第二区和第三区, 形成在栅电极的侧壁上的第一氧化硅膜,形成在第三区域上的第二氧化硅膜和形成在第二氧化硅膜的上表面上的氮化硅膜。 第一氧化硅膜,具有氮化硅膜的第二氧化硅膜和接触插塞被连续排列在源极/漏极区域的第一,第三和第二区域上。 接触插塞延伸穿过第二氧化硅膜和第二氮化物文件以接触源极/漏极区域。
    • 46. 发明授权
    • Semiconductor device and method of fabricating the same
    • 半导体装置及其制造方法
    • US07948053B2
    • 2011-05-24
    • US12423914
    • 2009-04-15
    • Yugo IdeMinori Kajimoto
    • Yugo IdeMinori Kajimoto
    • H01L29/00
    • H01L27/11546H01L27/11526H01L28/20
    • A semiconductor device includes a first insulating film, paired resistance elements each of which includes a first conductive film formed on the first insulating film, a second insulating film formed on the first conductive film and a second conductive film formed on the second insulating film, paired first contact plugs formed on one of the resistance elements and arranged along a first direction, and paired second contact plugs formed on the other resistance. One of the resistance elements has a first width in a second direction perpendicular to the first direction, and a semiconductor region surrounded by an element isolation region has a second width. The first width is smaller than half of the second width. The second insulating films are spaced from each other by a first distance. The second conductive films are spaced from each other by a second distance. The second distance is longer than the first distance.
    • 半导体器件包括第一绝缘膜,成对电阻元件,每个电阻元件包括形成在第一绝缘膜上的第一导电膜,形成在第一导电膜上的第二绝缘膜和形成在第二绝缘膜上的第二导电膜,成对 形成在一个电阻元件上并沿着第一方向布置的第一接触插塞和形成在另一个电阻上的成对的第二接触插塞。 电阻元件中的一个在垂直于第一方向的第二方向上具有第一宽度,并且由元件隔离区域包围的半导体区域具有第二宽度。 第一宽度小于第二宽度的一半。 第二绝缘膜彼此隔开第一距离。 第二导电膜彼此隔开第二距离。 第二距离比第一距离长。
    • 47. 发明授权
    • Nonvolatile semiconductor memory device with twin-well
    • 具有双阱的非易失性半导体存储器件
    • US07800154B2
    • 2010-09-21
    • US11031036
    • 2005-01-10
    • Mitsuhiro NoguchiMinori Kajimoto
    • Mitsuhiro NoguchiMinori Kajimoto
    • H01L29/94
    • H01L27/11546H01L27/105H01L27/11526
    • A nonvolatile semiconductor memory device includes a first well of a first conductivity type, which is formed in a semiconductor substrate of the first conductivity type, a plurality of memory cell transistors that are formed in the first well, a second well of a second conductivity type, which includes a first part that surrounds a side region of the first well and a second part that surrounds a lower region of the first well, and electrically isolates the first well from the semiconductor substrate, and a third well of the second conductivity type, which is formed in the semiconductor substrate. The third well has a less depth than the second part of the second well.
    • 非易失性半导体存储器件包括形成在第一导电类型的半导体衬底中的第一导电类型的第一阱,形成在第一阱中的多个存储单元晶体管,第二导电类型的第二阱 ,其包括围绕所述第一阱的侧部区域的第一部分和围绕所述第一阱的下部区域的第二部分,并且将所述第一阱与所述半导体衬底以及所述第二导电类型的第三阱电隔离, 其形成在半导体衬底中。 第三井具有比第二井的第二部分更少的深度。