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    • 41. 发明申请
    • Method and apparatus for the examination of probes
    • 用于检测探针的方法和装置
    • US20070133086A1
    • 2007-06-14
    • US11330384
    • 2006-01-12
    • Stefan WilhelmEva SimburgerMichael Kempe
    • Stefan WilhelmEva SimburgerMichael Kempe
    • G02B21/06
    • G01N21/6458G02B21/0032G02B21/0076G02B21/008G02B21/16Y10S359/90
    • A method in which probes are examined by means a microscope. For an illuminated sample, spatially coherent light with at least one continuous wavelength range or a continuously tunable wavelength range is generated, and one or more wavelengths or wavelength ranges in the illumination light are selected in dependence on the prespecified method of examination. The probe is then illuminated with the illumination light with the selected wavelengths or wavelength ranges, the illumination light and the emission light coming from the probe are then subsequently separated, whereby the back radiated illumination light is suppressed in the detection beam before the detection and the emission light is detected. In such a method, the selection of the wavelengths or the wavelength ranges of the illumination light is tuned by means of the separation of the detection light and the illumination light and the suppression of the illumination light in such a manner that a prespecified control variable (R) is optimized.
    • 通过显微镜检查探针的方法。 对于照明样品,产生具有至少一个连续波长范围或连续可调波长范围的空间相干光,并且根据预先指定的检查方法来选择照明光中的一个或多个波长或波长范围。 然后用所选择的波长或波长范围的照明光照射探针,随后分离照明光和来自探针的发射光,从而在检测之前在检测光束中抑制背面照射的照明光,并且 检测出发光。 在这种方法中,通过检测光和照明光的分离以及照明光的抑制来调节照明光的波长或波长范围的选择,使得预先指定的控制变量( R)优化。