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    • 50. 发明申请
    • Phase change memory and manufacturing method thereof
    • 相变记忆及其制造方法
    • US20060261379A1
    • 2006-11-23
    • US11272751
    • 2005-11-15
    • Takayuki TsukamotoKatsuyuki NaitoSumio Ashida
    • Takayuki TsukamotoKatsuyuki NaitoSumio Ashida
    • H01L29/768
    • H01L45/06H01L45/1233H01L45/126H01L45/1273H01L45/144H01L45/16Y10S438/90
    • Even if sizes of storage cells are reduced in a phase change memory, properties of the respective storage cells can be set to be approximately equal to one another and a current amount required for phase change can be reduced sufficiently. The phase change memory includes at least a storage cell. The storage cell includes a first electrode, an electrically conductive portion provided on the first electrode and having at least two electrically conductive bodies with approximately the same shape provided on the first electrode, the electrically conductive bodies being spaced by a high resistance film with a high resistance, a recording layer provided on the electrically conductive portion and having phase change material which can change between a first phase state with a first specific resistance and a second phase state with a second specific resistance different from the first specific resistance, and a second electrode provided on the recording layer.
    • 即使存储单元的尺寸在相变存储器中减少,各个存储单元的特性可以被设置为大致相等,并且可以充分地减少相变所需的电流量。 相变存储器至少包括存储单元。 存储单元包括第一电极,设置在第一电极上的导电部分,并且具有至少两个导电体,其具有设置在第一电极上的大致相同的形状,导电体由高电阻膜隔开,高电阻 电阻,设置在导电部分上并具有能够在具有第一电阻率的第一相位状态与第二相位状态之间变化的相变材料的记录层,其具有不同于第一电阻率的第二电阻率;以及第二电极 提供在记录层上。