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41. 发明授权

US07136767B2 Apparatus and method for calibration of mass flow controller 有权
公开(公告)号：US07136767B2
公开(公告)日：2006-11-14
申请号：US10178119
申请日：2002-06-24
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： G01F25/00
CPC分类号： G01F1/684 , G01F1/6965 , G01F1/86 , G01F5/00 , G01F25/0053 , G05D7/0635
摘要： A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.

42. 发明授权

US07107834B2 Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects 有权
公开(公告)号：US07107834B2
公开(公告)日：2006-09-19
申请号：US10988026
申请日：2004-11-12
申请人： Paul Meneghini , Ali Shajii
发明人： Paul Meneghini , Ali Shajii
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6847
摘要： A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. At least one bypass passageway, which may be provided in the form of a tube, is positioned in the main conduit between the first and second locations, and the bypass passageway is provided with non-negligible entrance effects that are substantially equal to entrance effects of the sensor passageway, so that a bypass ratio of the apparatus remains constant. A mass flow rate sensor of the present disclosure accurately measures any type of gas but only requires calibration in only one reference gas.

43. 发明申请

US20060173642A1 Apparatus and method for pressure fluctuation insensitive mass flow control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US20060173642A1
公开(公告)日：2006-08-03
申请号：US11304456
申请日：2005-12-15
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： G01F25/00
CPC分类号： G01F15/024 , G01F1/684 , G01F1/6965 , G01F1/86 , G01F5/00 , G01F25/0053 , G05D7/0635 , Y10T137/0379 , Y10T137/0396 , Y10T137/7759 , Y10T137/776 , Y10T137/7761 , Y10T137/87354
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

44. 发明申请

US20060169327A1 Pressure regulation in remote zones 有权
标题翻译：偏远地区的压力调节
公开(公告)号：US20060169327A1
公开(公告)日：2006-08-03
申请号：US11333142
申请日：2006-01-17
申请人： Ali Shajii , Siddharth Nagarkatti , Gordon Hill
发明人： Ali Shajii , Siddharth Nagarkatti , Gordon Hill
IPC分类号： G05D7/06
CPC分类号： G05D16/206 , H01L21/30625 , Y10T137/7761 , Y10T137/7838 , Y10T137/87209 , Y10T137/8733 , Y10T137/8741 , Y10T137/87507 , Y10T137/87772
摘要： A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.
摘要翻译：压力控制系统通过控制流入每个外壳的流动来远程控制一个或多个远程区域内的压力，每个远程区域分别通过导管连接到外壳。在每个外壳内测量流体的压力。根据外壳中测量的压力和导管和区域的已知特性，计算每个区域内的估计压力。对于每个区域，操作每个外壳的入口比例阀和出口比例阀，以便控制流体进入相应外壳的流体的输入流量和流出外壳的输出流量作为压力设定点和估计压力，从而根据压力设定点调节区域内的压力。

45. 发明授权

US07072743B2 Semiconductor manufacturing gas flow divider system and method 有权
标题翻译：半导体制造气体分流器系统及方法
公开(公告)号：US07072743B2
公开(公告)日：2006-07-04
申请号：US10796693
申请日：2004-03-09
申请人： Ali Shajii , Siddharth P. Nagarkatti
发明人： Ali Shajii , Siddharth P. Nagarkatti
IPC分类号： G05D7/00 , G05D11/00
CPC分类号： G05D7/0664 , C23C16/45561 , C23C16/52 , Y10T137/0363 , Y10T137/2524
摘要： A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of flow, at least one in-situ process monitor providing measurements of products produced by each of the flows lines, and a controller connected to the input device and the in-situ process monitor. The controller is programmed to receive the desired ratio of flow through the input device, receive the product measurements from the in-situ process monitor, and calculate a corrected ratio of flow based upon the desired ratio of flow and the product measurements. If the product measurements are not equal, then the corrected ratio of flow will be different than the desired ratio of flow.
摘要翻译：一种用于将单个流分成两个或更多个期望比例的二次流的系统，包括适于接收单个流的入口，连接到入口的至少两个二次流线，适于接收至少一个期望比例的输入装置至少一个原位过程监视器，其提供由每个流水线产生的产品的测量值，以及连接到输入设备和原位过程监控器的控制器。控制器被编程为接收通过输入设备的期望流量比，从原位过程监控器接收产品测量值，并且基于所需的流量比和产品测量值来计算校正的流量比。如果产品测量值不相等，则校正后的流量比将不同于所需的流量比。

46. 发明申请

US20060101908A1 Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects 有权
标题翻译：包括旁路通道的热质量流量传感器和具有相似入口效应的传感器通道
公开(公告)号：US20060101908A1
公开(公告)日：2006-05-18
申请号：US10988026
申请日：2004-11-12
申请人： Paul Meneghini , Ali Shajii
发明人： Paul Meneghini , Ali Shajii
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6847
摘要： A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. At least one bypass passageway, which may be provided in the form of a tube, is positioned in the main conduit between the first and second locations, and the bypass passageway is provided with non-negligible entrance effects that are substantially equal to entrance effects of the sensor passageway, so that a bypass ratio of the apparatus remains constant. A mass flow rate sensor of the present disclosure accurately measures any type of gas but only requires calibration in only one reference gas.
摘要翻译：用于质量流量传感器中用于测量流体流速的感测装置包括用于容纳流体流的主管道和用于在第一位置从主管道分流一部分流体流的传感器通道，并且返回流体的一部分在第二位置处流到导管。可以以管的形式提供的至少一个旁通通道被定位在第一和第二位置之间的主管道中，并且旁路通道具有不可忽略的进入效应，其基本上等于入口效应传感器通道，使得设备的旁路比保持恒定。本公开的质量流量传感器精确地测量任何类型的气体，但仅需要在一个参考气体中进行校准。

47. 发明申请

US20050217346A1 Flow measurement calibration 审中-公开
标题翻译：流量测量校准
公开(公告)号：US20050217346A1
公开(公告)日：2005-10-06
申请号：US10819639
申请日：2004-04-06
申请人： Siddharth Nagarkatti , William Clark , Ali Shajii
发明人： Siddharth Nagarkatti , William Clark , Ali Shajii
IPC分类号： G01F25/00 , G01P21/00
CPC分类号： G01F25/0053 , G01F25/0015
摘要： A flow measurement calibration system and method is presented that actively regulates the pressure of the fluid being tested. A piston is slidably mounted to an inner wall of a chamber, which has a fluid inlet port for receiving an inflow of fluid into the interior of the chamber. The piston moves through the length of the chamber in response to fluid pressure exerted by the fluid flowing into the chamber. A piston actuator imparts motion to the piston, in response to command signals from a controller. The controller is responsive to the output of a pressure sensor, which senses the fluid pressure, and a position/velocity sensor, which senses the position and velocity of the piston. The controller commands the piston actuator to dynamically adjust the position and velocity of the piston so that the fluid pressure remains substantially constant at a desired setpoint.
摘要翻译：提出了一种流量测量校准系统和方法，其主动地调节被测流体的压力。活塞可滑动地安装到腔室的内壁上，所述腔体的内壁具有用于接收流体进入腔室内部的流体入口。活塞响应于流入室内的流体施加的流体压力而移动通过室的长度。响应于来自控制器的命令信号，活塞致动器向活塞施加运动。控制器响应于感测流体压力的压力传感器的输出，以及感测活塞的位置和速度的位置/速度传感器。控制器命令活塞致动器动态地调节活塞的位置和速度，使得流体压力基本保持恒定在所需的设定点。

48. 发明申请

US20050199342A1 Semiconductor manufacturing gas flow divider system and method 有权
标题翻译：半导体制造气体分流器系统及方法
公开(公告)号：US20050199342A1
公开(公告)日：2005-09-15
申请号：US10796693
申请日：2004-03-09
申请人： Ali Shajii , Siddharth Nagarkatti
发明人： Ali Shajii , Siddharth Nagarkatti
IPC分类号： C23F1/00 , F17D3/00
CPC分类号： G05D7/0664 , C23C16/45561 , C23C16/52 , Y10T137/0363 , Y10T137/2524
摘要： A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of flow, at least one in-situ process monitor providing measurements of products produced by each of the flows lines, and a controller connected to the input device and the in-situ process monitor. The controller is programmed to receive the desired ratio of flow through the input device, receive the product measurements from the in-situ process monitor, and calculate a corrected ratio of flow based upon the desired ratio of flow and the product measurements. If the product measurements are not equal, then the corrected ratio of flow will be different than the desired ratio of flow.
摘要翻译：一种用于将单个流分成两个或更多个期望比例的二次流的系统，包括适于接收单个流的入口，连接到入口的至少两个二次流线，适于接收至少一个期望比例的输入装置至少一个原位过程监视器，其提供由每个流水线产生的产品的测量值，以及连接到输入设备和原位过程监控器的控制器。控制器被编程为接收通过输入设备的期望流量比，从原位过程监控器接收产品测量值，并且基于所需的流量比和产品测量值来计算校正的流量比。如果产品测量值不相等，则校正后的流量比将不同于所需的流量比。

49. 发明授权

US06868723B2 Thermal anemometry mass flow measurement apparatus and method 有权
标题翻译：热风量法质量流量测量装置及方法
公开(公告)号：US06868723B2
公开(公告)日：2005-03-22
申请号：US10440371
申请日：2003-05-16
申请人： Ali Shajii , Nicholas Eugene Kottenstette , R. Leonard Myatt , Jeffrey Vincent Anastas
发明人： Ali Shajii , Nicholas Eugene Kottenstette , R. Leonard Myatt , Jeffrey Vincent Anastas
IPC分类号： G01F1/684 , G05D7/06 , G01F1/66
CPC分类号： G05D7/0635 , G01F1/684 , G01F1/6842
摘要： A mass flow measurement apparatus including a flow path defined by a tubular side wall, a probe extending through the side wall into the flow path so that a first portion of the probe is located in the flow path and a second portion of the probe, extends out of the side wall, a heater element secured to the probe, and a seal preventing fluid flowing through the flow path from contacting the heater element.
摘要翻译：一种质量流量测量装置，包括由管状侧壁限定的流路，探针通过侧壁延伸到流动路径中，使得探针的第一部分位于流路中，并且探针的第二部分延伸离开侧壁，固定到探针的加热器元件，以及防止流经流路的流体接触加热器元件的密封件。

50. 发明授权

US06779394B2 Apparatus and method for thermal management of a mass flow controller 有权
标题翻译：质量流量控制器的热管理装置和方法
公开(公告)号：US06779394B2
公开(公告)日：2004-08-24
申请号：US10032258
申请日：2001-12-21
申请人： Jesse Ambrosina , Isao Suzuki , Ali Shajii
发明人： Jesse Ambrosina , Isao Suzuki , Ali Shajii
IPC分类号： G01F168
CPC分类号： G01F1/6847 , G01F1/684 , G01F5/00 , G01F15/04 , G05D7/0635
摘要： A thermal mass flow controller includes a sensor assembly, a valve assembly, and mass flow controller housing. A thermal ground limits the conductive thermal path between the mass flow controller housing and the sensor assembly and, due to the limited cross-section of the thermal ground, substantially eliminates externally imposed thermal gradients within the sensor assembly. The controller also includes a thermally dissipative element that conducts thermal energy along a path from the valve assembly away from the sensor assembly.
摘要翻译：热质量流量控制器包括传感器组件，阀组件和质量流量控制器壳体。热接地限制质量流量控制器壳体和传感器组件之间的导电热路径，并且由于热地面的有限横截面，基本上消除了传感器组件内的外部施加的热梯度。该控制器还包括热耗散元件，其沿着从阀组件远离传感器组件的路径传导热能。

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