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41. 发明授权

US08247329B2 Nanotube semiconductor devices 有权
标题翻译：纳米管半导体器件
公开(公告)号：US08247329B2
公开(公告)日：2012-08-21
申请号：US13024256
申请日：2011-02-09
申请人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
发明人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
IPC分类号： H01L21/311
CPC分类号： H01L29/0665 , B82Y10/00 , H01L29/0692 , H01L29/1095 , H01L29/6609 , H01L29/66143 , H01L29/66348 , H01L29/66666 , H01L29/7397 , H01L29/861 , H01L29/872
摘要： A method for forming a semiconductor device includes forming a nanotube region using a thin epitaxial layer formed on the sidewall of a trench in the semiconductor body. The thin epitaxial layer has uniform doping concentration. In another embodiment, a first thin epitaxial layer of the same conductivity type as the semiconductor body is formed on the sidewall of a trench in the semiconductor body and a second thin epitaxial layer of the opposite conductivity type is formed on the first epitaxial layer. The first and second epitaxial layers have uniform doping concentration. The thickness and doping concentrations of the first and second epitaxial layers and the semiconductor body are selected to achieve charge balance. In one embodiment, the semiconductor body is a lightly doped P-type substrate. A vertical trench MOSFET, an IGBT, a Schottky diode and a P-N junction diode can be formed using the same N-Epi/P-Epi nanotube structure.
摘要翻译：形成半导体器件的方法包括：使用形成在半导体本体中的沟槽的侧壁上的薄外延层来形成纳米管区域。薄的外延层具有均匀的掺杂浓度。在另一个实施例中，在半导体主体中的沟槽的侧壁上形成与半导体本体相同的导电类型的第一薄外延层，并且在第一外延层上形成相反导电类型的第二薄外延层。第一和第二外延层具有均匀的掺杂浓度。选择第一和第二外延层和半导体本体的厚度和掺杂浓度以实现电荷平衡。在一个实施例中，半导体本体是轻掺杂的P型衬底。可以使用相同的N-Epi / P-Epi纳米管结构来形成垂直沟槽MOSFET，IGBT，肖特基二极管和P-N结二极管。

42. 发明申请

US20120098059A1 DIRECT CONTACT IN TRENCH WITH THREE-MASK SHIELD GATE PROCESS 有权
标题翻译：直接与三层屏蔽门过程接触
公开(公告)号：US20120098059A1
公开(公告)日：2012-04-26
申请号：US13343666
申请日：2012-01-04
申请人： Sung-Shan Tai , Hamza Yilmaz , Anup Bhalla , Hong Chang , John Chen
发明人： Sung-Shan Tai , Hamza Yilmaz , Anup Bhalla , Hong Chang , John Chen
IPC分类号： H01L21/28 , H01L29/78
CPC分类号： H01L29/7813 , H01L21/26586 , H01L29/0869 , H01L29/407 , H01L29/4236 , H01L29/4238 , H01L29/456 , H01L29/4933 , H01L29/66727 , H01L29/66734 , H01L29/7811
摘要： A semiconductor substrate may be etched to form trenches with three different widths. A first conductive material is formed at the bottom of the trenches. A second conductive material separated by an insulator is formed over the first conductive material. A first insulator layer is formed on the trenches. A body layer is formed in the substrate. A source is formed in the body layer. A second insulator layer is formed on the trenches and source. Source and gate contacts are formed through the second insulator layer. Source and gate metal are formed on the second insulator layer. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
摘要翻译：可以蚀刻半导体衬底以形成具有三个不同宽度的沟槽。第一导电材料形成在沟槽的底部。在第一导电材料上方形成由绝缘体隔开的第二导电材料。在沟槽上形成第一绝缘体层。在衬底中形成体层。源体形成在体层中。在沟槽和源极上形成第二绝缘体层。源极和栅极触点通过第二绝缘体层形成。在第二绝缘体层上形成源极和栅极金属。提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

43. 发明授权

US07910486B2 Method for forming nanotube semiconductor devices 有权
标题翻译：形成纳米管半导体器件的方法
公开(公告)号：US07910486B2
公开(公告)日：2011-03-22
申请号：US12484166
申请日：2009-06-12
申请人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
发明人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
IPC分类号： H01L21/311
CPC分类号： H01L29/0665 , B82Y10/00 , H01L29/0692 , H01L29/1095 , H01L29/6609 , H01L29/66143 , H01L29/66348 , H01L29/66666 , H01L29/7397 , H01L29/861 , H01L29/872
摘要： A method for forming a semiconductor device includes forming a nanotube region using a thin epitaxial layer formed on the sidewall of a trench in the semiconductor body. The thin epitaxial layer has uniform doping concentration. In another embodiment, a first thin epitaxial layer of the same conductivity type as the semiconductor body is formed on the sidewall of a trench in the semiconductor body and a second thin epitaxial layer of the opposite conductivity type is formed on the first epitaxial layer. The first and second epitaxial layers have uniform doping concentration. The thickness and doping concentrations of the first and second epitaxial layers and the semiconductor body are selected to achieve charge balance. In one embodiment, the semiconductor body is a lightly doped P-type substrate. A vertical trench MOSFET, an IGBT, a Schottky diode and a P-N junction diode can be formed using the same N-Epi/P-Epi nanotube structure.
摘要翻译：形成半导体器件的方法包括：使用形成在半导体本体中的沟槽的侧壁上的薄外延层来形成纳米管区域。薄的外延层具有均匀的掺杂浓度。在另一个实施例中，在半导体主体中的沟槽的侧壁上形成与半导体本体相同的导电类型的第一薄外延层，并且在第一外延层上形成相反导电类型的第二薄外延层。第一和第二外延层具有均匀的掺杂浓度。选择第一和第二外延层和半导体本体的厚度和掺杂浓度以实现电荷平衡。在一个实施例中，半导体本体是轻掺杂的P型衬底。可以使用相同的N-Epi / P-Epi纳米管结构形成垂直沟槽MOSFET，IGBT，肖特基二极管和P-N结二极管。

44. 发明授权

US08847306B2 Direct contact in trench with three-mask shield gate process 有权
标题翻译：直接接触沟槽与三屏蔽屏蔽门工艺
公开(公告)号：US08847306B2
公开(公告)日：2014-09-30
申请号：US13343666
申请日：2012-01-04
申请人： Sung-Shan Tai , Hamza Yilmaz , Anup Bhalla , Hong Chang , John Chen
发明人： Sung-Shan Tai , Hamza Yilmaz , Anup Bhalla , Hong Chang , John Chen
IPC分类号： H01L29/66 , H01L21/336 , H01L29/423 , H01L29/78 , H01L29/40 , H01L29/45 , H01L29/49 , H01L29/08 , H01L21/265
CPC分类号： H01L29/7813 , H01L21/26586 , H01L29/0869 , H01L29/407 , H01L29/4236 , H01L29/4238 , H01L29/456 , H01L29/4933 , H01L29/66727 , H01L29/66734 , H01L29/7811
摘要： A semiconductor substrate may be etched to form trenches with three different widths. A first conductive material is formed at the bottom of the trenches. A second conductive material separated by an insulator is formed over the first conductive material. A first insulator layer is formed on the trenches. A body layer is formed in the substrate. A source is formed in the body layer. A second insulator layer is formed on the trenches and source. Source and gate contacts are formed through the second insulator layer. Source and gate metal are formed on the second insulator layer. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
摘要翻译：可以蚀刻半导体衬底以形成具有三个不同宽度的沟槽。第一导电材料形成在沟槽的底部。在第一导电材料上方形成由绝缘体隔开的第二导电材料。在沟槽上形成第一绝缘体层。在衬底中形成体层。源体形成在体层中。在沟槽和源极上形成第二绝缘体层。源极和栅极触点通过第二绝缘体层形成。源极和栅极金属形成在第二绝缘体层上。提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

45. 发明申请

US20120205737A1 SHIELDED GATE TRENCH MOSFET DEVICE AND FABRICATION 有权
标题翻译： SHIELDED GATE TRENCH MOSFET器件和制造
公开(公告)号：US20120205737A1
公开(公告)日：2012-08-16
申请号：US13456406
申请日：2012-04-26
申请人： John Chen , Il Kwan Lee , Hong Chang , Wenjun Li , Anup Bhalla , Hamza Yilmaz
发明人： John Chen , Il Kwan Lee , Hong Chang , Wenjun Li , Anup Bhalla , Hamza Yilmaz
IPC分类号： H01L29/78
CPC分类号： H01L29/7813 , H01L29/407 , H01L29/41766 , H01L29/42368 , H01L29/42372 , H01L29/4238 , H01L29/66719 , H01L29/66727 , H01L29/66734 , H01L29/7811
摘要： A semiconductor device includes a substrate, an active gate trench in the substrate, the active gate trench has a first top gate electrode and a first bottom source electrode, and a gate runner trench comprising a second top gate electrode and a second bottom source electrode. The second top gate electrode is narrower than the second bottom source electrode.
摘要翻译：半导体器件包括衬底，衬底中的有源栅极沟槽，有源栅极沟槽具有第一顶部栅电极和第一底部源极电极以及包括第二顶部栅电极和第二底部源极电极的栅极流道沟槽。第二顶栅电极比第二底源电极窄。

46. 发明授权

US08193580B2 Shielded gate trench MOSFET device and fabrication 有权
标题翻译：屏蔽栅沟槽MOSFET器件和制造
公开(公告)号：US08193580B2
公开(公告)日：2012-06-05
申请号：US12583191
申请日：2009-08-14
申请人： John Chen , Il Kwan Lee , Hong Chang , Wenjun Li , Anup Bhalla , Hamza Yilmaz
发明人： John Chen , Il Kwan Lee , Hong Chang , Wenjun Li , Anup Bhalla , Hamza Yilmaz
IPC分类号： H01L29/78
CPC分类号： H01L29/7813 , H01L29/407 , H01L29/41766 , H01L29/42368 , H01L29/42372 , H01L29/4238 , H01L29/66719 , H01L29/66727 , H01L29/66734 , H01L29/7811
摘要： A semiconductor device embodiment includes a substrate, an active gate trench in the substrate, and an asymmetric trench in the substrate. The asymmetric trench has a first trench wall and a second trench wall, the first trench wall is lined with oxide having a first thickness, and the second trench wall is lined with oxide having a second thickness that is different from the first thickness. Another semiconductor device embodiment includes a substrate, an active gate trench in the substrate; and a source polysilicon pickup trench in the substrate. The source polysilicon pickup trench includes a polysilicon electrode, and top surface of the polysilicon electrode is below a bottom of a body region. Another semiconductor device includes a substrate, an active gate trench in the substrate, the active gate trench has a first top gate electrode and a first bottom source electrode, and a gate runner trench comprising a second top gate electrode and a second bottom source electrode. The second top gate electrode is narrower than the second bottom source electrode.
摘要翻译：半导体器件实施例包括衬底，衬底中的有源栅极沟槽和衬底中的不对称沟槽。非对称沟槽具有第一沟槽壁和第二沟槽壁，第一沟槽壁衬有具有第一厚度的氧化物，并且第二沟槽壁衬有具有不同于第一厚度的第二厚度的氧化物。另一半导体器件实施例包括衬底，衬底中的有源栅极沟槽; 以及衬底中的源极多晶硅拾取沟槽。源多晶硅拾取沟槽包括多晶硅电极，并且多晶硅电极的顶表面在身体区域的底部之下。另一个半导体器件包括衬底，衬底中的有源栅极沟槽，有源栅极沟槽具有第一顶部栅电极和第一底部源极电极，以及包括第二顶部栅电极和第二底部源极电极的栅极流道沟槽。第二顶栅电极比第二底源电极窄。

47. 发明申请

US20110039383A1 Shielded gate trench MOSFET device and fabrication 有权
标题翻译：屏蔽栅沟槽MOSFET器件和制造
公开(公告)号：US20110039383A1
公开(公告)日：2011-02-17
申请号：US12583192
申请日：2009-08-14
申请人： John Chen , Il Kwan Lee , Hong Chang , Wenjun Li , Anup Bhalla , Hamza Yilmaz
发明人： John Chen , Il Kwan Lee , Hong Chang , Wenjun Li , Anup Bhalla , Hamza Yilmaz
IPC分类号： H01L21/8234
CPC分类号： H01L29/7811 , H01L21/26586 , H01L29/1095 , H01L29/407 , H01L29/41741 , H01L29/41766 , H01L29/4236 , H01L29/42372 , H01L29/4238 , H01L29/456 , H01L29/4933 , H01L29/66719 , H01L29/66727 , H01L29/66734 , H01L29/7813
摘要： A method for fabricating a semiconductor device includes forming a plurality of trenches, including applying a first mask, forming a first polysilicon region in at least some of the plurality of trenches, forming a inter-polysilicon dielectric region and a termination protection region, including applying a second mask, forming a second polysilicon region in the at least some of the plurality of trenches, forming a first electrical contact to the first polysilicon region and forming a second electrical contact to the second polysilicon region, including applying a third mask, disposing a metal layer, and forming a source metal region and a gate metal region, including applying a fourth mask.
摘要翻译：一种制造半导体器件的方法包括形成多个沟槽，包括施加第一掩模，在多个沟槽中的至少一些沟槽中形成第一多晶硅区域，形成多晶硅间介质区域和端接保护区域，包括施加第二掩模，在所述多个沟槽中的所述至少一些沟槽中形成第二多晶硅区域，形成到所述第一多晶硅区域的第一电接触并且形成到所述第二多晶硅区域的第二电接触，包括施加第三掩模，金属层，并且形成源极金属区域和栅极金属区域，包括施加第四掩模。

48. 发明申请

US20110140167A1 Nanotube Semiconductor Devices 有权
标题翻译：纳米管半导体器件
公开(公告)号：US20110140167A1
公开(公告)日：2011-06-16
申请号：US13024256
申请日：2011-02-09
申请人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
发明人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
IPC分类号： H01L29/739 , H01L21/331
CPC分类号： H01L29/0665 , B82Y10/00 , H01L29/0692 , H01L29/1095 , H01L29/6609 , H01L29/66143 , H01L29/66348 , H01L29/66666 , H01L29/7397 , H01L29/861 , H01L29/872
摘要： A method for forming a semiconductor device includes forming a nanotube region using a thin epitaxial layer formed on the sidewall of a trench in the semiconductor body. The thin epitaxial layer has uniform doping concentration. In another embodiment, a first thin epitaxial layer of the same conductivity type as the semiconductor body is formed on the sidewall of a trench in the semiconductor body and a second thin epitaxial layer of the opposite conductivity type is formed on the first epitaxial layer. The first and second epitaxial layers have uniform doping concentration. The thickness and doping concentrations of the first and second epitaxial layers and the semiconductor body are selected to achieve charge balance. In one embodiment, the semiconductor body is a lightly doped P-type substrate. A vertical trench MOSFET, an IGBT, a Schottky diode and a P-N junction diode can be formed using the same N-Epi/P-Epi nanotube structure.
摘要翻译：形成半导体器件的方法包括：使用形成在半导体本体中的沟槽的侧壁上的薄外延层来形成纳米管区域。薄的外延层具有均匀的掺杂浓度。在另一个实施例中，在半导体主体中的沟槽的侧壁上形成与半导体本体相同的导电类型的第一薄外延层，并且在第一外延层上形成相反导电类型的第二薄外延层。第一和第二外延层具有均匀的掺杂浓度。选择第一和第二外延层和半导体本体的厚度和掺杂浓度以实现电荷平衡。在一个实施例中，半导体本体是轻掺杂的P型衬底。可以使用相同的N-Epi / P-Epi纳米管结构形成垂直沟槽MOSFET，IGBT，肖特基二极管和P-N结二极管。

49. 发明申请

US20110068386A1 DIRECT CONTACT IN TRENCH WITH THREE-MASK SHIELD GATE PROCESS 有权
标题翻译：直接与三层屏蔽门过程接触
公开(公告)号：US20110068386A1
公开(公告)日：2011-03-24
申请号：US12565611
申请日：2009-09-23
申请人： Sung-Shan Tai , Hamza Yilmaz , Anup Bhalla , Hong Chang , John Chen
发明人： Sung-Shan Tai , Hamza Yilmaz , Anup Bhalla , Hong Chang , John Chen
IPC分类号： H01L29/78 , H01L21/336
CPC分类号： H01L29/7813 , H01L21/26586 , H01L29/0869 , H01L29/407 , H01L29/4236 , H01L29/4238 , H01L29/456 , H01L29/4933 , H01L29/66727 , H01L29/66734 , H01L29/7811
摘要： A semiconductor device and a method for making a semiconductor device are disclosed. A trench mask may be applied to a semiconductor substrate, which is etched to form trenches with three different widths. A first conductive material is formed at the bottom of the trenches. A second conductive material is formed over the first conductive material. An insulator layer separates the first and second conductive materials. A first insulator layer is deposited on top of the trenches. A body layer is formed in a top portion of the substrate. A source is formed in the body layer. A second insulator layer is applied on top of the trenches and the source. A contact mask is applied on top of the second insulator layer. Source and gate contacts are formed through the second insulator layer. Source and gate metal are formed on top of the second insulator layer.
摘要翻译：公开了半导体器件和制造半导体器件的方法。可以将沟槽掩模施加到半导体衬底，其被蚀刻以形成具有三个不同宽度的沟槽。第一导电材料形成在沟槽的底部。在第一导电材料上形成第二导电材料。绝缘体层分离第一和第二导电材料。第一绝缘体层沉积在沟槽的顶部。主体层形成在基板的顶部。源体形成在体层中。第二绝缘体层被施加在沟槽和源的顶部上。接触掩模施加在第二绝缘体层的顶部。源极和栅极触点通过第二绝缘体层形成。源极和栅极金属形成在第二绝缘体层的顶部上。

50. 发明授权

US08299494B2 Nanotube semiconductor devices 有权
标题翻译：纳米管半导体器件
公开(公告)号：US08299494B2
公开(公告)日：2012-10-30
申请号：US12484170
申请日：2009-06-12
申请人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
发明人： Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
IPC分类号： H01L29/74 , H01L31/111 , H01L29/76 , H01L29/94 , H01L31/062
CPC分类号： H01L29/0886 , H01L21/26586 , H01L27/0623 , H01L27/0629 , H01L27/0664 , H01L29/0615 , H01L29/0619 , H01L29/063 , H01L29/0634 , H01L29/0638 , H01L29/0649 , H01L29/0653 , H01L29/0676 , H01L29/0688 , H01L29/0692 , H01L29/0696 , H01L29/0865 , H01L29/0878 , H01L29/0882 , H01L29/1095 , H01L29/36 , H01L29/365 , H01L29/402 , H01L29/404 , H01L29/41741 , H01L29/41775 , H01L29/4236 , H01L29/42368 , H01L29/66136 , H01L29/66143 , H01L29/66348 , H01L29/66734 , H01L29/7395 , H01L29/7397 , H01L29/7803 , H01L29/7806 , H01L29/7811 , H01L29/7813 , H01L29/7827 , H01L29/861 , H01L29/8613 , H01L29/872 , H01L29/8725
摘要： A semiconductor device includes a first semiconductor layer and a second semiconductor layer of opposite conductivity type, a first epitaxial layer of the first conductivity type formed on sidewalls of the trenches, and a second epitaxial layer of the second conductivity type formed on the first epitaxial layer where the second epitaxial layer is electrically connected to the second semiconductor layer. The first epitaxial layer and the second epitaxial layer form parallel doped regions along the sidewalls of the trenches, each having uniform doping concentration. The second epitaxial layer has a first thickness and a first doping concentration and the first epitaxial layer and a mesa of the first semiconductor layer together having a second thickness and a second average doping concentration where the first and second thicknesses and the first doping concentration and second average doping concentrations are selected to achieve charge balance in operation.
摘要翻译：半导体器件包括第一半导体层和相反导电类型的第二半导体层，形成在沟槽的侧壁上的第一导电类型的第一外延层和形成在第一外延层上的第二导电类型的第二外延层其中第二外延层电连接到第二半导体层。第一外延层和第二外延层沿着沟槽的侧壁形成平行的掺杂区域，每个具有均匀的掺杂浓度。第二外延层具有第一厚度和第一掺杂浓度，第一外延层和第一半导体层的台面一起具有第二厚度和第二平均掺杂浓度，其中第一和第二厚度和第一掺杂浓度和第二掺杂浓度选择平均掺杂浓度以在操作中实现电荷平衡。

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