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    • 44. 发明授权
    • High-performance energy transfer method for thermal processing applications
    • 用于热处理应用的高性能能量传递方法
    • US06753272B1
    • 2004-06-22
    • US09669039
    • 2000-09-25
    • Yong Jin LeeMehrdad M. MoslehiJalil KamaliSergey Belikov
    • Yong Jin LeeMehrdad M. MoslehiJalil KamaliSergey Belikov
    • H01L21324
    • H01L21/67115C23C16/481
    • An apparatus and method supports thermal processing of a microelectronic device such as a semiconductor chip in a substrate by heating the substrate with secondary radiation from an energy transfer device 40, which has a first set of energy transfer regions comprised of an emissive and thermally conductive material, and a second set of thermally insulating regions comprised of a reduced emissivity and reduced thermal conductivity material or free space. A multi-zone-radiant energy source 30 provides radiative energy to energy transfer device 40, with a process controller 36, preferably a multi-zone controller, altering the amount of energy provided by each heat zone associated with each emissive region of energy transfer device 40. Sensors detect the thermal energy level of each energy transfer region to allow controller 36 to adjust the secondary radiation emitted by each region in real time, resulting in a predetermined and controlled distribution of thermal energy on substrate 20. Energy transfer device 40 can have plural emissive and thermally conductive concentric rings separated from each other by reduced emissivity and reduced thermal conductivity regions such as free space gaps 42. Alternatively, a solid plate 54 having an emissive coating or emissive surface 52 can have reduced emissivity and reduced conductivity isolation regions such as trenches 56 for defining the multi-zone high-emissivity and high thermal conductivity energy transfer regions.
    • 一种装置和方法通过用来自能量转移装置40的二次辐射加热衬底来支持诸如半导体芯片之类的微电子器件的热处理,该能量转移装置具有由发射和导热材料组成的第一组能量转移区 以及由减少的发射率和降低的热导率材料或自由空间组成的第二组热绝缘区域。 多区域辐射能量源30向能量传递装置40提供辐射能,其中过程控制器36,优选地,多区域控制器,改变与能量传递装置的每个发射区域相关联的每个加热区域提供的能量的量 传感器检测每个能量转移区域的热能水平,以允许控制器36实时地调整由每个区域发射的次级辐射,从而导致基板20上预定和受控的热能分布。能量传递装置40可具有 多个发射和导热的同心环通过降低的发射率和降低的热导率区域(例如自由空间间隙42)彼此分离。或者,具有发射涂层或发射表面52的固体板54可以具有降低的发射率和降低的电导率隔离区域, 作为用于限定多区高发射率和高热导率的沟槽56 ergy转移区域。
    • 46. 发明授权
    • Opening/closing device for discharge hole of filter-drier
    • 过滤干燥器排气孔开/关装置
    • US6073363A
    • 2000-06-13
    • US182181
    • 1998-10-30
    • Yong Jin Lee
    • Yong Jin Lee
    • B01D46/42B01D50/00F26B25/12F26B19/00
    • F26B25/12
    • An opening/closing device for a discharge hole of a filter-drier is disclosed, in which an outer shell of a driving means for driving the opening/closing device of the discharge hole is sealed, so that during the discharge of the processed powders, the processed powders can be prevented from being introduced into the outer shell. A discharge tube 1 is fastened to the discharge hole 4 by means of a fastening device 1a, so that processed drug powders can be discharged though a discharge tube hole 4a. A cylindrical opening 2c is formed inside a flange 2b of the outer shell 2. A sealing cover 3b extends from the opening/closing plate 3 to be inserted into the opening 2c, and the sealing cover 3b is longer than the actuation distance of the opening/closing plate 3. The sealing cover 3b does not depart from the opening 2c, but is always maintained within the opening 2c to seal off the interior of the outer shell 2. Consequently, when the processed drug powders are discharged through the discharge tube 1 and through the discharge tube hole 4a, the drug powders are not introduced into the interior of the outer shell 2.
    • 公开了一种用于过滤干燥器排放孔的打开/关闭装置,其中用于驱动排放孔的打开/关闭装置的驱动装置的外壳被密封,使得在处理的粉末的排放期间, 可以防止加工的粉末被引入到外壳中。 放电管1通过紧固装置1a紧固到排出孔4,从而可以通过放电管孔4a排出处理后的药物粉末。 在外壳2的凸缘2b的内部形成有圆筒状的开口部2c。密封盖3b从开闭板3延伸而插入开口部2c,密封盖3b比开口部的致动距离长 闭合板3.密封盖3b不从开口2c离开,而是始终保持在开口2c内,以密封外壳2的内部。因此,当处理药物通过放电管1排出时 并且通过放电管孔4a,药物粉末不被引入外壳2的内部。