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    • 44. 发明授权
    • Field-effect transistor with local source/drain insulation and associated method of production
    • 具有局部源/漏绝缘和相关生产方法的场效应晶体管
    • US07824993B2
    • 2010-11-02
    • US12431214
    • 2009-04-28
    • Juergen HolzKlaus SchrueferHelmut Tews
    • Juergen HolzKlaus SchrueferHelmut Tews
    • H01L21/336
    • H01L29/66636H01L21/283H01L21/30604H01L21/31H01L21/3205H01L29/0653H01L29/41783
    • A method for fabricating a field-effect transistor with local source/drain insulation. The method includes forming and patterning a gate stack with a gate layer and a gate dielectric on a semiconductor substrate; forming source and drain depressions at the gate stack in the semiconductor substrate; forming a depression insulation layer at least in a bottom region of the source and drain depressions; and filling the at least partially insulated source and drain depressions with a filling layer for realizing source and drain regions. Further, the step of forming source and drain depressions at the gate stack in the semiconductor substrate includes that first depressions are formed for realizing channel connection regions in the semiconductor substrate, spacers are formed at the gate stack, and second depressions are formed using the spacers as a mask in the first depressions and in the semiconductor substrate.
    • 一种制造具有局部源极/漏极绝缘的场效应晶体管的方法。 该方法包括在半导体衬底上形成和图案化具有栅极层和栅极电介质的栅叠层; 在半导体衬底中的栅极堆叠处形成源极和漏极凹陷; 至少在所述源极和漏极凹陷的底部区域中形成凹陷绝缘层; 以及用用于实现源极和漏极区域的填充层填充所述至少部分绝缘的源极和漏极凹部。 此外,在半导体衬底中的栅极堆叠处形成源极和漏极凹陷的步骤包括形成用于实现半导体衬底中的沟道连接区域的第一凹陷,在栅极堆叠处形成间隔物,并且使用间隔件形成第二凹陷 作为第一凹部和半导体衬底中的掩模。