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41. 发明授权

US06344860B1 Methods and apparatus for a stereoscopic graphic user interface 失效
标题翻译：用于立体图形用户界面的方法和装置
公开(公告)号：US06344860B1
公开(公告)日：2002-02-05
申请号：US09200802
申请日：1998-11-27
申请人： Michael P. C. Watts
发明人： Michael P. C. Watts
IPC分类号： G06F314
CPC分类号： G06F3/0481 , H04N13/275 , H04N13/286
摘要： A stereo graphic user interface (GUI) includes stereo pairs of conventional GUI interface objects, such as a cursor, menu bars, buttons, and so on. In one implementation, a slave component is located on the same display screen as, and at a fixed displacement from, a master component. Any changes to the master component are tracked and made to the slave component so as to form and maintain stereo pairs of components. The stereo GUI may be configured to support multiple viewers, and a user may employ the stereo GUI not only to view stereo pairs of graphical objects but also to manipulate them.
摘要翻译：立体图形用户界面（GUI）包括诸如光标，菜单栏，按钮等的常规GUI界面对象的立体对。在一个实现中，从属部件位于与主部件相同的显示屏幕上，并且与主部件处于固定位移。跟踪主部件的任何变化，并对从属部件进行修改，以形成和维护立体声组件对。立体图形图形用户界面可以被配置为支持多个观看者，并且用户可以使用立体图形用户界面GUI不仅可以查看图形对象的立体对，而且可以操纵它们。

42. 发明授权

US5966212A High-speed, high-resolution, large area inspection using multiple optical fourier transform cells 失效
标题翻译：高速，高分辨率，大面积检测使用多个光学傅立叶变换单元
公开(公告)号：US5966212A
公开(公告)日：1999-10-12
申请号：US683790
申请日：1996-07-18
申请人： Lawrence Hendler , Michael P. C. Watts , Richard A. Portune
发明人： Lawrence Hendler , Michael P. C. Watts , Richard A. Portune
IPC分类号： G01N21/956 , G01N21/88
CPC分类号： G01N21/95623
摘要： A system includes multiple optical Fourier transform cells which simultaneously scan a device under test. The illuminated area for each Fourier transform cell is small to provide high resolution, while the number of cells is large to cover a relatively wide area and keep inspection speed high. The advantages of optical computing performed by Fourier transform optics also keeps the inspection speed high because illuminated areas are large when compared to the resolution and Fourier transforms are linear shift invariant so that optical measurements can be performed during scanning. In one embodiment, Fourier transform cells are offset from each other perpendicular to the scan direction by less that the width of an illuminated area. This provides complete coverage during scanning of a device under test. Because the illumination for the Fourier transform is collimated, the system is insensitive to focusing errors due to fluctuations in working distance.
摘要翻译：系统包括同时扫描被测器件的多个光学傅里叶变换单元。每个傅立叶变换单元的照明面积小，以提供高分辨率，而单元数量大，以覆盖相对较宽的面积并保持检测速度高。傅里叶变换光学执行的光学计算的优点还使检测速度保持较高，因为与分辨率相比，照明区域较大，而傅里叶变换是线性移位不变的，从而可以在扫描过程中进行光学测量。在一个实施例中，傅立叶变换单元相对于扫描方向彼此偏离照明区域的宽度。这在扫描被测设备期间提供完整的覆盖。因为傅立叶变换的照明是准直的，所以系统对由于工作距离的波动引起的聚焦误差不敏感。

43. 发明授权

US5656942A Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane 失效
标题翻译：具有用于集成电路的晶片的接触界面的探测器和测试仪保持在垂直平面中
公开(公告)号：US5656942A
公开(公告)日：1997-08-12
申请号：US505419
申请日：1995-07-21
申请人： Michael P. C. Watts , Lawrence Hendler
发明人： Michael P. C. Watts , Lawrence Hendler
IPC分类号： G01R1/06 , G01R1/067 , G01R31/28 , H01L21/66 , G01R31/02
CPC分类号： G01R1/06705 , G01R31/2887
摘要： A tester for testing integrated circuits-containing semiconductor wafers or substrates, includes a vertically oriented performance board with. D/A converters mounted and pin connected immediately therebehind. A prober including a vertical array of connector pins mounts a vertical probe card and a vertically-mounted chuck on which a vertically-oriented wafer or substrate is held. One of the tester and prober are moved with respect to the other to dock and latch the tester and prober together. Simultaneously the array of connector pins is electrically connected to electrical connectors on the performance board and probe needles extending from a probe board on the probes are placed into test contact with contact pads on the integrated circuits on the wafer or substrate.
摘要翻译：用于测试含有集成电路的半导体晶片或基板的测试器包括垂直取向的性能板。 D / A转换器安装和引脚立即连接。包括垂直阵列的连接器引脚的探测器安装垂直探针卡和垂直安装的卡盘，其上保持垂直取向的晶片或基底。测试者和探测器之一相对于另一个移动，将测试仪和探测器锁定并锁定在一起。同时，连接器引脚的阵列电连接到性能板上的电连接器，并且从探针上的探针板延伸的探针被放置成与晶片或衬底上的集成电路上的接触焊盘进行测试接触。

44. 发明授权

US5506676A Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components 失效
标题翻译：使用傅立叶光学器件的缺陷检测和用于分离的傅里叶变换部件的同时光学计算的空间分离器
公开(公告)号：US5506676A
公开(公告)日：1996-04-09
申请号：US329110
申请日：1994-10-25
申请人： Lawrence Hendler , Michael P. C. Watts
发明人： Lawrence Hendler , Michael P. C. Watts
IPC分类号： G01B11/24 , G01B11/245 , G01N21/88 , G01N21/956 , G01R31/308 , H01L21/66 , G01N21/00
CPC分类号： G01R31/308 , G01N21/95623
摘要： High speed pattern and defect detection in flat panel displays, integrated circuits, photo mask reticles, CRT color masks, printed circuit boards, and any other patterned devices, regular or irregular, uses analog optical computing. Using appropriate illumination and optics, the Fourier transform of the image of a device under test is formed. The Fourier transform components of an ideal pattern are compared to the Fourier transform components of a measured pattern, and differences in relative intensities of the spatial components indicate a defect. A spatial separator is used to direct different components of the Fourier transform in different directions for parallel, simultaneous measurement and analysis. Utilizing Statistical Process Control, and properly comparing the different Fourier transform components, the defect is partially classified. Optical image processing is done in real time at the speed of light. Image acquisition at video rates is not a requirement, therefore detection can be performed on the fly while scanning the device under test.
摘要翻译：使用模拟光学计算的平板显示器，集成电路，光掩模掩模版，CRT彩色掩模，印刷电路板以及任何其他经常或不规则的图案化设备的高速图案和缺陷检测。使用适当的照明和光学元件，形成被测设备的图像的傅里叶变换。将理想图案的傅里叶变换分量与测量图案的傅里叶变换分量进行比较，空间分量的相对强度差表示缺陷。空间分离器用于引导不同方向的傅里叶变换的不同分量进行并行，同时测量和分析。利用统计过程控制，并对不同的傅立叶变换分量进行正确比较，对缺陷进行了部分分类。光学图像处理以光速实时完成。不需要以视频速率进行图像采集，因此可以在扫描被测设备的同时进行检测。

45. 发明授权

US4857738A Absorption measurements of materials 失效
标题翻译：材料的吸收测量
公开(公告)号：US4857738A
公开(公告)日：1989-08-15
申请号：US135119
申请日：1987-12-18
申请人： David W. Myers , Robert G. Ozarski , Thiloma I. Perera , John F. Schipper , Raul V. Tan , Michael P. C. Watts
发明人： David W. Myers , Robert G. Ozarski , Thiloma I. Perera , John F. Schipper , Raul V. Tan , Michael P. C. Watts
IPC分类号： G01N21/84 , G03F7/20
CPC分类号： G03F7/70483 , G01N21/8422
摘要： Two methods of determination of the chemical changes induced in a film of material such as photoresist that has been exposed to electromagnetic radiation. Two methods use measurement of polarized light reflected by the film mounted on a substrate to determine a real refractive index or a complex refractive index of the film. Two other methods use measurement of polarized light by the film mounted on a (partly) transparent substrate to determine a real refractive index or a complex refractive index of the film.
摘要翻译：确定在已经暴露于电磁辐射的光致抗蚀剂等材料的膜中引起的化学变化的两种方法。两种方法使用由安装在衬底上的膜反射的偏振光的测量来确定膜的实际折射率或复折射率。另外两种方法使用通过安装在（部分）透明衬底上的膜来测量偏振光，以确定膜的实际折射率或复合折射率。

46. 发明授权

US4362809A Multilayer photoresist process utilizing an absorbant dye 失效
标题翻译：利用吸收剂染料的多层光刻胶工艺
公开(公告)号：US4362809A
公开(公告)日：1982-12-07
申请号：US248761
申请日：1981-03-30
申请人： Mung Chen , William R. Trutna, Jr. , Michael P. C. Watts , Keith G. Bartlett , Gary Hillis
发明人： Mung Chen , William R. Trutna, Jr. , Michael P. C. Watts , Keith G. Bartlett , Gary Hillis
IPC分类号： G03F7/26 , G03F7/00 , G03F7/09 , G03F7/095 , H01L21/027 , H01L21/30 , G03F7/02 , G03C1/76
CPC分类号： H01L21/30 , G03F7/091
摘要： An improved photoetch technique is presented of the portable-conformable-mask type wherein a thin top layer of resist and a thick planarizing layer are deposited on a substrate and the thin layer is exposed and developed to produce a portable-conformable-mask. The improvement involves dissolving a suitable dye in a layer between the thin top layer and the substrate. The dye is preferably selected to absorb light of the wavelengths used to expose the top layer but does not interfere with processing of the other layers.
摘要翻译：提出了一种改进的光刻技术，其中抗蚀剂的薄顶层和厚的平坦化层沉积在衬底上，并且薄层被曝光和显影以产生便携式一致掩模。该改进涉及将合适的染料溶解在薄顶层和基底之间的层中。优选选择染料以吸收用于暴露顶层的波长的光，但不影响其它层的处理。

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