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    • 50. 发明申请
    • RECESS GATE OF SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
    • 半导体器件的闭合栅及其形成方法
    • US20090039422A1
    • 2009-02-12
    • US12188164
    • 2008-08-07
    • Dae-Young Kim
    • Dae-Young Kim
    • H01L21/28H01L29/78H01L21/67
    • H01L29/1037H01L29/66553H01L29/66583H01L29/66621
    • A method for fabricating a semiconductor device, and more particularly, a method for forming a recess gate is disclosed. The method for forming a recess gate includes forming a first nitride layer over a semiconductor substrate, forming a first nitride layer pattern by selectively etching the first nitride layer to expose a portion of the substrate, forming a spacer over a sidewall of the first nitride layer pattern, forming a recess for a gate channel region by etching the substrate using the first nitride layer pattern and the spacer as an etching mask, forming a gate oxide layer over a sidewall and a bottom surface of the recess, forming a gate poly-silicon layer pattern to bury the recess and a space defined by the spacer, and removing the first nitride layer pattern.
    • 公开了一种用于制造半导体器件的方法,更具体地说,涉及一种用于形成凹槽的方法。 形成凹槽的方法包括在半导体衬底上形成第一氮化物层,通过选择性地蚀刻第一氮化物层以暴露衬底的一部分形成第一氮化物层图案,在第一氮化物层的侧壁上形成间隔物 通过使用第一氮化物层图案和间隔物作为蚀刻掩模蚀刻衬底,形成用于栅极沟道区的凹部,在凹部的侧壁和底表面上形成栅氧化层,形成栅极多晶硅 以掩埋凹部和由间隔物限定的空间,以及去除第一氮化物层图案。