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    • 43. 发明申请
    • Apparatus for cleaning a wafer
    • 清洁晶片的装置
    • US20070051393A1
    • 2007-03-08
    • US11516101
    • 2006-09-06
    • Mo-Hyun ChoDong-Chul HeoDuk-Lyol LeeTae-Hwan KimTae-Wan Kim
    • Mo-Hyun ChoDong-Chul HeoDuk-Lyol LeeTae-Hwan KimTae-Wan Kim
    • B08B3/00B08B3/04
    • B08B3/04H01L21/67051
    • An apparatus for cleaning a wafer includes a rotary chuck for supporting and rotating a wafer, a cleaning solution supply unit for supplying a cleaning solution onto the wafer, a bowl spaced apart from and surrounding the rotary chuck, and a protrusion portion protruded from the rotary chuck and having a slope face with respect to the rotary chuck. The protrusion portion can prevent an ascending air stream from being generated by a vortex when the rotary chuck rotates. A guide member can be positioned between the bowl and the rotary chuck to guide the cleaning solution downwardly to a bottom portion of the bowl. A protector can extend from an inner side surface of the guide member toward the rotary chuck, to prevent an ascending air stream caused by the vortex.
    • 一种用于清洗晶片的设备包括用于支撑和旋转晶片的旋转卡盘,用于将清洁溶液供应到晶片上的清洁溶液供应单元,与旋转卡盘间隔开并围绕旋转卡盘的碗,以及从旋转盘 并且相对于旋转卡盘具有倾斜面。 当旋转卡盘旋转时,突出部分可以防止上升的气流由涡流产生。 引导构件可以定位在碗和旋转卡盘之间,以将清洁溶液向下引导到碗的底部。 保护器可以从引导构件的内侧表面朝向旋转卡盘延伸,以防止由涡流引起的上升气流。
    • 44. 发明申请
    • Top-loading card adapter
    • 顶部装载卡适配器
    • US20060205258A1
    • 2006-09-14
    • US11122954
    • 2005-05-04
    • Jong-Won ChoTae-Wan Kim
    • Jong-Won ChoTae-Wan Kim
    • H01R13/62
    • H01R13/2442
    • There is provided a card adapter including: a printed circuit board that is provided with a connector connected to an external data processing apparatus at one end thereof; a housing for accommodating the printed circuit board therein, and for exposing and fixing the connector at one side thereof; contact elements which are arranged adjacent to an end opposite to the side at which the connector of the printed circuit board is provided, and are electrically connected with a circuit device of the printed circuit board; and a card holder which is fixed adjacent to the contact elements such that the card is inserted into, and fixed to, the holder to be electrically contacted with the contact elements. The housing has an opening at the upper side corresponding to the card holder such that the card can be inserted or separated through the opening
    • 提供了一种卡适配器,包括:印刷电路板,其设置有连接到其一端的外部数据处理装置的连接器; 用于在其中容纳印刷电路板的外壳,以及用于在其一侧露出和固定连接器; 接触元件,其设置在与设置有印刷电路板的连接器的一侧相对的端部附近,并且与印刷电路板的电路器件电连接; 以及与所述接触元件相邻固定的卡保持器,使得所述卡被插入并固定到所述保持器以与所述接触元件电接触。 壳体在与卡座相对应的上侧具有开口,使得卡可以通过开口插入或分离