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    • 41. 发明授权
    • Method and apparatus for inspecting an object using terahertz electromagnetic wave
    • 使用太赫兹电磁波检查物体的方法和装置
    • US07782067B2
    • 2010-08-24
    • US12385557
    • 2009-04-13
    • Toshihiko OuchiShintaro Kasai
    • Toshihiko OuchiShintaro Kasai
    • G01R27/04G01R31/302
    • G01N21/3581
    • An inspection apparatus including a transmission line for propagating an electromagnetic wave; an electromagnetic wave supply unit for supplying a terahertz wave to the transmission line; an electromagnetic wave detection unit for detecting the terahertz wave from the transmission line; a conductive region; an inspection object supply unit; and a deposition unit. The conductive region is arranged at a site including at least a part of the range to which an electric field distribution of the electromagnetic wave propagating through the transmission line extends. The inspection object supply unit holds and supplies the inspection object to the outside, and the deposition unit deposits the inspection object selectively on the conductive region by electrostatic force. The electromagnetic wave supplied from the electromagnetic wave supply unit and propagated through the transmission line is detected by the electromagnetic wave detection unit to obtain information on the inspection object.
    • 一种检测装置,包括用于传播电磁波的传输线; 用于向传输线提供太赫兹波的电磁波提供单元; 用于检测来自传输线的太赫兹波的电磁波检测单元; 导电区域; 检验对象供应单元; 和沉积单元。 导电区域布置在包括通过传输线传播的电磁波的电场分布延伸的范围的至少一部分的位置处。 检查对象供给单元将检查对象保持并供给到外部,并且沉积单元通过静电力选择性地将检查对象沉积在导电区域上。 由电磁波提供单元提供并通过传输线传播的电磁波由电磁波检测单元检测,以获得关于检查对象的信息。
    • 43. 发明申请
    • INFORMATION ACQUISITION APPARATUS AND INFORMATION ACQUISITION METHOD USING TERAHERTZ WAVE FOR ACQUIRING INFORMATION ON OBJECT
    • 信息采集设备和信息采集方法使用TERAHERTZ WAVE获取对象信息
    • US20100148069A1
    • 2010-06-17
    • US12090446
    • 2007-12-12
    • Toshihiko Ouchi
    • Toshihiko Ouchi
    • G01N21/35
    • G01N21/4795G01N21/3563G01N21/3586
    • An information acquisition apparatus includes a pulse generator 9, a detector 10, a first delay unit 15, a second delay unit 16 and a computation unit. The pulse generator 9 is excited by a first laser beam to generate a terahertz wave in the form of a pulse. The detector 10 is excited by a second laser beam coherent to the first laser beam to detect the terahertz wave from object 2 that is irradiated with the pulse of the terahertz wave. The first delay unit 15 changes the delay time in such a way that the detector 10 can detect the pulse signal of the terahertz wave from the object 2. The second delay unit 16 changes the delay time by not greater than the temporal width of the pulse signal detected by the detector 10. The computation unit computationally determines the information on the temporal position of the peak of the pulse signal of the terahertz wave from the object 2 according to the information of the signal detected by the detector 10 when the delay time is changed by the second delay unit within the delay time of the first delay unit.
    • 信息获取装置包括脉冲发生器9,检测器10,第一延迟单元15,第二延迟单元16和计算单元。 脉冲发生器9被第一激光束激发以产生脉冲形式的太赫兹波。 检测器10由与第一激光束相干的第二激光束激发,以检测来自对象2的太赫兹波,其被照射太赫兹波的脉冲。 第一延迟单元15改变延迟时间,使得检测器10可以从对象2检测太赫兹波的脉冲信号。第二延迟单元16将延迟时间改变不大于脉冲的时间宽度 信号。计算单元根据由检测器10检测到的信号的信息,当延迟时间为(10))时,根据由检测器10检测的信号的信息,计算地确定关于来自对象2的太赫兹波的脉冲信号的峰值的时间位置的信息 在第一延迟单元的延迟时间内由第二延迟单元改变。
    • 44. 发明申请
    • Photoconductive Element and Sensor Device
    • 光电元件和传感器设备
    • US20100051811A1
    • 2010-03-04
    • US12612798
    • 2009-11-05
    • Toshihiko Ouchi
    • Toshihiko Ouchi
    • G01J5/00
    • G01J3/42G01N21/3581H01S1/02
    • There is provided a photoconductive element capable of generating and detecting broadband electromagnetic waves such as terahertz waves at a comparatively high efficiency by decreasing or avoiding the absorption of electromagnetic waves into a substrate. A photoconductive element 1 includes a photoconductive film 5 exhibiting conductivity by the radiation of light, a substrate 6 holding the photoconductive film and a thin film sandwiched between the photoconductive film 5 and the substrate 6, the thin film being different in composition from the photoconductive film 5 and the substrate 6. The photoconductive film 5 is provided with an antenna 7 having a gap portion 2 and an electrode 4 electrically connectable to the antenna 7. At least a part of the photoconductive film where the gap portion 2 of the antenna 7 is located is single crystal. The substrate 6 has an opening portion 3 at a part corresponding to a part of the photoconductive film 5 where the gap portion 2 of the antenna 7 is located.
    • 提供了一种光电元件,其能够通过减少或避免电磁波吸收到衬底中,以相当高的效率产生和检测诸如太赫兹波的宽带电磁波。 光电导元件1包括通过照射光而显示导电性的光电导膜5,保持光电导膜的基板6和夹在光电导膜5和基板6之间的薄膜,该薄膜的组成与光导膜不同 光电导膜5设置有具有间隙部分2的天线7和可与天线7电连接的电极4.至少一部分天线7的间隙部分2的光电导膜是 位于单晶。 基板6在对应于天线7的间隙部分2所在的光电导膜5的一部分的部分处具有开口部分3。
    • 48. 发明申请
    • Method and apparatus for inspecting an object using terahertz electromagnetic wave
    • 使用太赫兹电磁波检查物体的方法和装置
    • US20090201030A1
    • 2009-08-13
    • US12385557
    • 2009-04-13
    • Toshihiko OuchiShintaro Kasai
    • Toshihiko OuchiShintaro Kasai
    • G01R27/04
    • G01N21/3581
    • An inspection apparatus including a transmission line for propagating an electromagnetic wave; an electromagnetic wave supply unit for supplying a terahertz wave to the transmission line; an electromagnetic wave detection unit for detecting the terahertz wave from the transmission line; a conductive region; an inspection object supply unit; and a deposition unit. The conductive region is arranged at a site including at least a part of the range to which an electric field distribution of the electromagnetic wave propagating through the transmission line extends. The inspection object supply unit holds and supplies the inspection object to the outside, and the deposition unit deposits the inspection object selectively on the conductive region by electrostatic force. The electromagnetic wave supplied from the electromagnetic wave supply unit and propagated through the transmission line is detected by the electromagnetic wave detection unit to obtain information on the inspection object.
    • 一种检测装置,包括用于传播电磁波的传输线; 用于向传输线提供太赫兹波的电磁波提供单元; 用于检测来自传输线的太赫兹波的电磁波检测单元; 导电区域; 检验对象供应单元; 和沉积单元。 导电区域布置在包括通过传输线传播的电磁波的电场分布延伸的范围的至少一部分的位置处。 检查对象供给单元将检查对象保持并供给到外部,并且沉积单元通过静电力选择性地将检查对象沉积在导电区域上。 由电磁波提供单元提供并通过传输线传播的电磁波由电磁波检测单元检测,以获得关于检查对象的信息。
    • 49. 发明申请
    • INFORMATION ACQUIRING APPARATUS, AND INFORMATION ACQUIRING METHOD
    • 信息获取装置和信息获取方法
    • US20090198466A1
    • 2009-08-06
    • US12364422
    • 2009-02-02
    • Kousuke KajikiToshihiko Ouchi
    • Kousuke KajikiToshihiko Ouchi
    • G06F19/00G01J3/00
    • G01J3/42G01N21/3563G01N21/3586G01N21/85
    • An information acquiring apparatus includes a light source portion for generating pulse-shaped pump light, and first and second probe light in synchronization with each other. A generating portion generates terahertz pulses when irradiated with the pump light. A detecting portion detects pulses of terahertz radiation from the object. A first delay portion adjusts an optical path difference between optical paths of the pump light and the first probe light reaching the detecting portion, so that the detecting portion detects a field intensity of a fixed point on the time domain waveform of the terahertz pulse from the object, following the fixed point. A second delay portion adjusts an optical path difference between the optical path of the pump light and the second probe light reaching the detecting portion by a sum of an additional optical path adjustment amount and the optical path difference, so that the detecting portion obtains the time domain waveform. A correction processing portion compensates for influence of a change in condition of the object on the time domain waveform, using the field intensity of the fixed point, or the adjustment amount adjusted by the first delay portion.
    • 信息获取装置包括用于产生脉冲形泵浦光的光源部分和彼此同步的第一和第二探测光。 当用泵浦光照射时,产生部分产生太赫兹脉冲。 检测部分检测来自物体的太赫兹辐射的脉冲。 第一延迟部分调节泵浦光的光路和到达检测部分的第一探测光之间的光程差,使得检测部分检测从太赫兹脉冲的时域波形上的固定点的场强 对象,遵循固定点。 第二延迟部分通过附加光程调整量与光程差之和调整泵浦光的光路与到达检测部的第二探测光之间的光程差,使得检测部获得时间 域波形。 校正处理部分使用固定点的场强或由第一延迟部分调整的调整量来补偿对象的状态变化对时域波形的影响。