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    • 42. 发明授权
    • Method for forming a multi chip module (MCM)
    • 多芯片模块(MCM)的形成方法
    • US5578526A
    • 1996-11-26
    • US431452
    • 1995-05-01
    • Salman AkramWarren FarnworthAlan Wood
    • Salman AkramWarren FarnworthAlan Wood
    • G01R1/04G01R31/28H01L21/66H01L23/13H01L23/32H01L21/60
    • G01R1/04G01R31/2863H01L22/22H01L23/13H01L23/32H01L2224/16145H01L2224/48227H01L2924/09701H01L2924/10253
    • A method for forming a multi chip module for singulated semiconductor dice or dice contained on a wafer is provided. The method includes forming an interconnect adapted to support and establish an electrical connection with the dice. The interconnect includes a substrate formed of a material such as silicon with raised contact members. The raised contact members include projections adapted to penetrate contact locations on the dice (e.g., bond pads) to a limited penetration depth to establish the electrical connection. A conductive layer and conductive traces are formed on the substrate to form an electrical path to the contact members. Programmable links, such as fuses or anti-fuses, can be included in the electrical path for enabling or disabling select dice of the module. A packaged multi chip module assembly can be formed by encapsulation of the dice and substrate in an insulating material or by forming a ceramic base and cover.
    • 提供一种用于形成包含在晶片上的单片半导体晶片或骰子的多芯片模块的方法。 该方法包括形成适于支撑并建立与骰子的电连接的互连。 互连包括由诸如具有凸起接触构件的硅的材料形成的衬底。 凸起的接触构件包括适于将骰子(例如,接合垫)上的接触位置穿透到有限的穿透深度以建立电连接的突起。 导电层和导电迹线形成在衬底上以形成到接触构件的电路径。 可编程链路,如保险丝或反熔丝,可以包含在电气路径中,用于启用或禁用模块的选择骰子。 封装的多芯片模块组件可以通过将骰子和基板封装在绝缘材料中或通过形成陶瓷基底和盖而形成。