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41. 发明授权

US09266039B2 Cryopump with controlled hydrogen gas release 有权
标题翻译：冷冻水控制氢气释放
公开(公告)号：US09266039B2
公开(公告)日：2016-02-23
申请号：US13988497
申请日：2011-11-23
申请人： Michael J. Eacobacci, Jr. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
发明人： Michael J. Eacobacci, Jr. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
IPC分类号： B60H1/00 , B01D8/00 , F04B37/08 , F04B37/14
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内，在再次达到完全负载的低温泵的第二冷却阶段变暖。

42. 发明申请

US20140130527A1 Helium Management Control System 审中-公开
标题翻译：氦管理控制系统
公开(公告)号：US20140130527A1
公开(公告)日：2014-05-15
申请号：US14001803
申请日：2012-03-05
申请人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, JR. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
发明人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, JR. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
IPC分类号： F25B49/02
CPC分类号： F25B49/022 , A01N63/02 , G01N33/5085
摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.
摘要翻译：制冷剂管理系统控制从两个或多个可变速度和固定速度的压缩机向多个低温冰箱供应制冷剂。该系统采用多个传感器来监测和调节整个制冷剂供应，以向每个低温冰箱输送适当的制冷剂供应。供应的制冷剂量是基于来自多个低温冰箱的制冷剂的总需求和制冷剂校正度量。通过调节可变速度压缩机的速度或者选择性地使压缩机打开或关闭来分配适当的制冷剂供应给每个低温冰箱。通过确定向多个低温冰箱供应的制冷剂的量来调节变速压缩机的速度。如果对制冷剂的总需求超过压缩机的容量，则调节多个冰箱内的冰箱的速度。

43. 发明申请

US20080282710A1 Integral facet cryopump, water vapor pump, or high vacuum pump 有权
标题翻译：积分小面积低温泵，水蒸气泵或高真空泵
公开(公告)号：US20080282710A1
公开(公告)日：2008-11-20
申请号：US11803420
申请日：2007-05-15
申请人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, JR.
发明人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, JR.
IPC分类号： F04B37/08
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

44. 发明授权

US6155059A High capacity cryopump 失效
标题翻译：高容量低温泵
公开(公告)号：US6155059A
公开(公告)日：2000-12-05
申请号：US229721
申请日：1999-01-13
申请人： Stephen R. Matte , Allen J. Bartlett
发明人： Stephen R. Matte , Allen J. Bartlett
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08
摘要： A cryopump including a radiation shield having an interior surrounded by at least one wall. The radiation shield has an opening through which gases are cryopumped into the interior. A frontal cryopanel array is positioned near the opening for condensing high boiling point gases. The radiation shield and frontal cryopanel array are cooled to a first temperature. First primary cryopanel surfaces extend near the wall within the interior of the radiation shield and are cooled to a second temperature below the first temperature for condensing low boiling point gases near the wall while leaving a central gas flow pathway from the opening past the first primary cryopanel surfaces. Second primary cryopanel surfaces cooled to about the second temperature are positioned within the interior of the radiation shield and include adsorbent for adsorbing very low boiling point gases. The first primary cryopanel surfaces limit the amount of low boiling point gases condensing on the second primary cryopanel surfaces while leaving open the central gas flow pathway to the second primary cryopanel surfaces.
摘要翻译：一种低温泵，其包括具有由至少一个壁围绕的内部的辐射屏蔽。辐射屏蔽有一个开口，气体通过该开口被低温泵入内部。前端冷冻板阵列位于开口附近，用于冷凝高沸点气体。将辐射屏蔽和正面低温板阵列冷却至第一温度。第一个初级低温板表面在辐射屏蔽内部的壁附近延伸，并被冷却到低于第一温度的第二温度，用于冷凝壁附近的低沸点气体，同时留下从第一主冷冻板开口的中心气体流动路径表面。冷却至约第二温度的第二主要冷冻板表面位于辐射屏蔽的内部，并且包括用于吸附极低沸点气体的吸附剂。第一个初级冷冻板表面限制了冷凝在第二个初级冷冻盘表面上的低沸点气体的量，同时使中心气体流动通道打开到第二个主要低温板表面。

45. 发明授权

US5906102A Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve 失效
标题翻译：带燃气加热排气阀的冷冻库和排气阀表面加热方法
公开(公告)号：US5906102A
公开(公告)日：1999-05-25
申请号：US631532
申请日：1996-04-12
申请人： Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
发明人： Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08
摘要： A cryopump having a cryopump chamber includes a purge gas valve coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve couples the cryopump chamber to a roughing pump enabling the cryopump chamber to be roughed. An exhaust valve is coupled to the cryopump chamber for exhausting gases from the cryopump chamber during purge. A delivery valve is coupled to the exhaust valve for delivering a second quantity of warm gas directly onto surfaces of the exhaust valve for warming the surfaces of the exhaust valve.
摘要翻译：具有低温泵室的低温泵包括连接到低温泵室的吹扫气阀，用于向低温泵室提供第一量的暖气，以便在再生期间吹扫低温泵室。粗抽阀将低温泵室耦合到粗抽泵，使得低温泵室能够被粗糙化。排气阀连接到低温泵室，以在吹扫期间从低温泵室排出气体。输送阀联接到排气阀，用于将第二数量的暖气直接输送到排气门的表面上，以加热排气阀的表面。

46. 发明授权

US5301511A Cryopump and cryopanel having frost concentrating device 失效
标题翻译：冷冻和冷冻板具有霜冻浓缩装置
公开(公告)号：US5301511A
公开(公告)日：1994-04-12
申请号：US898080
申请日：1992-06-12
申请人： Allen J. Bartlett , Charles A. Stochl , Anthony M. Guerra , Dale A. Dopson , Paul Meroski , Thomas F. Stevens
发明人： Allen J. Bartlett , Charles A. Stochl , Anthony M. Guerra , Dale A. Dopson , Paul Meroski , Thomas F. Stevens
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： In a cryopump a frost concentrating device is affixed to a condensing cryopanel and provides surfaces for condensing gases which are cryopumped through an opening in the vacuum vessel. The surfaces of the frost concentrator extend towards the opening in the vacuum vessel and thus limit the amount of gases which condense on the surfaces of the condensing cryopanel facing the opening. The result is that the gap between the radiation shield and the condensing cryopanel does not become significantly narrowed by condensing gases, particularly in the area closest to the opening through which gases are cryopumped. This allows other gases to pass easily through the gap and condense on surfaces of the condensing cryopanel further away from the opening of the cryopump or to be adsorbed by an adsorbent material shielded by the condensing cryopanel.
摘要翻译：在低温泵中，将冷凝浓缩装置固定在冷凝冷冻板上，并提供冷凝通过真空容器中的开口低温的气体的表面。霜浓缩器的表面朝向真空容器中的开口延伸，因此限制冷凝在面向开口的冷凝冷冻板的表面上的气体的量。结果是，辐射屏蔽和冷凝冷冻板之间的间隙不会由于冷凝气体而变得明显变窄，特别是在最接近气体被低温泵入口的区域内。这允许其它气体容易地通过间隙并冷凝在冷凝冷冻板的远离冷冻泵的开口的表面上，或被被冷凝冷冻板屏蔽的吸附材料吸附。

47. 发明授权

US4679401A Temperature control of cryogenic systems 失效
标题翻译：低温系统的温度控制
公开(公告)号：US4679401A
公开(公告)日：1987-07-14
申请号：US752354
申请日：1985-07-03
申请人： Philip A. Lessard , Allen J. Bartlett , John F. Peterson
发明人： Philip A. Lessard , Allen J. Bartlett , John F. Peterson
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： B01D8/00 , F04B37/08 , Y10S417/901
摘要： To control the temperature of one or more heat sinks of a cryogenic refrigerator in a cryopump, refrigerant gas to the refrigerator is diverted through heat exchangers associated with the refrigerator heat sinks. The diverted refrigerant gas may be used to maintain the temperature of the first stage cryopumping surfaces above some level to avoid cross over hangup. The second stage cryopumping surfaces may be warmed by the diverted refrigerant to some temperature level for partial regeneration. Both heat sinks may be warmed for full regeneration of the cryopump. Bleed flow of refrigerant gas cooled by the first stage of the refrigerator can be directed past a thermal mass to cool that mass. By reversing the flow of refrigerant gas during cooldown of the system, the thermal mass can be used to more rapidly cool the refrigerator. The thermal mass is thermally isolated from the refrigerator heat sinks and is positioned within the vacuum vessel of the cryopump adjacent to the first stage of the refrigerator.
摘要翻译：为了控制低温泵中的低温冰箱的一个或多个散热器的温度，通向与冰箱散热器相关联的热交换器将制冷剂气体输送到冰箱。转向的制冷剂气体可用于将第一级低温泵的表面的温度保持在一定程度上，以避免交叉悬挂。可将第二级低温泵送表面由转向制冷剂加热到一定温度以进行部分再生。这两个散热片可能会被加热，以便低温泵完全再生。由冰箱的第一级冷却的制冷剂气体的流出可以被引导通过热质量以冷却该质量。通过在系统的冷却期间逆转制冷剂气体的流动，可以使用热质量来更快速地冷却冰箱。热物质与冰箱散热器热隔离，并且位于与冰箱的第一级相邻的低温泵的真空容器内。

48. 发明授权

US4555907A Cryopump with improved second stage array 失效
标题翻译：具有改进的第二级阵列的低温贮罐
公开(公告)号：US4555907A
公开(公告)日：1985-12-03
申请号：US611689
申请日：1984-05-18
申请人： Allen J. Bartlett
发明人： Allen J. Bartlett
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： A second stage cryopanel array suitable for both concentric refrigerators and side entry cryopumps is formed of two groups of semi-circular baffles mounted to respective L-shaped brackets. The array sections can be independently positioned about a second stage of a refrigerator.
摘要翻译：适用于同心式冰箱和侧进入低温泵的第二级冷冻板阵列由安装在相应的L形支架上的两组半圆形挡板形成。阵列部分可以独立地定位在冰箱的第二级周围。

49. 发明授权

US4454722A Cryopump 失效
标题翻译：冷冻者
公开(公告)号：US4454722A
公开(公告)日：1984-06-19
申请号：US437560
申请日：1982-10-29
申请人： Allen J. Bartlett , Robert M. Lewis
发明人： Allen J. Bartlett , Robert M. Lewis
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： For a given temperature differential between a refrigerated heat sink (28) and frontal cryopanel array (46), the mass of the entire cryopump array is minimized by providing thermal struts (54) between the heat sink and the frontal array. The thermal struts extend through, but are isolated from, the primary pumping surface to minimize their lengths. The struts support the frontal array independent of the side radiation shield to facilitate fabrication. To further reduce the temperature differential to the frontal array, heat pipes may be provided. Parallel heat pipes or solid thermal struts may provide the thermal path during cooldown of the system. By reducing the temperature differential between the frontal cryopanel array (46) and refrigerated heat sink (28) through the use of solid thermal struts or heat pipes the load carrying capability of a cryopump can be improved.
摘要翻译：对于冷藏散热器（28）和正面冷冻板阵列（46）之间的给定温度差，通过在散热器和正面阵列之间提供热支柱（54）来使整个低温泵阵列的质量最小化。热支柱延伸穿过主要泵送表面，但是与主泵送表面隔离，以使其长度最小化。支撑支撑独立于侧面辐射屏蔽的正面阵列以促进制造。为了进一步降低到正面阵列的温差，可以提供热管。平行的热管或固体热支柱可以在系统冷却时提供热路径。通过使用固体热支柱或热管减少正面冷冻板阵列（46）和冷藏散热器（28）之间的温差，可以提高低温泵的承载能力。

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